JPS6159007B2 - - Google Patents

Info

Publication number
JPS6159007B2
JPS6159007B2 JP15668276A JP15668276A JPS6159007B2 JP S6159007 B2 JPS6159007 B2 JP S6159007B2 JP 15668276 A JP15668276 A JP 15668276A JP 15668276 A JP15668276 A JP 15668276A JP S6159007 B2 JPS6159007 B2 JP S6159007B2
Authority
JP
Japan
Prior art keywords
vibrator
vibration
value
vibrating piece
tuning fork
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15668276A
Other languages
Japanese (ja)
Other versions
JPS5386189A (en
Inventor
Hiromi Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP15668276A priority Critical patent/JPS5386189A/en
Publication of JPS5386189A publication Critical patent/JPS5386189A/en
Publication of JPS6159007B2 publication Critical patent/JPS6159007B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/0504Holders; Supports for bulk acoustic wave devices
    • H03H9/0514Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
    • H03H9/0519Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps for cantilever

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【発明の詳細な説明】 本発明は、高次振動を抑圧した水晶その他の圧
電振動子に関するものである。圧電振動子は、良
く知られているように、利用しようとしている一
次振動(基本振動)のほかに、多くの高次振動が
存在する。このような圧電振動子を用いて、発振
回路を構成すると、発振回路は、しばしば不要の
高次振動で動作することがある。そこで、このよ
うな高次振動を防止するのに、従来は、圧電振動
子を構成している振動片の電極寸法を適切な値に
選んで、同一極性に発生する電荷が、高次振動の
場合だけ相殺されるようにして、高次振動のCI
(クリスタルインピーダンス)値を一次振動のそ
れにくらべて大きくなるようにしていた。しかし
この方法では、電極寸法にわずかでも製作誤差が
あると、電荷の相殺効果は十分でなくなること、
一次振動のCI値も電荷の相殺を行わない場合に
くらべて大きくなつてしまうなどの欠点があつ
た。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a crystal or other piezoelectric vibrator that suppresses high-order vibrations. As is well known, piezoelectric vibrators have many higher-order vibrations in addition to the primary vibration (fundamental vibration) that they are intended to utilize. When an oscillation circuit is constructed using such a piezoelectric vibrator, the oscillation circuit often operates with unnecessary high-order vibrations. Therefore, in order to prevent such high-order vibrations, conventionally, the electrode dimensions of the vibrating piece constituting the piezoelectric vibrator are selected to appropriate values, so that the charges generated with the same polarity can be prevented from causing high-order vibrations. If only the CI of higher-order oscillations is canceled out,
(crystal impedance) value was made larger than that of primary vibration. However, with this method, if there is even a slight manufacturing error in the electrode dimensions, the charge cancellation effect will not be sufficient.
There were drawbacks such as the CI value of the primary vibration being larger than that without charge cancellation.

本発明は、電荷の相殺とは原理的に異つた手段
で、高次振動の防止が達成されるような水晶その
他の圧電振動子を提案することを目的とするもの
で、その要旨とするところは、圧電振動子を構成
している保持器に存在する固有振動と振動片に存
在する高次振動との結合を密接にし、圧電振動子
の高次振動に対するQ値を減少させることによつ
て、高次振動のCI値を増大させることにある。
The purpose of the present invention is to propose a crystal or other piezoelectric vibrator in which prevention of high-order vibrations is achieved by means fundamentally different from charge cancellation. By closely coupling the natural vibration existing in the cage that makes up the piezoelectric vibrator and the higher-order vibration existing in the vibrating element, and reducing the Q value for the higher-order vibration of the piezoelectric vibrator. , to increase the CI value of higher-order vibrations.

