JPS6159211A - Automatic measuring and judging apparatus - Google Patents
Automatic measuring and judging apparatusInfo
- Publication number
- JPS6159211A JPS6159211A JP18214984A JP18214984A JPS6159211A JP S6159211 A JPS6159211 A JP S6159211A JP 18214984 A JP18214984 A JP 18214984A JP 18214984 A JP18214984 A JP 18214984A JP S6159211 A JPS6159211 A JP S6159211A
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- comparators
- many
- simultaneous
- comparator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はアナログ信号を測定し、測定結果を自動判定す
る装置に関する。特に、同時に多入力を処理できる自動
測定判定装置に関する。本発明の装置は、製造工程の検
査結果として出力される多数のアナログ信号を監視して
品質管理を行う装置に実施するに適する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a device that measures analog signals and automatically determines the measurement results. In particular, the present invention relates to an automatic measurement/judgment device that can process multiple inputs simultaneously. The device of the present invention is suitable for implementation in a device that performs quality control by monitoring a large number of analog signals output as inspection results in a manufacturing process.
従来例自動判定測定装置では多入力の内の一つの入力を
選択し測定および判定を繰り返し多入力の測定および判
定を行っていた。In the conventional automatic determination measuring device, one input out of multiple inputs is selected and measurement and determination are repeated to perform measurement and determination of multiple inputs.
前述の従来例自動判定測定装置では、一つの入力の測定
および判定に要する時間に入力数を乗じた時間が多入力
全てを測定および判定する場合に必要になるので、量産
製品に対する生産工程で用いる検査装置としては不適当
である。一方、入力の全てを測定および判定せずに最小
必要比の項目に制限して検査しなければならない事態を
招く欠点があった。In the conventional automatic judgment measuring device described above, the time required to measure and judge one input multiplied by the number of inputs is required to measure and judge all multiple inputs, so it is used in the production process for mass-produced products. It is unsuitable as an inspection device. On the other hand, there is a drawback in that the inspection must be limited to items with the minimum required ratio without measuring and determining all of the inputs.
本発明は、前述の欠点を解決するもので、全ての入力の
同時測定および判定が行える自動判定測定装置を提供す
ることを目的とする。SUMMARY OF THE INVENTION The present invention solves the above-mentioned drawbacks and aims to provide an automatic determination measuring device that can simultaneously measure and determine all inputs.
本発明は、被検査装置の測定点から送出されるアナログ
測定信号と比較信号とを人力する比較器と、この比較信
号の値を変化させる比較信号発生器と、この比較信号発
生器の状態および上記比較器の論理出力に基づき上記ア
ナログ測定信号に対応する測定値を得る測定手段と、こ
の測定値を設定された基準値との大小関係を判定する判
定手段とを備えた自動測定判定装置で、前述の問題点を
解決するための手段として、比較器は上記アナログ測定
手段に対応して多数偏設けられ、被検査装置の測定にか
かわる複数の条件を設定できるプログラム制御される状
態制御器を備え、測定手段および上記判定手段は、この
状態制御器で設定された測定条件ごとに多数個の比較器
の出力に応答する手段を含むことを特徴とする。The present invention provides a comparator that manually outputs an analog measurement signal and a comparison signal sent from a measurement point of a device under test, a comparison signal generator that changes the value of this comparison signal, and a state and a state of this comparison signal generator. An automatic measurement/judgment device comprising a measuring means for obtaining a measured value corresponding to the analog measurement signal based on the logical output of the comparator, and a judging means for judging the magnitude relationship between this measured value and a set reference value. As a means to solve the above-mentioned problems, a large number of comparators are provided corresponding to the analog measurement means described above, and a program-controlled state controller that can set a plurality of conditions related to the measurement of the device under test is installed. The measuring means and the determining means are characterized in that they include means for responding to the outputs of a plurality of comparators for each measurement condition set by the state controller.
