JPS63134126A - Regulating device for fluid level in machining tank of electric discharge machine - Google Patents

Regulating device for fluid level in machining tank of electric discharge machine

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Publication number
JPS63134126A
JPS63134126A JP27813986A JP27813986A JPS63134126A JP S63134126 A JPS63134126 A JP S63134126A JP 27813986 A JP27813986 A JP 27813986A JP 27813986 A JP27813986 A JP 27813986A JP S63134126 A JPS63134126 A JP S63134126A
Authority
JP
Japan
Prior art keywords
machining
height
fluid level
machining fluid
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27813986A
Other languages
Japanese (ja)
Inventor
Shiro Sasaki
史朗 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP27813986A priority Critical patent/JPS63134126A/en
Publication of JPS63134126A publication Critical patent/JPS63134126A/en
Pending legal-status Critical Current

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  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

PURPOSE:To automatically change height of a fluid level, by calculating the height of the machining fluid level for a workpiece in a machining tank by an NC unit to be detected and controlling the height of the fluid level driving a fluid level regulating means while supplying and discharging machining fluid. CONSTITUTION:A control unit 12, setting a coordinate value to a predetermined value, stores in memory the coordinate value, in which the present value in the direction of a Z-axis corresponds to zero, and a coordinate value A of height of machining fluid level is determined from the present value and a fluid level safety height coordinate value. Machining fluid level height B is always detected by a detecting device 13 and compared with the coordinate value A of height of machining fluid, and if the value A is larger, a filling pump 15 is actuated allowing machining fluid 4 to flow into a machining tank 3 from a fluid tank 16, and a dam adjusting plate 10 is moved upward by turning a thread 8 by a motor 6. On the contrary, if the height B is larger, the fluid 4 is discharged by actuating a fluid discharge valve 14, and the dam adjusting plate 10 is moved downward. If the values A, B are placed in an agreement condition, the height of a fluid level is controlled by stopping the motor 6 and the discharge valve 14.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、放電加工装置の加工槽内の加工液面の高さ
を自動的に調整する手段に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a means for automatically adjusting the height of a machining liquid level in a machining tank of an electric discharge machining apparatus.

〔従来の技術〕[Conventional technology]

第4図(a)は例えば従来の放電加工装置の加工槽の一
例を示す図であり、図において、(1)は工具電離、(
2)は工具電極(1)と微小間隙を介して対向配置され
た被加工物、(3)は被加工物(2)を載置する加工槽
、α4は加工槽(3)に満たさtl、1ニー加工液、G
Oは加工Fi(4)’にオーバフローさせi(がら加工
液(4)面高さを決める基調整板、@は基調整板(1(
Iを所定の高さに設定(・τ固定でろ設定ピン、@は設
定ピン翰を挿入する調整穴である。tζお、(5)は加
工液面高さ調整手段であり、堰碑整板QG、設定ビンの
、調整穴(ハ)から構成されている。
FIG. 4(a) is a diagram showing an example of a machining tank of a conventional electrical discharge machining device, and in the figure, (1) indicates tool ionization, (
2) is a workpiece placed opposite to the tool electrode (1) through a minute gap, (3) is a machining tank in which the workpiece (2) is placed, α4 is a tl filled with the machining tank (3), 1 Knee processing fluid, G
O is the base adjustment plate that determines the surface height of the machining fluid (4) that overflows into the machining Fi (4)', @ is the base adjustment plate (1 (
Set I to a predetermined height (・τ is fixed at the setting pin, @ is the adjustment hole into which the setting pin is inserted. tζO, (5) is the means for adjusting the machining liquid level, and the weir plate adjustment plate It consists of QG, setting bin, and adjustment hole (c).

