JPS6156865B2 - - Google Patents
Info
- Publication number
- JPS6156865B2 JPS6156865B2 JP54110722A JP11072279A JPS6156865B2 JP S6156865 B2 JPS6156865 B2 JP S6156865B2 JP 54110722 A JP54110722 A JP 54110722A JP 11072279 A JP11072279 A JP 11072279A JP S6156865 B2 JPS6156865 B2 JP S6156865B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- mask
- inspection
- detection
- black
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11072279A JPS5635419A (en) | 1979-08-30 | 1979-08-30 | Pattern inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11072279A JPS5635419A (en) | 1979-08-30 | 1979-08-30 | Pattern inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5635419A JPS5635419A (en) | 1981-04-08 |
| JPS6156865B2 true JPS6156865B2 (en, 2012) | 1986-12-04 |
Family
ID=14542821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11072279A Granted JPS5635419A (en) | 1979-08-30 | 1979-08-30 | Pattern inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5635419A (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6160667U (en, 2012) * | 1984-09-25 | 1986-04-24 | ||
| JPS61108316A (ja) * | 1984-10-30 | 1986-05-27 | 九州積水工業株式会社 | 海苔の種付方法 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5852981U (ja) * | 1981-09-26 | 1983-04-11 | 不二製油株式会社 | 常温ゲル化性物質圧送装置 |
| JPS59186323A (ja) * | 1983-04-07 | 1984-10-23 | Fujitsu Ltd | パタ−ン検査方式 |
| KR100447988B1 (ko) * | 1998-10-27 | 2004-11-16 | 주식회사 하이닉스반도체 | 마스크패턴의결함검사방법 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5850414B2 (ja) * | 1975-10-29 | 1983-11-10 | 株式会社日立製作所 | パタ−ンの検査方法 |
-
1979
- 1979-08-30 JP JP11072279A patent/JPS5635419A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6160667U (en, 2012) * | 1984-09-25 | 1986-04-24 | ||
| JPS61108316A (ja) * | 1984-10-30 | 1986-05-27 | 九州積水工業株式会社 | 海苔の種付方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5635419A (en) | 1981-04-08 |
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