複数の条件の下で複数の測定点で測定が行われる被検査
装置に対し、状態制御器で、測定条件が一つずつ被検査
装置に与えられ、この測定条件下で複数の測定点の測定
が同時に測定手段で実行され、また基準値との大小関係
の判定が判定手段で実行される。For a device under test where measurements are performed at multiple measurement points under multiple conditions, the state controller applies measurement conditions one by one to the device under test, and performs measurements at multiple measurement points under these measurement conditions. is simultaneously executed by the measuring means, and a determination of the magnitude relationship with the reference value is executed by the determining means.
以下、本発明実施例装置を図面に基づいて説明する。 DESCRIPTION OF THE PREFERRED EMBODIMENTS A device according to an embodiment of the present invention will be described below with reference to the drawings.
図はこの実施例装置の構成を示すブロック構成図である
。まず、本発明実施例装置の構成を図に基づいて説明す
る。この実施例装置は、制御部1工と、比較信号発生器
12と、多入力同時比較器13と、被検査装置制御器1
4と、操作部15と、表示部16と、検出器17とを備
え、ここで、制御部11は、ROM111 と、RAM
112と、CPU113とを備え、また、多入力同時比
較器13はrnJ個の比較器13−1〜13−nを備え
る。The figure is a block configuration diagram showing the configuration of the apparatus of this embodiment. First, the configuration of an apparatus according to an embodiment of the present invention will be explained based on the drawings. This embodiment device includes a control section 1, a comparison signal generator 12, a multi-input simultaneous comparator 13, and a device under test controller 1.
4, an operation section 15, a display section 16, and a detector 17, where the control section 11 includes a ROM 111 and a RAM.
112 and a CPU 113, and the multi-input simultaneous comparator 13 includes rnJ comparators 13-1 to 13-n.
被検査装置20のrnJ個の測定出力は検出器17のr
nJ個の測定入力のそれぞれに接続され、検出器17の
rnJ個の検出出力は多入力同時比較器のrnJ個の比
較器13−1〜13−〇の一方の入力に接続される。制
御部11のCP U113の第一の入出力は、比較信号
発生器12の入力、rnJ個の比較器13−1〜13−
nの出力、被検査装置制御器14の入力および操作部1
5の出力および表示部16の入力に接続される。制御部
11のROMIIIの入出力、RAM112の入出力お
よびCP U113の第二の人出力と信号を授受するよ
うに接続される。比較信号発生器12の比較出力はrn
J個の比較器13−1〜13−nの第二の入力のそれぞ
れに接続される。被検査装置制御器14のrnJ個の状
態指定出力は被検査装置20のrmJ個の状態指定入力
に接続される。The rnJ measurement outputs of the device under test 20 are r of the detector 17.
It is connected to each of the nJ measurement inputs, and the rnJ detection outputs of the detector 17 are connected to one input of the rnJ comparators 13-1 to 13-0 of the multi-input simultaneous comparator. The first input/output of the CPU 113 of the control unit 11 is the input of the comparison signal generator 12 and the rnJ comparators 13-1 to 13-.
output of n, input of the device under test controller 14 and operation section 1
5 and the input of the display section 16. It is connected to the input/output of the ROM III of the control unit 11, the input/output of the RAM 112, and the second human output of the CPU 113 so as to send and receive signals. The comparison output of the comparison signal generator 12 is rn
It is connected to each of the second inputs of J comparators 13-1 to 13-n. The rnJ state designation outputs of the device under test controller 14 are connected to the rmJ state designation inputs of the device under test 20.
次に、この実施例装置の動作を図に基づいて説明する。Next, the operation of this embodiment device will be explained based on the drawings.
ROMillには蓄積プログラムが書き込まれ、RAM
112ではこの蓄積プログラムが一時記憶される。比較
信号発生器12では比較信号3が生成され、検出器17
では被検査装置20の各測定信号1が高インピーダンス
で検出された測定レベルから低インピーダンスに変換さ
れ測定誤差が低減される。The storage program is written to the ROMill, and the RAM
At 112, this accumulated program is temporarily stored. Comparison signal generator 12 generates comparison signal 3, and detector 17
Then, each measurement signal 1 of the device under test 20 is converted from a measurement level detected at high impedance to a low impedance, thereby reducing measurement errors.
