JPS6166944U - - Google Patents

Info

Publication number
JPS6166944U
JPS6166944U JP15207884U JP15207884U JPS6166944U JP S6166944 U JPS6166944 U JP S6166944U JP 15207884 U JP15207884 U JP 15207884U JP 15207884 U JP15207884 U JP 15207884U JP S6166944 U JPS6166944 U JP S6166944U
Authority
JP
Japan
Prior art keywords
link
drive mechanism
link members
chucks
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15207884U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15207884U priority Critical patent/JPS6166944U/ja
Publication of JPS6166944U publication Critical patent/JPS6166944U/ja
Pending legal-status Critical Current

Links

JP15207884U 1984-10-08 1984-10-08 Pending JPS6166944U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15207884U JPS6166944U (OSRAM) 1984-10-08 1984-10-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15207884U JPS6166944U (OSRAM) 1984-10-08 1984-10-08

Publications (1)

Publication Number Publication Date
JPS6166944U true JPS6166944U (OSRAM) 1986-05-08

Family

ID=30710162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15207884U Pending JPS6166944U (OSRAM) 1984-10-08 1984-10-08

Country Status (1)

Country Link
JP (1) JPS6166944U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01315155A (ja) * 1988-03-11 1989-12-20 Tel Sagami Ltd ウエハ移送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01315155A (ja) * 1988-03-11 1989-12-20 Tel Sagami Ltd ウエハ移送装置

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