JPS616619A - チョッパ−ミラ− - Google Patents

チョッパ−ミラ−

Info

Publication number
JPS616619A
JPS616619A JP12793084A JP12793084A JPS616619A JP S616619 A JPS616619 A JP S616619A JP 12793084 A JP12793084 A JP 12793084A JP 12793084 A JP12793084 A JP 12793084A JP S616619 A JPS616619 A JP S616619A
Authority
JP
Japan
Prior art keywords
laser light
substrate
chopper mirror
laser
transmitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12793084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH04255B2 (enrdf_load_stackoverflow
Inventor
Takeshi Masaki
健 正木
Koichi Kawada
耕一 河田
Yukio Sakagaito
坂垣内　征雄
Katsumasa Yamaguchi
勝正 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12793084A priority Critical patent/JPS616619A/ja
Publication of JPS616619A publication Critical patent/JPS616619A/ja
Publication of JPH04255B2 publication Critical patent/JPH04255B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP12793084A 1984-06-21 1984-06-21 チョッパ−ミラ− Granted JPS616619A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12793084A JPS616619A (ja) 1984-06-21 1984-06-21 チョッパ−ミラ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12793084A JPS616619A (ja) 1984-06-21 1984-06-21 チョッパ−ミラ−

Publications (2)

Publication Number Publication Date
JPS616619A true JPS616619A (ja) 1986-01-13
JPH04255B2 JPH04255B2 (enrdf_load_stackoverflow) 1992-01-06

Family

ID=14972150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12793084A Granted JPS616619A (ja) 1984-06-21 1984-06-21 チョッパ−ミラ−

Country Status (1)

Country Link
JP (1) JPS616619A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08327810A (ja) * 1995-05-30 1996-12-13 Jiyuu Denshi Laser Kenkyusho:Kk 光学ミラー及びこれを用いたレーザ光分割装置
KR101025015B1 (ko) * 2008-12-02 2011-03-25 주식회사 엘티에스 레이저 온오프 셔터유닛
CN113547225A (zh) * 2020-04-22 2021-10-26 鸿鎷科技有限公司 具有石英底座的精密陶瓷工作台

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08327810A (ja) * 1995-05-30 1996-12-13 Jiyuu Denshi Laser Kenkyusho:Kk 光学ミラー及びこれを用いたレーザ光分割装置
KR101025015B1 (ko) * 2008-12-02 2011-03-25 주식회사 엘티에스 레이저 온오프 셔터유닛
CN113547225A (zh) * 2020-04-22 2021-10-26 鸿鎷科技有限公司 具有石英底座的精密陶瓷工作台

Also Published As

Publication number Publication date
JPH04255B2 (enrdf_load_stackoverflow) 1992-01-06

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