比較器13−1〜13−nでは比較信号3と検出出力信
号2とが比較され比較信号4が生成される。被検査装置
制御器4では被検査装置20の状態を制御する状態指定
信号5が生成される。Comparators 13-1 to 13-n compare comparison signal 3 and detection output signal 2 to generate comparison signal 4. The device under test controller 4 generates a state designation signal 5 for controlling the state of the device under test 20 .
さて、制御部11により蓄積プログラムにしたがい被検
査装置制御器14を介して、被検査装置20の状態が設
定される。次に、制御部11により比較信号発生器12
が制御され、比較信号3の値が決定される。比較器13
では、そのときの被検査装置20のそれぞれの測定点の
測定信号に対応して、検出器17により整合された検出
出力信号2の値が比較信号3の値と比較され論理レベル
に変換されて比較出力信号4が生成される。この比較出
力信号4に基づいて、制御部11では、その蓄積プログ
ラムにより比較出力3毎に測定値が計算され、この測定
信号1に対応してあらかじめ蓄積プログラムに設定され
ている値または操作部15で設定された値とが比較され
、良または不良の判定が行われ、全ての測定値および判
定結果が表示部16に同時に表示される。さらに、必要
に応じ、制御部11では、その蓄積プログラムにより被
検査装置20の状態を変更する制御が行われ、多入力の
同時測定および判定が行われて表示される。Now, the state of the device under test 20 is set by the control section 11 via the device under test controller 14 according to the stored program. Next, the control unit 11 generates a comparison signal generator 12.
is controlled, and the value of comparison signal 3 is determined. Comparator 13
Then, the value of the detection output signal 2 matched by the detector 17 is compared with the value of the comparison signal 3 and converted to a logic level, corresponding to the measurement signal of each measurement point of the device under test 20 at that time. A comparison output signal 4 is generated. Based on this comparison output signal 4, the control section 11 calculates a measurement value for each comparison output 3 according to the accumulation program, and the control section 11 calculates a measurement value for each comparison output 3 according to the accumulation program, and a value set in advance in the accumulation program or the operation section 15 corresponds to this measurement signal 1. The measured values and the determination results are compared with the values set in , and a determination of good or bad is made, and all measured values and determination results are displayed on the display unit 16 at the same time. Furthermore, if necessary, the control unit 11 performs control to change the state of the device under test 20 according to the stored program, and performs and displays multiple input simultaneous measurements and determinations.
本発明は、以上説明したように、多入力同時比較器を有
し、ここで同時に自動判定が行われており、また、被検
査装置制御器が蓄積プログラムを持つ制御部で制御され
て被検査装置の状態を変えた場合まで検査することがで
きるので、検査工程の時間短縮および検査項目の増加に
よる製品品質の向上が図れる効果がある。As explained above, the present invention has a multi-input simultaneous comparator, in which automatic judgment is performed simultaneously, and the device to be tested controller is controlled by a control unit having a storage program to be tested. Since it is possible to inspect even when the state of the device is changed, it is possible to shorten the inspection process time and improve product quality by increasing the number of inspection items.
図は本発明実施例装置の構成を示すブロック構成図。
1・・・測定信号、2・・・検出出力信号、3・・・比
較信号、4・・・比較出力信号、5・・・状態指定信号
、lO・・・自動測定判定装置、11・・・;l1lJ
御部、12・・・比較信号発生器、13・・・多入力同
時比較器、14・・・被検査装置制御部、15・・・操
作部、16・・・表示部、17・・・検出部、20・・
・被検査装置。The figure is a block configuration diagram showing the configuration of an apparatus according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Measurement signal, 2...Detection output signal, 3...Comparison signal, 4...Comparison output signal, 5...State designation signal, lO...Automatic measurement determination device, 11...・;l1lJ
Control section, 12... Comparison signal generator, 13... Multi-input simultaneous comparator, 14... Device under test control section, 15... Operation section, 16... Display section, 17... Detection unit, 20...
・Device to be inspected.
