JP2008020102A - Fluid supply device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve a problem that control of a flow rate becomes unstable when the flow rate of raw fuel supplied to a cogeneration system and a semiconductor manufacturing device is largely fluctuated. <P>SOLUTION: In this fluid supply device composed of a booster machine for raising a pressure of the fluid, a pressure adjustment valve for adjusting the pressure to a prescribed pressure, a flow rate control adjustment valve for automatically adjusting a flow rate of the fluid of the prescribed pressure according to a flow rate control signal, a flow rate sensor for detecting the flow rate of flowing fluid, and a flow rate control portion for controlling a flow rate control signal so that a value of the flow rate detecting signal becomes approximately equal to a value of a predetermined flow rate setting signal, and supplying the fluid of the desired flow rate, the pressure adjustment valve is substituted by a proportional control pressure adjusting machine, and the proportional control pressure adjusting machine adjusts a pressure of the pressure-raised fluid to the predetermined adjustment pressure according to the value of the flow rate setting signal so that differential pressure of a primary pressure and a secondary pressure of the flow rate control adjustment value is kept within a proper range. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a fluid supply apparatus that adjusts flow control of raw fuel supplied to a cogeneration system, a semiconductor manufacturing apparatus, or the like.

  FIG. 9 is a configuration diagram of a raw fuel fluid supply device of a conventional cogeneration system.

  The fluid supply apparatus shown in FIG. 1 includes a booster 2 that boosts the fluid of raw fuel (air, city gas, nitrogen, hydrogen, etc.) to a predetermined pressure, and measures the pressure of the fluid at a plurality of predetermined locations. 1 pressure gauge 3, 2nd pressure gauge 4 and 3rd pressure gauge 5, mass flow controller 9 which performs flow control based on the value of predetermined flow setting signal S5 set by flow setting circuit 26, and said flow rate The check valve 10 is configured to supply the adjusted fluid in the forward direction and prevent the flow in the reverse direction.

In the figure, the fuel cell module 1 generates power by a chemical reaction of the supplied raw fuel and also generates high-temperature exhaust gas. The exhaust gas is discharged from the exhaust pipe 17 and supplied to a heat exchanger (not shown), where the heat is recovered and converted into hot water or the like.

  Since the mass flow controller 9 has a characteristic capable of performing flow rate control in a wide range from a small flow rate to a large flow rate, it can sufficiently cope with a wide setting range of the flow rate setting signal S5.

  In the above-described fluid supply device, the flow rate of the raw fuel is greatly increased or decreased at the time of starting and stopping, load fluctuation, etc., but the flow control is possible even if the flow rate of the raw fuel fluctuates significantly by using the mass flow controller 9. It becomes possible. (For example, Patent Document 1)

  There is also a cogeneration system using the flow control valve 7 shown in FIG. 10 that performs flow control with a pressure drop (differential pressure) between the input and output that is smaller than that of the mass flow controller 9.

  In the cogeneration system shown in FIG. 10, the mass flow controller 9 is replaced with the flow control valve 7, and the value of the flow rate setting signal S 5 determined by the flow controller 18 and the flow rate of the fluid flowing through the flow control valve 7 are obtained. Based on the value of the flow rate detection signal S1 detected by the flow rate sensor 8, the flow rate control signal S2 is controlled so that the value of the flow rate detection signal S1 is substantially equal to the value of the flow rate setting signal S5, and the flow rate control adjustment is performed. The flow rate of the fluid flowing through the valve 7 is controlled. Therefore, accurate flow rate control is possible. (For example, Patent Document 1)

JP 2004-363456 A

  The conventional mass flow controller 9 shown in FIG. 9 has the advantage that the flow rate of the raw fuel fluid can be controlled in a wide range from a small flow rate to a large flow rate, but has the disadvantage that the pressure drop between the input and output is large. Have. For this reason, it is required to increase the boosting capability in order to supply a predetermined pressure to a predetermined location, and a booster having a large boosting capability is required. Further, the mass flow controller 9 having a wide flow rate control range is expensive.