次に動作について説明する。加工[(3)の中に設置さ
れた被加工物(2)を加、ニオろ場合には、被加工物(
2)の扁さに対応しfコ加工液(4)面を設定する必要
がある。従って加工液(4)面高さを設定する場合には
、人手を介し・て加工液面高さ調整手段(5)の基調整
板Q07.、所定の高さにあるvM整穴(ハ)に設定ビ
ン(イ)を挿入して固定することにより行う。この場合
に加工液(4)は、第1図(b)に示す様に基調整板O
Gからオーバーフローするので加工液(4)面高さは、
上記オーバフローする高さに設定されることになる。
Next, the operation will be explained. Processing [When processing the workpiece (2) installed in (3),
It is necessary to set the f-co processing liquid (4) surface corresponding to the flatness of 2). Therefore, when setting the machining fluid (4) surface height, the base adjustment plate Q07 of the machining fluid level height adjusting means (5) must be manually set. This is done by inserting and fixing the setting bin (A) into the vM adjustment hole (C) at a predetermined height. In this case, the machining fluid (4) is applied to the substrate adjusting plate as shown in FIG. 1(b).
Since it overflows from G, the height of the machining fluid (4) surface is
The height will be set to the above-mentioned overflow height.

〔発明が解決し、ようとする問題点〕[Problems that the invention attempts to solve]

従来の放?ir加工装置の加工槽は以上の様に構成され
ているので、加工液面高さの調整は加工状況に応じて人
手を介して調整しなけれはならず、更に一度調整すると
加工途中においでは、調整変更することができないとい
う問題点があっTこ。
Traditional release? Since the machining tank of the IR machining equipment is configured as described above, the machining liquid level must be adjusted manually depending on the machining situation, and once adjusted, it may occur during machining. There is a problem that the adjustment cannot be changed.

この発明は上記の様な問題点を解消才ろ為になされたも
ので、人手を介し、て加工液面調整を無くすと共に、N
o装置により指令された値lこ加工槽の加工液面が調整
できる放¥Iw加工装置の加工槽液面調整装置を得ろこ
さを目的とする。
This invention was made to solve the above-mentioned problems, and it eliminates the need for manual adjustment of the machining liquid level, and
An object of the present invention is to provide a machining tank liquid level adjusting device for a machining machine capable of adjusting the machining fluid level in a machining tank by a value commanded by an o device.

〔問題点を解決する為の手段〕 この発明に係る放電加工装置は、加工液面高さ検出手段
により加工槽内の加工液面高さを検出してhcC装置入
力寸ろと共に、上記No装置の指令により加工液面高さ
シム1整手段を駆動するものである。
[Means for Solving the Problems] The electric discharge machining apparatus according to the present invention detects the machining fluid level height in the machining tank by the machining fluid level height detection means, and detects the machining fluid level height in the machining tank together with the hcC device input dimension. The machining liquid level height shim 1 adjusting means is driven by the command.

〔作用〕[Effect]

この発明においては、加工槽内の被加工物に対才ろ必要
な加工液面の高さをNC装置が演算して、加工液面高さ
検出手段により加工液面の高さを検出(、っつ加工it
供給あるいは排出すると共に加工液置局さtAfM、手
段を駆動し・で、必要な加工液面の高さを調整でる。
In this invention, the NC device calculates the height of the machining liquid level required for the workpiece in the machining tank, and the machining liquid level detection means detects the height of the machining liquid level (, It's processing it
The required height of the machining fluid level can be adjusted by supplying or discharging the machining fluid and driving the means for positioning the machining fluid tAfM.

〔発明の実施例〕[Embodiments of the invention]

以下、この発明の一実施例を図について説明オろ。なお
、第4図に示す装置と同一符号は同一部分を示し説明は
省略する。
An embodiment of the present invention will be described below with reference to the drawings. Note that the same reference numerals as in the apparatus shown in FIG. 4 indicate the same parts, and a description thereof will be omitted.

