JPS6162854A - 金属酸化物厚膜を担持した、セラミツク基板 - Google Patents
金属酸化物厚膜を担持した、セラミツク基板Info
- Publication number
- JPS6162854A JPS6162854A JP18381884A JP18381884A JPS6162854A JP S6162854 A JPS6162854 A JP S6162854A JP 18381884 A JP18381884 A JP 18381884A JP 18381884 A JP18381884 A JP 18381884A JP S6162854 A JPS6162854 A JP S6162854A
- Authority
- JP
- Japan
- Prior art keywords
- thick film
- ceramic
- particles
- substrate
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 50
- 239000000758 substrate Substances 0.000 title claims abstract description 43
- 229910044991 metal oxide Inorganic materials 0.000 title claims abstract description 15
- 150000004706 metal oxides Chemical class 0.000 title claims abstract description 15
- 239000002245 particle Substances 0.000 claims abstract description 46
- 239000000463 material Substances 0.000 claims description 10
- 239000000843 powder Substances 0.000 abstract description 8
- 239000004065 semiconductor Substances 0.000 abstract description 8
- 238000007639 printing Methods 0.000 abstract description 5
- 238000005245 sintering Methods 0.000 abstract description 5
- 238000009413 insulation Methods 0.000 abstract description 4
- 229910052697 platinum Inorganic materials 0.000 abstract description 4
- 238000010304 firing Methods 0.000 abstract description 3
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- 239000002002 slurry Substances 0.000 abstract description 3
- 239000011230 binding agent Substances 0.000 abstract description 2
- 238000007606 doctor blade method Methods 0.000 abstract description 2
- 239000003960 organic solvent Substances 0.000 abstract description 2
- 229910052763 palladium Inorganic materials 0.000 abstract description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract 2
- 238000000034 method Methods 0.000 description 12
- 239000010410 layer Substances 0.000 description 11
- 239000008187 granular material Substances 0.000 description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 5
- 239000011361 granulated particle Substances 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- 238000007788 roughening Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004377 microelectronic Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
- 240000007124 Brassica oleracea Species 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000005469 granulation Methods 0.000 description 2
- 230000003179 granulation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011812 mixed powder Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 240000000220 Panda oleosa Species 0.000 description 1
- 235000016496 Panda oleosa Nutrition 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000009933 burial Methods 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 229910052839 forsterite Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000009863 impact test Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 235000013311 vegetables Nutrition 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18381884A JPS6162854A (ja) | 1984-09-04 | 1984-09-04 | 金属酸化物厚膜を担持した、セラミツク基板 |
| DE8484112859T DE3479053D1 (en) | 1983-10-28 | 1984-10-25 | Gas sensor with ceramics substrate and method for producing the same |
| US06/664,872 US4688015A (en) | 1983-10-28 | 1984-10-25 | Gas sensor with ceramics substrate having surface-carried ceramics particles |
| EP84112859A EP0140340B1 (en) | 1983-10-28 | 1984-10-25 | Gas sensor with ceramics substrate and method for producing the same |
| US06/880,013 US4720394A (en) | 1983-10-28 | 1986-06-30 | Gas sensor with ceramics substrate and method for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18381884A JPS6162854A (ja) | 1984-09-04 | 1984-09-04 | 金属酸化物厚膜を担持した、セラミツク基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6162854A true JPS6162854A (ja) | 1986-03-31 |
| JPH051900B2 JPH051900B2 (enrdf_load_stackoverflow) | 1993-01-11 |
Family
ID=16142393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18381884A Granted JPS6162854A (ja) | 1983-10-28 | 1984-09-04 | 金属酸化物厚膜を担持した、セラミツク基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6162854A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63195252U (enrdf_load_stackoverflow) * | 1987-06-05 | 1988-12-15 | ||
| JPH01132947A (ja) * | 1987-11-18 | 1989-05-25 | Toyota Motor Corp | 金属酸化物半導体被膜付きセラミック基板とその製法 |
| JP2008209390A (ja) * | 2006-06-16 | 2008-09-11 | Ngk Spark Plug Co Ltd | ガスセンサ |
| JP2009529233A (ja) * | 2006-03-10 | 2009-08-13 | ジョインセット カンパニー リミテッド | セラミック部品要素、セラミック部品及びその製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50155293A (enrdf_load_stackoverflow) * | 1974-06-04 | 1975-12-15 | ||
| JPS5288098A (en) * | 1976-01-17 | 1977-07-22 | Murata Manufacturing Co | Gas detecting element |
-
1984
- 1984-09-04 JP JP18381884A patent/JPS6162854A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50155293A (enrdf_load_stackoverflow) * | 1974-06-04 | 1975-12-15 | ||
| JPS5288098A (en) * | 1976-01-17 | 1977-07-22 | Murata Manufacturing Co | Gas detecting element |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63195252U (enrdf_load_stackoverflow) * | 1987-06-05 | 1988-12-15 | ||
| JPH01132947A (ja) * | 1987-11-18 | 1989-05-25 | Toyota Motor Corp | 金属酸化物半導体被膜付きセラミック基板とその製法 |
| JP2009529233A (ja) * | 2006-03-10 | 2009-08-13 | ジョインセット カンパニー リミテッド | セラミック部品要素、セラミック部品及びその製造方法 |
| JP2008209390A (ja) * | 2006-06-16 | 2008-09-11 | Ngk Spark Plug Co Ltd | ガスセンサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH051900B2 (enrdf_load_stackoverflow) | 1993-01-11 |
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