JPS6157805U - - Google Patents
Info
- Publication number
- JPS6157805U JPS6157805U JP1984142398U JP14239884U JPS6157805U JP S6157805 U JPS6157805 U JP S6157805U JP 1984142398 U JP1984142398 U JP 1984142398U JP 14239884 U JP14239884 U JP 14239884U JP S6157805 U JPS6157805 U JP S6157805U
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- light
- film thickness
- thin film
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 12
- 239000010408 film Substances 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984142398U JPS6157805U (US07179912-20070220-C00144.png) | 1984-09-20 | 1984-09-20 | |
| US06/723,567 US4673294A (en) | 1984-09-20 | 1985-04-15 | Film thickness measuring apparatus employing microprojector of spectral reflection measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984142398U JPS6157805U (US07179912-20070220-C00144.png) | 1984-09-20 | 1984-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6157805U true JPS6157805U (US07179912-20070220-C00144.png) | 1986-04-18 |
Family
ID=15314424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984142398U Pending JPS6157805U (US07179912-20070220-C00144.png) | 1984-09-20 | 1984-09-20 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US4673294A (US07179912-20070220-C00144.png) |
| JP (1) | JPS6157805U (US07179912-20070220-C00144.png) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2672387A1 (fr) * | 1991-02-01 | 1992-08-07 | Thomson Csf | Systeme de reglage de gravure d'un composant. |
| US5436725A (en) * | 1993-10-12 | 1995-07-25 | Hughes Aircraft Company | Cofocal optical system for thickness measurements of patterned wafers |
| CN104236470A (zh) * | 2014-09-28 | 2014-12-24 | 江苏普世祥光电技术有限公司 | 一种可以加工ф60以内绝对等厚平面的加工工艺 |
| CN105737747B (zh) * | 2016-05-09 | 2018-08-21 | 中国石油大学(北京) | 往复式膜厚测量仪 |
| CN107525474A (zh) * | 2016-06-22 | 2017-12-29 | 上海宝钢工业技术服务有限公司 | 彩涂板涂层膜厚的在线检测系统 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5694350A (en) * | 1979-12-28 | 1981-07-30 | Hitachi Ltd | Method for correcting white spot defect of photomask |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3851949A (en) * | 1970-06-18 | 1974-12-03 | Leitz Ernst Gmbh | Microscope having a photometer |
| US3827811A (en) * | 1972-03-15 | 1974-08-06 | Nippon Kogaku Kk | Optical measuring device employing a diaphragm with reflecting surfaces |
| US3869211A (en) * | 1972-06-29 | 1975-03-04 | Canon Kk | Instrument for measuring thickness of thin film |
| US4355903A (en) * | 1980-02-08 | 1982-10-26 | Rca Corporation | Thin film thickness monitor |
-
1984
- 1984-09-20 JP JP1984142398U patent/JPS6157805U/ja active Pending
-
1985
- 1985-04-15 US US06/723,567 patent/US4673294A/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5694350A (en) * | 1979-12-28 | 1981-07-30 | Hitachi Ltd | Method for correcting white spot defect of photomask |
Also Published As
| Publication number | Publication date |
|---|---|
| US4673294A (en) | 1987-06-16 |
