JPS6158775B2 - - Google Patents
Info
- Publication number
- JPS6158775B2 JPS6158775B2 JP17238680A JP17238680A JPS6158775B2 JP S6158775 B2 JPS6158775 B2 JP S6158775B2 JP 17238680 A JP17238680 A JP 17238680A JP 17238680 A JP17238680 A JP 17238680A JP S6158775 B2 JPS6158775 B2 JP S6158775B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- ultrafine particle
- film
- sensitivity
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011882 ultra-fine particle Substances 0.000 claims description 18
- 238000001514 detection method Methods 0.000 claims description 6
- 239000012528 membrane Substances 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 28
- 239000010408 film Substances 0.000 description 21
- 230000035945 sensitivity Effects 0.000 description 13
- 238000010586 diagram Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17238680A JPS5796248A (en) | 1980-12-05 | 1980-12-05 | Detecting method for gas using superparticulate gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17238680A JPS5796248A (en) | 1980-12-05 | 1980-12-05 | Detecting method for gas using superparticulate gas sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5796248A JPS5796248A (en) | 1982-06-15 |
| JPS6158775B2 true JPS6158775B2 (enrdf_load_stackoverflow) | 1986-12-13 |
Family
ID=15940952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17238680A Granted JPS5796248A (en) | 1980-12-05 | 1980-12-05 | Detecting method for gas using superparticulate gas sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5796248A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH041492Y2 (enrdf_load_stackoverflow) * | 1984-12-27 | 1992-01-20 | ||
| JPH041493Y2 (enrdf_load_stackoverflow) * | 1984-12-27 | 1992-01-20 | ||
| JPH0411165Y2 (enrdf_load_stackoverflow) * | 1984-12-28 | 1992-03-19 | ||
| JPH0411166Y2 (enrdf_load_stackoverflow) * | 1984-12-28 | 1992-03-19 | ||
| JPS6221034A (ja) * | 1985-07-19 | 1987-01-29 | Junkosha Co Ltd | 漏液検知センサ |
-
1980
- 1980-12-05 JP JP17238680A patent/JPS5796248A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5796248A (en) | 1982-06-15 |
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