  If the flow control valve 7 having a lower pressure drop than that of the mass flow controller 9 is used, a booster having a small boosting capability is sufficient. However, the flow control valve 7 shown in FIG. 10 has a drawback that the stable differential pressure range ΔPd in which the flow rate can be controlled with respect to the predetermined adjustment pressure Pr of the pressure control valve 6 is narrow. Therefore, the following defects occur due to the above-mentioned defects. FIG. 11 is a graph showing the relationship between the flow rate of the raw fuel of the fluid supply device and the pressure of the flow control valve 7. L1 shows the relationship between the flow rate of the raw fuel of the prior art and the primary pressure of the flow control valve 7, and the primary pressure is always constant regardless of the increase in the flow rate. L2 indicates the relationship between the flow rate of the raw fuel and the secondary pressure of the flow rate control regulating valve 7, and the secondary pressure increases as the flow rate increases. In the figure, Pr indicates a predetermined control pressure value of the pressure control valve 6, Ph indicates the maximum operation limit value of the secondary pressure of the flow control valve 7, and PL indicates the minimum operation limit value. Pr−Ph = ΔPs indicates the minimum operating differential pressure value of the flow control valve 7, and Pr−PL = ΔPm indicates the maximum operating differential pressure value of the flow control valve 7. Then, ΔPd satisfying ΔPs ≦ ΔPd ≦ ΔPm indicates a stable differential pressure range of the flow control valve 7. If the differential pressure between the primary pressure and the secondary pressure of the flow control valve 7 falls within this range, Stable flow control is performed.

  Next, when the value of the flow rate setting signal S5 is set to La by the flow rate controller 18, the secondary pressure value of the flow rate control valve 7 with respect to the flow rate at the intersection A of L2 shown in FIG. Since the secondary pressure value Pa falls within the stable differential pressure range ΔPd with respect to the primary pressure Pr, stable flow rate control is performed. However, when the value of the flow rate setting signal S5 is changed from La to Lb, it moves from the intersection A of L2 to the intersection B, and the value of the secondary pressure of the flow control valve 7 for the flow rate of this intersection B becomes Pb. The secondary pressure value Pb deviates greatly from the range of the stable differential pressure range ΔPd with respect to the primary pressure Pr, and stable flow rate control cannot be performed. Therefore, in order to perform a stable flow rate control with the value of the flow rate setting signal S5 being Lb, it is necessary to change the adjustment pressure Pr of the pressure control valve 6 to an appropriate value again.

  Then, it is providing the fluid supply apparatuses, such as a cogeneration system and a semiconductor manufacturing apparatus, which solve said subject.

  In order to solve the above-described problems, a first invention is a pressure booster that boosts the pressure of a fluid, a pressure control valve that sets the pressure of the boosted fluid to a predetermined control pressure, and a flow rate of the fluid at the predetermined pressure. A flow rate control valve that automatically adjusts the flow rate control signal according to the flow rate control signal, a flow rate sensor that detects the flow rate of the fluid flowing through the flow rate control control valve and outputs a flow rate detection signal, and a flow rate setting in which the value of the flow rate detection signal is predetermined. A flow rate control unit that controls the flow rate control signal so as to be substantially equal to the value of the signal. In a fluid supply device that supplies a fluid at a desired flow rate, the pressure control valve is replaced with a proportional control pressure regulator. The proportional control pressure regulator pre-adjusts the pressure of the boosted fluid in accordance with the value of the flow rate setting signal so that the differential pressure between the primary pressure and the secondary pressure of the flow control valve is within an appropriate range. Set control pressure A fluid supply apparatus characterized by adjusting the.

  According to a second aspect of the present invention, the proportional control pressure regulator according to claim 1 has a first pressure regulating path formed by a series connection of a first pressure regulating valve, a first electromagnetic valve, and a first check valve, the nth pressure The control path is configured to be connected in parallel, and according to the value of the flow rate setting signal, any one of the first solenoid valve to the nth solenoid valve is opened to flow a fluid through each pressure control path, The first adjustment pressure of the first pressure adjustment valve to the nth adjustment pressure of the nth pressure adjustment valve increase in ascending order so that the differential pressure when the fluid flows through the pressure adjustment paths is within an appropriate range. The fluid supply device is characterized in that the pressure is set in advance.

