JPS6161316U - - Google Patents
Info
- Publication number
- JPS6161316U JPS6161316U JP14587284U JP14587284U JPS6161316U JP S6161316 U JPS6161316 U JP S6161316U JP 14587284 U JP14587284 U JP 14587284U JP 14587284 U JP14587284 U JP 14587284U JP S6161316 U JPS6161316 U JP S6161316U
- Authority
- JP
- Japan
- Prior art keywords
- hole
- cap
- outer ring
- fit
- peripheral wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 210000000078 claw Anatomy 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
Landscapes
- Burglar Alarm Systems (AREA)
- Hand Tools For Fitting Together And Separating, Or Other Hand Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984145872U JPS6332973Y2 (cs) | 1984-09-28 | 1984-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984145872U JPS6332973Y2 (cs) | 1984-09-28 | 1984-09-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6161316U true JPS6161316U (cs) | 1986-04-25 |
| JPS6332973Y2 JPS6332973Y2 (cs) | 1988-09-02 |
Family
ID=30704123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984145872U Expired JPS6332973Y2 (cs) | 1984-09-28 | 1984-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6332973Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20120104112A (ko) * | 2011-03-11 | 2012-09-20 | 가부시키가이샤 후지킨 | 볼트 풀림 방지 장치, 그 부착 방법과 부착 지그, 유체 제어 장치 및 기판 처리 장치 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5619493A (en) * | 1979-07-27 | 1981-02-24 | Tokyo Shibaura Electric Co | Rotary plug seal |
-
1984
- 1984-09-28 JP JP1984145872U patent/JPS6332973Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5619493A (en) * | 1979-07-27 | 1981-02-24 | Tokyo Shibaura Electric Co | Rotary plug seal |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20120104112A (ko) * | 2011-03-11 | 2012-09-20 | 가부시키가이샤 후지킨 | 볼트 풀림 방지 장치, 그 부착 방법과 부착 지그, 유체 제어 장치 및 기판 처리 장치 |
| JP2012189160A (ja) * | 2011-03-11 | 2012-10-04 | Tokyo Electron Ltd | ボルトの緩み防止装置ならびにその取付方法および取付治具 |
| TWI558922B (zh) * | 2011-03-11 | 2016-11-21 | 東京威力科創股份有限公司 | 螺栓鬆弛防止裝置及其安裝方法、第1、第2安裝治具、流體控制裝置及基板處理裝置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6332973Y2 (cs) | 1988-09-02 |