第1図においで、(0)はボールねじ(8)を正転、逆
転させるモータ、(7)はモータ(6)の慣性力を抑制
するブレーキ、(9)はボールねじ(8)に螺合された
雌ねじであり、基調整板αaに固定されると共に基調整
板aOを上、下(こ移動させる。α旧まボールねじ(8
)の軸受け、口はへa′!Arrx、Haりは加工槽(
3)内の加工F1.(4)面の高さを検出するフロート
、113Jはフロート(13aJで検出し1こ値を電気
信号に変換する変換器、(13りは変換器(13b)か
らの検出信号を処理してNo装置(2)に出力する液面
高さ検出器、αりはNO装置■の指令により動作して、
加工槽(3)円から加工液(4)を加工液タンクQll
)に排出する加工液排出弁、09はNo装置(イ)の指
令により動作して、加工液タンクαGから加工槽(3)
に加工液(4)を早急に供給オろ加工液急速充満ポンプ
である。なお(5)は従来装置と同様な加工液面高さ調
整手段であり、モータ(6)、ブレーキ(7ン、ボール
ねじ(8)、環ネジ(9)。
In Fig. 1, (0) is the motor that rotates the ball screw (8) in the forward and reverse directions, (7) is the brake that suppresses the inertia force of the motor (6), and (9) is the screw on the ball screw (8). It is a female thread that is fixed to the base adjustment plate αa, and also moves the base adjustment plate aO up and down.
) bearing, the mouth is a′! Arrx, Hari is a processing tank (
3) Processing F1. (4) A float that detects the height of the surface, 113J is a float (13aJ detects it and a converter that converts the value into an electrical signal, (13i is a converter that processes the detection signal from the converter (13b) and The liquid level height detector that outputs to the device (2) operates according to the command from the NO device ■.
Transfer the machining fluid (4) from the machining tank (3) to the machining fluid tank Qll.
) The machining fluid discharge valve 09 operates according to the command from the No. device (a) to drain the machining fluid from the machining fluid tank αG to the machining tank (3).
This is a rapid filling pump for processing liquid (4). Note that (5) is a processing fluid level adjustment means similar to the conventional device, which includes a motor (6), a brake (7), a ball screw (8), and a ring screw (9).

基調整板αO9軸受けα刀から構成されており、又、0
3は加工液面高さ検出手段であり、フロートttaa)
 。
It consists of a base adjustment plate αO9 bearing α, and also 0
3 is a processing liquid level detection means, which is a float ttaa)
.

変換器(18h)、 M面高さ検出器(18QJから構
成されており、更に(イ)は加工液供給排出手段であり
、加工液排出弁αも加工液急速充満ポンプ(イ)、加工
液タンクOGから構成されている。
It consists of a converter (18h), an M-plane height detector (18QJ), and (a) is a machining fluid supply and discharge means, and a machining fluid discharge valve α is also a machining fluid rapid filling pump (a), a machining fluid Consists of tank OG.

なお、第2図はこの発明の一実施例の制御動作を示すN
o装置のフローチャート図である。又、第3図は被加工
物(2)に対才ろ加工電極<1)の垂直方向を表わす2
軸の方向の各要素の座標値を示す図であり、図において
、αηは加工液安全高さ座標値、(至)は加工液面高さ
機械座標値、QLJは座標値設定時の機械座標値、翰は
2@機械座標原点、3Dは加工液面位置座標値、(財)
は機械座標値、(イ)はZ軸である。
Note that FIG. 2 shows the control operation of an embodiment of the present invention.
It is a flowchart figure of o apparatus. In addition, Fig. 3 shows the perpendicular direction of the diagonal machining electrode <1) to the workpiece (2).
This is a diagram showing the coordinate values of each element in the direction of the axis. In the diagram, αη is the machining fluid safety height coordinate value, (to) is the machining fluid level height machine coordinate value, and QLJ is the machine coordinate value when setting the coordinate value. The value is 2@machine coordinate origin, 3D is the machining fluid level position coordinate value, (Foundation)
is the machine coordinate value, and (a) is the Z axis.