  A third aspect of the invention is a proportional control in which the first to nth pressure regulators are replaced with the first to nth pressure step-down bodies between the pressure control valve according to claim 1 and the flow control valve. A pressure regulator is provided, and the first pressure step-down body lowers the pressure by a first step-down value when a first flow rate of fluid flows, and the nth pressure step-down body is nth when a fluid of the n-th flow rate flows. The fluid supply device is characterized in that the pressure is reduced by a step-down value, the first to n-th flow rates increase in ascending order, and the first to n-th step-down values decrease in ascending order.

  According to a fourth aspect of the present invention, there is provided a booster that boosts the pressure of the fluid, a pressure control valve that sets the pressure of the boosted fluid to a predetermined control pressure, and a flow rate that automatically adjusts the flow rate of the fluid at the predetermined pressure according to a flow control signal A control valve, a flow sensor for detecting the flow rate of the fluid flowing through the flow control valve and outputting a flow detection signal, and a value of the flow detection signal so as to be substantially equal to a predetermined flow rate setting signal value. A fluid supply apparatus that supplies a fluid having a desired flow rate, and a back pressure valve is provided on a secondary side of the flow control valve, and the flow control valve is provided by the back pressure valve. The fluid supply device is characterized in that the secondary pressure is maintained at a predetermined value.

  According to the first invention, by replacing the pressure control valve with a proportional control pressure regulator, the primary pressure is automatically adjusted so as to be within the stable differential pressure range ΔPd of the flow control valve according to the value of the flow setting signal. Therefore, even if a flow control valve having a narrow stable differential pressure range is used, it is possible to perform flow control over a wide range from a small flow rate to a large flow rate. Furthermore, since the pressure drop between the primary pressure and the secondary pressure of the flow control valve is reduced, a small booster with a small boosting capability can be used.

  According to the second invention, in addition to the effects of the first invention, it is configured by using a plurality of general pressure control valves without using a dedicated proportional control pressure regulator. The primary pressure of the flow control valve can be easily and optimally adjusted simply by operating the pressure control valve according to the above.

  According to the third invention, in addition to the effects of the first invention, the cost can be reduced by configuring the proportional control pressure regulator using a plurality of general pressure drop bodies.

  According to the fourth invention, by providing the back pressure valve on the secondary side of the flow control valve, an effect equivalent to the effect of the first invention can be expected.

[Embodiment 1]
FIG. 1 is a configuration diagram of a fluid supply apparatus that supplies raw fuel to the cogeneration system according to the first embodiment of the present invention. In the same figure, since the same code | symbol performs the same operation | movement as the block diagram of the fluid supply apparatus of the prior art cogeneration system shown in FIG.9 and FIG.10, description is abbreviate | omitted and the structure from which a code | symbol differs is demonstrated.

  In FIG. 1, the flow rate control unit 18 makes the value of the predetermined flow rate setting signal S <b> 5 and the value of the flow rate detection signal S <b> 1 detected by the flow rate sensor 8 the flow rate of the fluid flowing through the flow rate control regulating valve 7 substantially equal. The flow rate control signal S2 is controlled and the flow rate setting signal S5 is input to the pressure setting circuit 27.

  In the pressure setting circuit 27, the primary pressure becomes the center value of the stable differential pressure range ΔPd with respect to the secondary pressure value of the flow control valve 7 determined by the value of the flow rate setting signal S5 ((ΔPs + ΔPm) / 2. ) Is converted into a pressure setting signal S3 for boosting and output.

  The proportional control pressure regulator 21 is a device for controlling the primary pressure of the flow control valve 7, and the primary pressure of the flow control valve 7 with respect to the secondary pressure ((( ΔPs + ΔPm) / 2) Automatic adjustment to the increased pressure.