以下本発明を、音叉型水晶振動子に適用した場
合について説明する。第1図は、本発明の実施例
で、1は水晶からなる音叉形状の振動片を示し、
保持器は、振動片の支持部材2、気密端子3及び
封じ管4から成立つているとする。音叉型振動子
の高次振動で問題となるのは、主として二次振動
で、音叉型振動片の振動は、非常にわずかながら
保持器に伝達されている。第1図の振動子で封じ
管をはずした場合の振動子を第2図に示す。第2
図の振動子を真空中で周波数応答を測定すると第
3図に示すようになる。第3図の横軸は振動子を
一定電圧(50mV)で駆動したときの駆動電圧の
周波数であり、たて軸は振動子を流れる電流値で
ある。第3図から振動子の一次振動は約32kHzに
あり、抑圧しようとしている二次振動は約
185kHzにあり、その応答の強さ(振動子の電流
値)は、1次振動のそれとほぼ同程度になつてい
る。このとき一次振動のCI値は約180KΩで、二
次振動のそれは約20KΩ位である。尚第2図で、
音叉型振動片1の寸法は、長さが6.7mm、幅1.4
mm、厚み0.5mm、スリツトの長さ3.7mm、スリツト
幅0.2mmである。ところで第1図の振動子で封じ
管4は、材質が黄銅からなり、寸法が直径3mm、
長さ10mm、肉厚0.15mm、に設計し、気密端子3が
コバールとガラスからなり支持部材2がコバール
の場合には、保持器に存在する多数の固有振動数
のうちの一つが音叉型振動片1(振動片寸法は第
2図の場合と同じ)の二次振動数にほぼ一致する
ようになる、このとき第1図の振動子の周波数応
答(駆動電圧50mV)を測定すると第4図に示す
ようになり、一次振動の応答は32KHzにあり、
その応答の強さも封じ管がない場合(第3図)と
ほとんど同じになるが、二次振動の応答は、周波
数がわずかに離れて二個(184KHz、186KHz)
現れるようになり、その応答の強さは封じ管のな
い場合にくらべて激減している。この場合2個の
高次振動におけるCI値は非常に大きな値とな
り、数値的には約200KΩ位となる。従つて高次
振動の抑圧は十分達成されている。一方保持器の
固有振動数が音叉型振動片の二次振動数にほぼ一
致していない場合、その周波数応答は、封じ管の
ない場合(第3図)とほとんど同じであるか、又
は185KHzの他に、小さな応答が195KHz位にも
現れるかである。いずれにしても二次振動
(185KHz)の応答の強さは小さくならない。
Hereinafter, a case will be described in which the present invention is applied to a tuning fork type crystal resonator. FIG. 1 shows an embodiment of the present invention, in which 1 indicates a tuning fork-shaped vibrating piece made of crystal;
It is assumed that the holder is made up of a support member 2 for the vibrating element, an airtight terminal 3, and a sealed tube 4. The problem with the high-order vibrations of the tuning fork type vibrator is mainly the secondary vibration, and the vibration of the tuning fork type vibrating piece is transmitted to the cage in a very small amount. FIG. 2 shows the vibrator shown in FIG. 1 with the sealed tube removed. Second
When the frequency response of the vibrator shown in the figure is measured in a vacuum, the result is as shown in FIG. 3. The horizontal axis in FIG. 3 is the frequency of the driving voltage when the vibrator is driven with a constant voltage (50 mV), and the vertical axis is the value of the current flowing through the vibrator. From Figure 3, the primary vibration of the vibrator is at approximately 32kHz, and the secondary vibration that we are trying to suppress is approximately
The frequency is 185kHz, and the strength of the response (current value of the vibrator) is almost the same as that of the primary vibration. At this time, the CI value of the primary vibration is approximately 180KΩ, and that of the secondary vibration is approximately 20KΩ. In addition, in Figure 2,
The dimensions of the tuning fork type vibrating piece 1 are 6.7 mm in length and 1.4 mm in width.
mm, thickness 0.5mm, slit length 3.7mm, and slit width 0.2mm. By the way, in the vibrator shown in Fig. 1, the sealed tube 4 is made of brass and has a diameter of 3 mm.
If it is designed to have a length of 10 mm and a wall thickness of 0.15 mm, and the airtight terminal 3 is made of Kovar and glass, and the support member 2 is made of Kovar, one of the many natural frequencies that exist in the cage will be a tuning fork type vibration. When the frequency response of the vibrator in Figure 1 (driving voltage 50 mV) is measured, it becomes almost equal to the secondary frequency of piece 1 (the dimensions of the vibrating element are the same as in Figure 2). As shown in , the primary vibration response is at 32KHz,
The strength of the response is almost the same as when there is no sealed tube (Figure 3), but the secondary vibration response has two frequencies slightly apart (184KHz, 186KHz).
The strength of the response is drastically reduced compared to the case without the sealed tube. In this case, the CI value for the two higher-order vibrations becomes a very large value, numerically about 200KΩ. Therefore, suppression of higher-order vibrations has been sufficiently achieved. On the other hand, if the natural frequency of the cage does not nearly match the secondary frequency of the tuning fork vibrating piece, the frequency response will be almost the same as without the sealed tube (Figure 3), or the frequency response will be 185KHz. In addition, a small response appears at around 195KHz. In any case, the strength of the secondary vibration (185KHz) response does not decrease.