次に動作について説明する。第1図〜第3図において、
まず、座標値をNo制御装置@により所定の値に設定す
る〔第2図の(9)により座標値設定する〕と2@方向
現在値が零に相当する機械座標値@が第2図の(IOI
Jに示す様に機械座標値が記憶がなされろ。この記憶さ
れた機械座標値にとNC装置叫により設定される加工液
面安全高さ座標値α力とから加工液面高さ機械座標値側
を決定する〔第2図の+102.lの加工液面高さ決定
「A」〕。加工液面高さは加工液面高さ検出装置(2)
により常1こ検出されて第2図の+108)の加工液面
高さ検出「B」に格納され、上記決定しtコ加工液面高
さ機械座標値〔第2図の(102〕に示す加工液面高さ
決定rAJと上記検出された加工液面高さ機械座標値〔
第2図の(103月こ示す加工液面高さ検出rBJとを
第2図の(104JでrAJとrBJを比較する。
Next, the operation will be explained. In Figures 1 to 3,
First, the coordinate values are set to predetermined values by the No. control device @ [coordinate values are set according to (9) in Figure 2], and the machine coordinate values @ corresponding to the current value of the 2@ direction are set to zero in Figure 2. (IOI
Memorize the machine coordinate values as shown in J. The machining fluid level height on the machine coordinate value side is determined from this stored machine coordinate value and the machining fluid level safe height coordinate value α set by the NC device command [+102 in FIG. Determination of the machining liquid level height of l [A]]. The machining fluid level height is measured by the machining fluid level detection device (2)
1 is always detected and stored in the machining fluid level height detection "B" at +108) in Figure 2, and the machining fluid level height machine coordinate value determined above is shown in (102) in Figure 2. Processing liquid level height determination rAJ and the machine coordinate value of the processing liquid level height detected above [
Compare rAJ and rBJ in Figure 2 (104J) with machining fluid level height detection rBJ shown in Figure 2 (103).

比較しTこ結果、「A」の万が太きいならば第2図のt
 105JのN□に進み加工液急速充満ポンプα9を第
2図の(106)の加工液急速充満入により作動させ加
工液タンクOQから加工槽(3)内に加工液(4)を流
入させろと同時にモータ(6)を第2図の(107Jの
モータ回転入により作動させる。上記モータ(6)の作
動によりボールねじ(8)を回転させ、その回転により
雌ねじ(9)を上に動かし基調整板αOが上に動くこと
で加工液面の高さを調整する。この繰り返しにより上記
rAJとrBJが一致し1こ状態になると上記モータ(
6)と加工液急速充満ポンプを第2図の(108)のモ
ータ回転切及び+109Jの加工故急速充満切により停
止させ、設定される加工液面の高さになるよう制御する
。ま1こ、rBJO方が太きいならば第2図の(105
JのYesに進み加工液排出弁α4+を第2図の(II
OJに示す加工液タンクにより作動させ加工槽(3)内
の加工液(4)全加工液タンク0eに排出させると同時
にモータ(6)ヲ第2図の(107)のモータ回転入に
より作動させる5、上記モータ(6)の作動によりボー
ルねじ(8)ヲ回転させ、その回転によりめねじ(9)
を下に動かし基調整板00が下に動くことで加工液面の
高さを調整する。この繰り返しにより上記1゛A」とr
BJが一致し1こ状態になると上記モータ(6ンと加工
液排出弁を第2図のtlo13)のモータ回転切及びt
109AJ  の加工液タンクにより停止させ、設定さ
れる加工液面の高さになるよう制御する。基調整板00
より加工液(4)が上側にある場合は第1図(b)に示
す様に基調整板QO部からも加工液は排出されるように
なっている。
Compare T. As a result, if "A" is thick, then t in Figure 2
105J, proceed to N At the same time, the motor (6) is activated by turning on the motor (107J) as shown in Fig. 2.The operation of the motor (6) rotates the ball screw (8), and this rotation moves the female screw (9) upward for base adjustment. The height of the machining liquid level is adjusted by moving the plate αO upward.By repeating this, rAJ and rBJ become equal, and when the state is reached, the motor (
6) The machining liquid rapid filling pump is stopped by turning off the motor rotation at (108) in FIG. 2 and cutting off the machining rapid filling at +109J, and is controlled so that the machining liquid level reaches the set height. Well, if rBJO is thicker, then (105
Go to Yes in J and close the machining fluid discharge valve α4+ (II
It is activated by the machining fluid tank shown in OJ, and the machining fluid (4) in the machining tank (3) is all discharged into the machining fluid tank 0e, and at the same time, the motor (6) is activated by turning on the motor (107) in Fig. 2. 5. The ball screw (8) is rotated by the operation of the motor (6), and the female screw (9) is rotated by the rotation.
The height of the machining liquid level is adjusted by moving the base adjustment plate 00 downward. By repeating this, the above 1゛A'' and r
When the BJ matches and reaches the state of 1, turn off the motor rotation of the above motor (6 and machining fluid discharge valve tlo13 in Figure 2) and turn off the t.
It is stopped by a machining fluid tank of 109 AJ and controlled so that the machining fluid level reaches the set height. Base adjustment plate 00
When the machining fluid (4) is on the upper side, the machining fluid is also discharged from the QO portion of the base adjustment plate as shown in FIG. 1(b).