  FIG. 2 is a graph showing the relationship between the flow rate of raw fuel and the pressure of the flow control valve in the fluid supply device of the first embodiment. In the same figure, L1 shows the relationship between the flow rate of the raw fuel of the prior art and the primary pressure of the flow rate control valve 7, and the primary pressure is always constant regardless of the increase of the flow rate. L2 indicates the relationship between the flow rate of the raw fuel and the secondary pressure of the flow rate control regulating valve 7, and the secondary pressure increases as the flow rate increases. L3 is located at the center of L5 and L6, and in accordance with the value of the flow rate setting signal S5, the proportional control pressure regulator 21 changes the primary pressure of the flow rate control valve 7 relative to the secondary pressure ((ΔPs + ΔPm) / 2) Indicates the state of boosting. L5 indicates a state in which the proportional control pressure regulator 21 increases the primary pressure of the flow control control valve 7 by ΔPm with respect to the secondary pressure according to the value of the flow rate setting signal S5. The maximum pressure increase limit region of the next pressure is shown. L6 indicates a state in which the proportional control pressure regulator 21 increases the primary pressure of the flow control control valve 7 by ΔPs with respect to the secondary pressure in accordance with the value of the flow rate setting signal S5. The minimum pressure increase limit region of the next pressure is shown.

  In FIG. 2, when the value of the flow rate setting signal S5 is set to La, the proportional control pressure regulator 21 ((ΔPs + ΔPm) with respect to the secondary pressure Pa of the flow rate control valve 7 with respect to the flow rate at the intersection A of L2. ) / 2) The primary pressure of the flow control valve 7 is adjusted so as to be the pressure shown at the intersection C of the increased L3. At this time, the differential pressure value between the primary pressure and the secondary pressure of the flow control valve 7 is within the stable differential pressure range ΔPd, and stable flow control is performed.

  Subsequently, when the value of the flow rate setting signal S5 is changed from La to Lb, the proportional control pressure regulator 21 again applies ((() to the secondary pressure Pb of the flow rate control valve 7 for the flow rate at the intersection B of L2. ΔPs + ΔPm) / 2) The primary pressure of the flow control valve 7 is adjusted so as to be the pressure indicated by the intersection D of the increased L3. Also at this time, the differential pressure value between the primary pressure and the secondary pressure of the flow control valve 7 is within the stable differential pressure range ΔPd.

  From the above, in the proportional control pressure regulator 21, the primary pressure of the flow control valve 7 is always increased (ΔPs + ΔPm) / 2) relative to the secondary pressure in accordance with the change in the value of the flow rate setting signal S5. Since the value is adjusted, the flow rate can be controlled in a wide range from a small flow rate to a large flow rate.

[Embodiment 2]
FIG. 3 is a detailed view of the proportional control pressure regulator according to the second embodiment, which is configured using a pressure control valve. In the same figure, the same reference numerals as those in the configuration diagrams of the fluid supply apparatus shown in FIGS.

  The proportional control pressure regulator 21a shown in FIG. 3 uses a first pressure regulating valve 6-5 using a fifth pressure regulating valve 6-5 having a higher regulated pressure in order from a first pressure regulating valve 6-1 having a lower regulated pressure. 1, a first pressure regulating path formed from a series connection of a first electromagnetic valve 19-1 and a first check valve 24-1, a second pressure regulating valve 6-2, a second electromagnetic valve 19-2, and a first From the series connection of the second pressure regulation path formed from the series connection of the two check valves 24-2 and the third pressure regulation valve 6-3, the third electromagnetic valve 19-3 and the third check valve 24-3 A third pressure regulating path formed, a fourth pressure regulating path formed from a series connection of a fourth pressure regulating valve 6-4, a fourth electromagnetic valve 19-4, and a fourth check valve 24-4; 5 pressure control valve 6-5, 5th solenoid valve 19-5, and 5th pressure control path formed from the serial connection of 5th check valve 24-5 are connected in parallel, and each pressure control Adjusting the pressure of the valve, the differential pressure between the primary pressure and the secondary pressure of the flow control regulating valve 7 is adjusted to fit the flow control, stable differential pressure range .DELTA.Pd.