Claims (1)
信号と比較信号とを入力する比較器と、この比較信号の
値を変化させる比較信号発生器と、 この比較信号発生器の状態および上記比較器の論理出力
に基づき上記アナログ測定信号に対応する測定値を得る
測定手段と、 この測定値と設定された基準値との大小関係を判定する
判定手段と を備えた自動測定判定装置において、 上記比較器は上記アナログ測定信号に対応して多数個設
けられ、 上記被検査装置の測定にかかわる複数の条件を設定でき
るプログラム制御された状態制御器を備え、 上記測定手段および上記判定手段は、 この状態制御器で設定された測定条件ごとに上記多数個
の比較器の出力に応答する手段を含むことを特徴とする
自動測定判定装置。(1) A comparator that inputs an analog measurement signal sent from a measurement point of the device under test and a comparison signal, a comparison signal generator that changes the value of this comparison signal, and the status of this comparison signal generator and the above. An automatic measurement/judgment device comprising a measuring means for obtaining a measured value corresponding to the analog measurement signal based on the logical output of a comparator, and a judging means for judging the magnitude relationship between this measured value and a set reference value, A plurality of the comparators are provided corresponding to the analog measurement signals, and the comparators are provided with a program-controlled state controller that can set a plurality of conditions related to the measurement of the device under test, and the measuring means and the determining means include: An automatic measurement/judgment device characterized by comprising means for responding to the outputs of the plurality of comparators for each measurement condition set by the state controller.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18214984A JPS6159211A (en) | 1984-08-30 | 1984-08-30 | Automatic measuring and judging apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18214984A JPS6159211A (en) | 1984-08-30 | 1984-08-30 | Automatic measuring and judging apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6159211A true JPS6159211A (en) | 1986-03-26 |
Family
ID=16113211
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18214984A Pending JPS6159211A (en) | 1984-08-30 | 1984-08-30 | Automatic measuring and judging apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6159211A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6459009A (en) * | 1987-08-28 | 1989-03-06 | Kubota Ltd | Sensor output decision device |
-
1984
- 1984-08-30 JP JP18214984A patent/JPS6159211A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6459009A (en) * | 1987-08-28 | 1989-03-06 | Kubota Ltd | Sensor output decision device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2000074986A (en) | Device testing device | |
JP5496620B2 (en) | Insulation inspection device and insulation inspection method | |
JPS6159211A (en) | Automatic measuring and judging apparatus | |
JP4314096B2 (en) | Semiconductor integrated circuit inspection apparatus and semiconductor integrated circuit inspection method | |
JPH01156681A (en) | Circuit board inspecting method | |
JPH09203764A (en) | Method for judging presence or absence of poorly connected lead by using four-terminal measuring method | |
JPH03197880A (en) | Output display method for defective data by in-circuit tester | |
KR0177987B1 (en) | Multiple semiconductor chip test method | |
JPH04190175A (en) | Ic tester | |
KR19980039119A (en) | Circuit function inspection device with automatic adjustment function and its adjustment method | |
CN118566655A (en) | Off-line detection method and device for GIS/GIL micro defects | |
KR0135332B1 (en) | Double integrated circuit test apparatus and method with automatic control adapter | |
JP2003150226A (en) | Method for monitoring manufacturing process | |
JPH08201125A (en) | Measuring apparatus | |
KR200146658Y1 (en) | Test apparatus for semiconductor device | |
JPH09264829A (en) | Detection method for rupture point in material testing machine | |
JPH08124979A (en) | Check method of semiconductor element | |
JPH03122580A (en) | Method of inspecting integrated circuit | |
JPH04106944A (en) | Wafer testing | |
JPH01172768A (en) | Preparation of reference data in printed circuit board inspection apparatus | |
JPH04177855A (en) | Method for inspecting integrated circuit device | |
JPS63173978A (en) | Inspection of printed circuit board | |
JPS5987377A (en) | Semiconductor tester | |
JPS62294984A (en) | Semiconductor inspecting device | |
JPH03197881A (en) | Output display method for defective data by in-circuit tester |