なお、上記実施例では加工液面高さ調整手段(5)を動
かす手段としてモータ(6)を使用しているが、油圧、
窒素圧、水圧による駆動でもよい。
In the above embodiment, the motor (6) is used as a means for moving the machining fluid level adjustment means (5), but hydraulic pressure,
It may also be driven by nitrogen pressure or water pressure.

〔発明の効果〕〔Effect of the invention〕

以上の様に、この発明によれば加工槽内の被工作物に対
する加工液面の高さをNo装置が演算して決定し、加工
液面高さ検出手段により加工液面の高さを検出すると共
に加工液を供給あるいは排出しつつ、加工液面高さ調整
手段を駆動して、上記演算し1こ高さになる様に制御し
Tこので、加工液面高さの変更に人手を介する必要がな
くなり迅・速且つ自動的に行うことができる効果がある
As described above, according to the present invention, the No device calculates and determines the height of the machining liquid level with respect to the workpiece in the machining tank, and the machining liquid level detection means detects the height of the machining liquid level. At the same time, while supplying or discharging the machining fluid, the machining fluid level height adjustment means is driven and controlled so that the height is equal to 1. There is an effect that it can be done quickly, quickly and automatically without the need for intervention.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(11)はこの発明の一実施例による放電加工装
置の加工槽を示す構成図、第1図(h)はこの発明の一
実施例による放電加工装置の加工槽の側面図、第2図は
この発明の一実施例による制御動作を示オヘC装置のフ
ローチセート図、第3図は加工液面高さ決定時の2軸方
向の各要素の座標値を示す図、第4図(a)は従来の放
電加工装置の加工槽を示f構成図、第4図(b)は従来
の放電加工装置の加工槽の側面図である。 図中、(2)は被加工物、(3)は加工槽、(4)は加
工液、(5)は加工液面高さ調整手段、(イ)はNo装
置、側は加工液面高さ検出手段、閃は加工液供給排出手
段である。 なお、図中同一符号は同−又は相当部分を示す。
FIG. 1(11) is a configuration diagram showing a machining tank of an electrical discharge machining apparatus according to an embodiment of the present invention, FIG. Figure 2 shows the control operation according to an embodiment of the present invention, and Figure 3 shows the coordinate values of each element in two axes when determining the machining liquid level. FIG. 4A is a block diagram showing a machining tank of a conventional electrical discharge machining device, and FIG. 4(b) is a side view of the machining tank of a conventional electrical discharge machining device. In the figure, (2) is the workpiece, (3) is the machining tank, (4) is the machining fluid, (5) is the machining fluid level adjustment means, (a) is the No. device, and the side is the machining fluid level height. The flash is the machining fluid supply and discharge means. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】[Claims] 加工槽内の加工液面高さを検出する加工液面高さ検出手
段と、上記加工槽に対して加工液を供給あるいは排出す
る加工液供給排出手段と、上記加工槽内に載置された被
加工物の座標値から上記加工槽内の加工液面高さを演算
し、該演算結果により上記加工液供給排出手段及び加工
液面高さ調整手段を作動する指令を出力し、上記加工液
面高さ検出手段によって検出された加工液面高さが、上
記演算された加工液面高さに合致した時に、上記加工液
面高さ調整手段及び加工液供給排出手段の作動を停止さ
せる指令を出力するNC装置とを備えたことを特徴とす
る放電加工装置の加工槽液面調整装置。
A machining fluid level detection means for detecting the machining fluid level height in the machining tank, a machining fluid supply/discharge means for supplying or discharging the machining fluid to or from the machining tank, and a machining fluid level detection means for detecting the machining fluid level height in the machining tank; The height of the machining fluid level in the machining tank is calculated from the coordinate values of the workpiece, and based on the calculation result, a command to operate the machining fluid supply and discharge means and the machining fluid level height adjustment means is output, and the machining fluid level is increased. A command to stop the operation of the machining fluid level adjusting means and the machining fluid supply and discharge means when the machining fluid level height detected by the surface height detection means matches the machining fluid level height calculated above. What is claimed is: 1. A machining tank liquid level adjustment device for an electrical discharge machining device, characterized in that the device is equipped with an NC device that outputs.
JP27813986A 1986-11-21 1986-11-21 Regulating device for fluid level in machining tank of electric discharge machine Pending JPS63134126A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27813986A JPS63134126A (en) 1986-11-21 1986-11-21 Regulating device for fluid level in machining tank of electric discharge machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27813986A JPS63134126A (en) 1986-11-21 1986-11-21 Regulating device for fluid level in machining tank of electric discharge machine