  The solenoid valve control circuit 25 selects a solenoid valve according to the value of the flow rate setting signal S5 set by the flow rate control unit 18, and when the flow rate set value is small, the first solenoid valve 19-1 is opened and adjusted. When the first pressure adjustment path with low pressure is selected and the flow rate set value is large, the fifth electromagnetic valve 19-5 is opened and the fifth pressure adjustment path with high adjustment pressure is selected.

  FIG. 4 is a graph showing the relationship between the flow rate of raw fuel and the pressure of the flow control valve in the fluid supply device of the second embodiment. In the same figure, L1 shows the relationship between the flow rate of the raw fuel of the prior art and the primary pressure of the flow control valve 7 described above, and the primary pressure is always constant regardless of the increase of the flow rate. L2 indicates the relationship between the flow rate of the raw fuel and the secondary pressure of the flow rate control regulating valve 7, and the secondary pressure increases as the flow rate increases. L4 indicates the relationship between the flow rate of the raw fuel and the primary pressure of the flow rate control regulating valve 7, and in the small flow rate setting range ΔK1, the pressure is adjusted to the low pressure P1 that is the regulated pressure of the first pressure regulating valve 6-1. In the large flow rate setting range ΔK5, the pressure is adjusted to the high pressure P5 that is the adjustment pressure of the fifth pressure control valve 6-5, and the primary pressure increases stepwise as the flow rate increases. In the flow rate setting range ΔK3, when the flow rate set value is Lc, the differential pressure between the primary pressure and the secondary pressure of the flow control valve 7 is the minimum operating differential pressure value ΔPs, and when the flow rate set value is Ld. The range of the flow rate setting range ΔK3 is determined so that the differential pressure (P3−P2 + ΔPs) is smaller than the maximum operating differential pressure value ΔPm. The other ΔK1, ΔK2, ΔK4, and ΔK5 are the same as described above.

  In FIG. 4, when the value of the flow rate setting signal S5 is set to La, the solenoid valve control circuit 25 determines which range of the predetermined flow rate setting range shown in FIG. When the La enters the flow rate setting range ΔK5, the electromagnetic valve control circuit 25 inputs the electromagnetic valve control signal S4 to the fifth electromagnetic valve 19-5 corresponding to the flow rate setting range ΔK5 to open it, and the fifth pressure adjustment path Is opened to adjust the primary pressure of the flow control valve 7 to P5. At this time, the secondary pressure Pa of the flow control valve 7 with respect to the flow rate at the intersection point A of L2 falls within the stable differential pressure range ΔPd with respect to the adjusted primary pressure P5, and stable flow control is performed.

  Subsequently, when the value of the flow rate setting signal S5 is changed from La to Lb, the solenoid valve control circuit 25 again determines in which range of the predetermined flow rate setting range shown in FIG. 4 the value Lb of the flow rate setting signal S5 falls. When Lb enters the flow rate setting range ΔK3, the solenoid valve control circuit 25 closes the fifth solenoid valve 19-5 and closes the fifth pressure adjustment path, and the third solenoid valve corresponding to the flow rate setting range ΔK3. 19-3 is opened, the third pressure adjustment path is opened, and the primary pressure P5 of the flow control valve 7 is adjusted again from P5 to P3. At this time, the secondary pressure Pb of the flow control valve 7 with respect to the flow rate at the intersection B of L2 is within the stable differential pressure range ΔPd with respect to the reduced primary pressure P3, and the stable flow control is performed. As described above, stable flow rate control is possible even if the flow rate is changed widely from a small flow rate to a large flow rate.

[Embodiment 3]
FIG. 5 is a detailed view of the proportional control pressure regulator according to the third embodiment, which is configured using a pressure step-down body. In the figure, the same reference numerals as those in the configuration diagrams of the fluid supply device shown in FIGS.