以上説明したように、本発明によれば、高次振
動のCI値を一次振動のそれの10倍位大きくでき
るため、発振回路に振動子を接続した場合、高次
振動の発振防止が確実に行えるようになり、その
うえ、振動片の電極寸法は、一次振動のCI値が
最適値をとるように決められるメリツトも生じ、
本発明の効果は極めて大きい。又本発明を従来の
電荷相殺の方法と併用すれば、より一層高次振動
の防止が達成できることは言うまでもない。
As explained above, according to the present invention, the CI value of higher-order vibrations can be made about 10 times larger than that of primary vibrations, so when a vibrator is connected to an oscillation circuit, oscillation of high-order vibrations can be reliably prevented. In addition, the electrode dimensions of the vibrating element can be determined in such a way that the CI value of the primary vibration takes the optimum value.
The effects of the present invention are extremely large. It goes without saying that if the present invention is used in combination with the conventional charge cancellation method, higher-order vibrations can be prevented even further.

尚本発明は、音叉型水晶振動子に限定されるも
のではなく、他の型の振動子に対しても同様の効
果が期待されるものである。
Note that the present invention is not limited to tuning fork type crystal resonators, and similar effects are expected for other types of resonators.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例で、音叉型水晶振動子
を示す側面図、第2図は、第1図に示す振動子で
封じ管を取り去つた状態の振動子を示す側面図、
第3図は、第2図に示された振動子の真空中にお
ける周波数応答を示す特性図、第4図は、本発明
の振動子の周波数応答を示す特性図である。 1……音叉型水晶振動片、2……支持部材、3
……気密端子、4……封じ管。
FIG. 1 is a side view showing a tuning fork type crystal resonator according to an embodiment of the present invention, and FIG. 2 is a side view showing the resonator shown in FIG. 1 with the sealing tube removed.
FIG. 3 is a characteristic diagram showing the frequency response of the vibrator shown in FIG. 2 in vacuum, and FIG. 4 is a characteristic diagram showing the frequency response of the vibrator of the present invention. 1... Tuning fork type crystal vibrating piece, 2... Supporting member, 3
...Hermetic terminal, 4...Sealed tube.

Claims (1)

【特許請求の範囲】[Claims] 1 振動片の支持部材、気密端子及び封じ管より
成る保持器と圧電振動片とからなる圧電振動子に
おいて、保持器の固有振動数が、圧電振動片の高
次固有振動数にほぼ一致していることを特徴とす
る圧電振動子。
1. In a piezoelectric vibrator consisting of a piezoelectric vibrating piece and a holder consisting of a support member for the vibrating piece, an airtight terminal, and a sealed tube, the natural frequency of the holder almost matches the higher-order natural frequency of the piezoelectric vibrating piece. A piezoelectric vibrator characterized by:
JP15668276A 1976-12-25 1976-12-25 Piezoelectric vibrator Granted JPS5386189A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15668276A JPS5386189A (en) 1976-12-25 1976-12-25 Piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15668276A JPS5386189A (en) 1976-12-25 1976-12-25 Piezoelectric vibrator

Publications (2)

Publication Number Publication Date
JPS5386189A JPS5386189A (en) 1978-07-29
JPS6159007B2 true JPS6159007B2 (en) 1986-12-15

Family

ID=15633010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15668276A Granted JPS5386189A (en) 1976-12-25 1976-12-25 Piezoelectric vibrator

Country Status (1)

Country Link
JP (1) JPS5386189A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0530884Y2 (en) * 1987-03-24 1993-08-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0530884Y2 (en) * 1987-03-24 1993-08-09

Also Published As

Publication number Publication date
JPS5386189A (en) 1978-07-29

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