Publications (1)

Publication Number Publication Date
JPS63134126A true JPS63134126A (en) 1988-06-06

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JP27813986A Pending JPS63134126A (en) 1986-11-21 1986-11-21 Regulating device for fluid level in machining tank of electric discharge machine

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4978827A (en) * 1988-12-16 1990-12-18 Mitsubishi Denki Kabushiki Kaisha Machining tank with decomposed gas removal
JPH03131424A (en) * 1989-10-11 1991-06-05 Shizuoka Seiki Co Ltd Processing liquid controller for electro-chemical finishing machine
US5081332A (en) * 1988-11-04 1992-01-14 Fanuc Ltd. Electrical discharge machine with a management information display function
WO2003049891A1 (en) * 2001-12-12 2003-06-19 Mitsubishi Denki Kabushiki Kaisha Cad/cam unit for electric discharge machine
EP1249294A3 (en) * 2001-04-12 2004-12-29 Elenix Inc. Small hole electric discharge machine drill provided with depth-specific processing means and method of depth-specific processing with small hole electric discharge machine drill
JP2011131361A (en) * 2009-12-25 2011-07-07 Ihi Corp Electrochemical machining device and method
CN110039140A (en) * 2019-04-09 2019-07-23 清华大学 The device and method of the alignment of insulating materials workpiece surface and the regulation of immersion liquid depth
US11077510B2 (en) * 2018-03-26 2021-08-03 Sodick Co., Ltd. Fine hole electric discharge machine

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5081332A (en) * 1988-11-04 1992-01-14 Fanuc Ltd. Electrical discharge machine with a management information display function
US4978827A (en) * 1988-12-16 1990-12-18 Mitsubishi Denki Kabushiki Kaisha Machining tank with decomposed gas removal
JPH03131424A (en) * 1989-10-11 1991-06-05 Shizuoka Seiki Co Ltd Processing liquid controller for electro-chemical finishing machine
EP1249294A3 (en) * 2001-04-12 2004-12-29 Elenix Inc. Small hole electric discharge machine drill provided with depth-specific processing means and method of depth-specific processing with small hole electric discharge machine drill
WO2003049891A1 (en) * 2001-12-12 2003-06-19 Mitsubishi Denki Kabushiki Kaisha Cad/cam unit for electric discharge machine
US6791053B2 (en) * 2001-12-12 2004-09-14 Mitsubishi Denki Kabushiki Kaisha Cad/cam device for electric discharge machine
JP2011131361A (en) * 2009-12-25 2011-07-07 Ihi Corp Electrochemical machining device and method
US11077510B2 (en) * 2018-03-26 2021-08-03 Sodick Co., Ltd. Fine hole electric discharge machine
CN110039140A (en) * 2019-04-09 2019-07-23 清华大学 The device and method of the alignment of insulating materials workpiece surface and the regulation of immersion liquid depth

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