  The proportional control pressure regulator 21b shown in FIG. 5 has a flow resistance from the first pressure regulation valve 6-1 having a lower regulation pressure to the fifth pressure regulation valve 6-5 having a higher regulation pressure. The first pressure step-down body 20-1 having a large (falling pressure) is replaced with a fifth pressure step-down body 20-5 having a small channel resistance, and the proportional control pressure regulator 21b is controlled by the pressure control valve 6 and the flow rate control. It arrange | positions between the control valves 7. FIG.

  FIG. 6 is a graph showing the relationship between the flow rate of raw fuel and the pressure of the flow control valve of the fluid supply device according to the third embodiment. In the figure, the adjustment pressure of the pressure adjustment valve 6 is adjusted to a predetermined value P6. L2 indicates the relationship between the flow rate of the raw fuel and the secondary pressure of the flow rate control regulating valve 7, and the secondary pressure increases as the flow rate increases. L5 indicates the relationship between the flow rate of the raw fuel and the primary pressure of the flow rate control regulating valve 7, and in the flow rate setting range ΔK1 with a small flow rate, the first pressure step-down body 20-1 having a large flow path resistance causes the range ΔK1 In the large flow rate setting range ΔK5, the pressure P5a to P5b determined by the flow rate in the range ΔK5 is reduced by the fifth pressure step-down body 20-5 having a small flow resistance. The primary pressure increases stepwise as the flow rate increases. In the third embodiment, since the pressure step-down body is used, the primary pressure of the flow control valve 7 is not constant within each flow rate setting range, but varies as indicated by L5 with the flow rate. Further, in the flow rate setting range ΔK3, when the flow rate set value is Lc, the differential pressure between the primary pressure and the secondary pressure of the flow control valve 7 is the minimum operating differential pressure value ΔPs, and when the flow rate set value is Ld. The range of the flow rate setting range ΔK3 is determined so that the differential pressure (P3b−P2a + ΔPs) is smaller than the maximum operating differential pressure value ΔPm. The other ΔK1, ΔK2, ΔK4, and ΔK5 are the same as described above.

  Next, the operation will be described with reference to FIG. When the value of the flow rate setting signal S5 is set to La, the solenoid valve control circuit 25 determines that the value La of the flow rate setting signal S5 enters the flow rate setting range ΔK5, and sends the solenoid valve control signal S4 to the fifth solenoid valve 19-5. Input to open, open the fifth pressure adjustment path, and adjust the primary pressure of the flow control valve 7 to the pressure at the intersection C of L5. At this time, the secondary pressure Pa of the flow control valve 7 with respect to the flow rate at the intersection A of L2 is within the stable differential pressure range ΔPd with respect to the adjusted primary pressure, and stable flow control is performed.

  Subsequently, when the value of the flow rate setting signal S5 is changed from La to Lb, the solenoid valve control circuit 25 determines that the value Lb of the flow rate setting signal S5 falls within the flow rate setting range ΔK3, and the solenoid valve control circuit 25 The fifth solenoid valve 19-5 is closed to close the fifth pressure control path, and the third solenoid valve 19-3 corresponding to the flow rate setting range ΔK3 is input to open the solenoid valve control signal S4 to open it. The path is opened and the primary pressure of the flow control valve 7 is readjusted to the pressure at the intersection D of L5. At this time, the secondary pressure Pb of the flow control valve 7 with respect to the flow rate at the intersection B of L2 is within the stable differential pressure range ΔPd with respect to the reduced primary pressure, and the stable flow control is performed.

  Instead of the pressure reducing body, a pressure drop valve capable of manually adjusting the drop pressure may be used.

[Embodiment 4]
FIG. 7 is a configuration diagram of a fluid supply apparatus that supplies raw fuel to the cogeneration system according to the fourth embodiment. In this figure, the same reference numerals as those in the configuration diagram of the fluid supply apparatus shown in FIG.

  In the fourth embodiment, a back pressure valve 22 is provided on the secondary side of the flow control valve 7 so that the secondary pressure of the flow control valve 7 is maintained at a predetermined value regardless of changes in flow rate. It is adjusted to.

