JPS6158774B2 - - Google Patents

Info

Publication number
JPS6158774B2
JPS6158774B2 JP52003199A JP319977A JPS6158774B2 JP S6158774 B2 JPS6158774 B2 JP S6158774B2 JP 52003199 A JP52003199 A JP 52003199A JP 319977 A JP319977 A JP 319977A JP S6158774 B2 JPS6158774 B2 JP S6158774B2
Authority
JP
Japan
Prior art keywords
sample
analysis
fine movement
movement device
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52003199A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5388565A (en
Inventor
Hiroyoshi Soejima
Tadahiro Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Shimazu Seisakusho KK
Original Assignee
Shimazu Seisakusho KK
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimazu Seisakusho KK, Kawasaki Steel Corp filed Critical Shimazu Seisakusho KK
Priority to JP319977A priority Critical patent/JPS5388565A/ja
Publication of JPS5388565A publication Critical patent/JPS5388565A/ja
Publication of JPS6158774B2 publication Critical patent/JPS6158774B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP319977A 1977-01-14 1977-01-14 Sample position deciding device for electronic analyzer Granted JPS5388565A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP319977A JPS5388565A (en) 1977-01-14 1977-01-14 Sample position deciding device for electronic analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP319977A JPS5388565A (en) 1977-01-14 1977-01-14 Sample position deciding device for electronic analyzer

Publications (2)

Publication Number Publication Date
JPS5388565A JPS5388565A (en) 1978-08-04
JPS6158774B2 true JPS6158774B2 (enExample) 1986-12-13

Family

ID=11550743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP319977A Granted JPS5388565A (en) 1977-01-14 1977-01-14 Sample position deciding device for electronic analyzer

Country Status (1)

Country Link
JP (1) JPS5388565A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005207908A (ja) * 2004-01-23 2005-08-04 Rigaku Industrial Co 蛍光ｘ線分析装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58112341A (ja) * 1981-12-26 1983-07-04 Fujitsu Ltd 集積回路解析装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS534433B2 (enExample) * 1974-11-29 1978-02-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005207908A (ja) * 2004-01-23 2005-08-04 Rigaku Industrial Co 蛍光ｘ線分析装置

Also Published As

Publication number Publication date
JPS5388565A (en) 1978-08-04

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