  FIG. 8 is a graph showing the relationship between the flow rate of raw fuel and the pressure of the flow control valve in the fluid supply device of the fourth embodiment. In the same figure, L1 shows the relationship between the flow rate of the raw fuel of the prior art and the primary pressure of the flow control valve 7 described above, and the primary pressure is always constant regardless of the increase of the flow rate. L2 indicates the relationship between the flow rate of the raw fuel and the secondary pressure of the back pressure valve 22, and the secondary pressure increases as the flow rate increases. L6 indicates the relationship between the increase in flow rate and the primary pressure of the back pressure valve 22.

  In FIG. 8, the primary pressure of the back pressure valve 22 is adjusted so as to be within a stable differential pressure range ΔPd in which the flow control valve 7 stably operates with respect to the adjustment pressure Pr of the pressure control valve shown in FIG. Even if the flow rate changes due to the effect of the primary pressure of the back pressure valve 22, the secondary pressure of the flow rate control regulating valve 7 does not deviate from the stable differential pressure range ΔPd with respect to the regulating pressure Pr.

  When the value of the flow rate setting signal S5 is set to La, when the back pressure valve 22 is not provided, the secondary pressure of the flow control valve 7 with respect to the flow rate at the intersection A of L2 is Pa. When the back pressure valve 22 is provided, the pressure at the intersection E of L6 becomes the secondary pressure of the flow control valve 7. At this time, the secondary pressure of the flow control valve 7 does not deviate from the stable differential pressure range ΔPd with respect to the primary pressure Pr.

  Subsequently, when the value of the flow rate setting signal S5 is changed from La to Lb, when the back pressure valve 22 is not provided, the secondary pressure of the flow control valve 7 with respect to the flow rate at the intersection B of L2 becomes Pb. It does not fall within the range of the stable differential pressure range ΔPd with respect to the pressure Pr. However, when it is provided, the pressure at the intersection F of L6 becomes the secondary pressure of the flow control valve 7, so that it falls within the stable differential pressure range ΔPd with respect to the primary pressure Pr.

  In the description of the above embodiment, the cogeneration system has been described as an example. However, the present invention can be applied to an apparatus that requires a fluid supply apparatus such as a semiconductor manufacturing apparatus, and the same effect can be obtained.

It is a block diagram of the flow supply apparatus which supplies raw fuel to the cogeneration system of Embodiment 1 of this invention. It is a graph which shows the relationship between the flow volume of the raw fuel of the fluid supply apparatus of Embodiment 1, and the pressure of a flow control control valve. It is a proportional control pressure regulator of Embodiment 2, Comprising: It is detail drawing of the 2nd proportional control pressure regulator comprised using the pressure control valve. It is a graph which shows the relationship between the flow volume of the raw fuel of the fluid supply apparatus of Embodiment 2, and the pressure of a flow control control valve. It is a proportional control pressure regulator of Embodiment 3, Comprising: It is a detailed view of the 3rd proportional control pressure regulator comprised using the pressure pressure-reduction valve. It is a graph which shows the relationship between the flow volume of the raw fuel of the fluid supply apparatus of Embodiment 3, and the pressure of a flow control control valve. It is a block diagram of the fluid supply apparatus of raw fuel to the cogeneration system of Embodiment 4. It is a graph which shows the relationship between the flow volume of the raw fuel of the fluid supply apparatus of Embodiment 4, and the pressure of a flow control valve. It is a block diagram of the fluid supply apparatus of the cogeneration system raw fuel of a prior art. It is a block diagram of the fluid supply apparatus which supplies raw fuel to the cogeneration system of the prior art 2. It is a graph which shows the relationship between the flow volume of the raw fuel of the fluid supply apparatus shown in FIG. 9, and the pressure of a flow control control valve.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Fuel cell module 2 Booster 3 1st pressure gauge 4 2nd pressure gauge 5 3rd pressure gauge 6 Pressure regulating valve 6-1 1st pressure regulating valve 6-2 2nd pressure regulating valve 6-3 3rd pressure regulating valve 6-4 Fourth pressure regulating valve 6-5 Fifth pressure regulating valve 7 Flow control regulating valve 8 Flow rate sensor 9 Mass flow controller 10 Check valve 11, 12 Piping 13, 14 Piping 15, 16 Piping 17 Exhaust conduit 18 Flow control Part 19-1 1st solenoid valve 19-2 2nd solenoid valve 19-3 3rd solenoid valve 19-4 4th solenoid valve 19-5 5th solenoid valve 20-1 1st pressure pressure-reducing body 20-2 2nd pressure Step-down body 20-3 Third pressure step-down body 20-4 Fourth pressure step-down body 20-5 Fifth pressure step-down body 21 Proportional control pressure regulator 21a Proportional control pressure regulator 21b Proportional control pressure regulator 22 Back pressure valve 23 Fourth Pressure gauge 24-1 First check 24-2 second check valve 24-3 third check valve 24-4 fourth check valve 24-5 fifth check valve 25 solenoid valve control circuit 26 flow rate setting circuit 27 pressure setting circuit

S1 Flow detection signal S2 Flow control signal S3 Pressure setting signal S4 Solenoid valve control signal S5 Flow setting signal

Claims (4)

  A pressure booster that boosts the pressure of the fluid; a pressure control valve that sets the pressure of the boosted fluid to a predetermined control pressure; a flow control valve that automatically adjusts the flow rate of the fluid at the predetermined pressure in accordance with a flow control signal; A flow rate sensor that detects the flow rate of the fluid flowing through the flow rate control valve and outputs a flow rate detection signal, and controls the flow rate control signal so that the value of the flow rate detection signal is substantially equal to the value of a predetermined flow rate setting signal A fluid supply device for supplying a fluid having a desired flow rate, wherein the pressure control valve is replaced with a proportional control pressure regulator, and the proportional control pressure regulator converts the pressure of the boosted fluid to the pressure control valve. Fluid supply characterized by adjusting to a control pressure set in advance according to the value of the flow rate setting signal so that the differential pressure between the primary pressure and the secondary pressure of the flow control valve is within an appropriate range. apparatus.   The proportional control pressure regulator according to claim 1, wherein the first pressure regulation path formed from the series connection of the first pressure regulation valve, the first electromagnetic valve, and the first check valve is connected in parallel to the nth pressure regulation path. And opening one of the first solenoid valve to the nth solenoid valve in accordance with the value of the flow rate setting signal to flow a fluid through each pressure control path, The first adjustment pressure to the nth adjustment pressure of the nth pressure adjustment valve are preset adjustment pressures that increase in ascending order so that the differential pressure when the fluid flows through each of the pressure adjustment paths is within an appropriate range. A fluid supply apparatus characterized by the above.   A proportional control pressure regulator is provided between the pressure regulating valve according to claim 1 and the flow rate regulating valve, wherein the first to nth pressure regulating valves according to claim 2 are replaced with first to nth pressure reducing bodies, When the first flow rate fluid flows, the first pressure step-down body decreases the pressure by a first step-down value, and the n-th pressure step-down body decreases the n-th step-down value when the n-th flow rate fluid flows, The fluid supply apparatus according to claim 1, wherein the first to n-th flow rates are values that increase in ascending order, and the first to n-th step-down values are values that decrease in ascending order. A pressure booster that boosts the pressure of the fluid; a pressure control valve that sets the pressure of the boosted fluid to a predetermined control pressure; a flow control valve that automatically adjusts the flow rate of the fluid at the predetermined pressure in accordance with a flow control signal; A flow rate sensor that detects the flow rate of the fluid flowing through the flow rate control valve and outputs a flow rate detection signal, and controls the flow rate control signal so that the value of the flow rate detection signal is substantially equal to the value of a predetermined flow rate setting signal In a fluid supply device that supplies a fluid having a desired flow rate, a back pressure valve is provided on the secondary side of the flow control valve, and the secondary pressure of the flow control valve is set to a predetermined value by the back pressure valve. A fluid supply device characterized by maintaining the value.

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