JPS6156859A - Conveying method - Google Patents
Conveying methodInfo
- Publication number
- JPS6156859A JPS6156859A JP17838984A JP17838984A JPS6156859A JP S6156859 A JPS6156859 A JP S6156859A JP 17838984 A JP17838984 A JP 17838984A JP 17838984 A JP17838984 A JP 17838984A JP S6156859 A JPS6156859 A JP S6156859A
- Authority
- JP
- Japan
- Prior art keywords
- station
- conveying
- track
- empty
- car
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
- B23Q7/14—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
- B23Q7/1426—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with work holders not rigidly fixed to the transport devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Multi-Process Working Machines And Systems (AREA)
- Discharge Of Articles From Conveyors (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は、搬送システムに係ね、特に搬送要求に対する
待ち時間を少なくシ、かつ渋滞なく搬送する(般送方法
に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a conveyance system, and particularly relates to a general conveyance method that reduces waiting time for conveyance requests and conveys without congestion.
例えば半感体プロセスにおいては、第3図に示すように
、シリコンウェーハなどの搬送物をステーション(ロ)
〜■の相互間を移送させる場合、搬送車(1a)〜(1
e)が軌道(2)に沿ってたとえば矢印で示す方向に移
動することによって行う。−例として、ステーション■
)からステーション03)に搬送スる場合、まず、待機
ゾーン(3)にある搬送車(1c)はステーション色)
の搬送要求によってステーション■に行って搬送物を積
みこみ、ステーションCB>に行って搬送物をおろした
後、空車になると再び待機ゾーンに戻って次の搬送要求
を待つ。また、ステーション囚からステーションに)へ
搬送する場合は、同様に、搬送車が待機ゾーンからステ
ーション(5)で搬送物を積みこみ矢印の方向に移動し
ながら軌道(2a)を通ってステーション■へ行き搬送
物をおろした後、再び待機ゾーンへ戻る。このような動
作を常にくりかえしながら各ステーション間の搬送を行
う。For example, in the semi-sensor process, as shown in Figure 3, objects such as silicon wafers are moved to a station (ro).
When transporting vehicles (1a) to (1)
e) by moving along the trajectory (2), for example in the direction indicated by the arrow. −For example, station■
) to station 03), first, the transport vehicle (1c) in the waiting zone (3) is station color).
In response to a transport request, the vehicle goes to station (3) and loads the goods, goes to station CB> and unloads the goods, and when the car becomes empty, it returns to the waiting zone and waits for the next transport request. Similarly, when transporting objects from the waiting zone to station (5), the transport vehicle loads the objects from the waiting zone to station (5) and moves in the direction of the arrow to station (2a) through track (2a). After unloading the transported items, it returns to the waiting zone again. Conveyance between each station is carried out by constantly repeating such operations.
従来技術においては、空車になると必ず待機ゾ−ンに戻
って搬送要求を待つために、軌道上を空車が移動する回
数が増え、軌道を専有する時間が長くなる。したがって
、軌道上の渋滞を生じ、搬送要求が発生してから実際に
搬送が完了するまでの時間が長く搬送能力に限界があっ
た。捷た、待機ゾーンを複数箇所にもうけるとスペース
が増えるとともに余分な分岐部を必要とするために搬送
車の走行時間が長くなり、全体の搬送能力の向上には寄
与しない。In the prior art, when a car becomes empty, it always returns to the waiting zone to wait for a transport request, which increases the number of times the empty car moves on the track and lengthens the time it occupies the track. Therefore, congestion occurred on the track, and the time from when a transport request was issued until the actual transport was completed was long, and the transport capacity was limited. If a plurality of standby zones are provided at multiple locations, the space will increase and extra branching sections will be required, which will lengthen the traveling time of the transport vehicle and will not contribute to improving the overall transport capacity.
よって、このような問題点を解決できる、スペース効率
がよくかつ搬送能力の高い搬送システムが要求されて(
ハる。Therefore, there is a need for a space-efficient and high-capacity transportation system that can solve these problems (
Haru.
本発明の目的は、搬送軌道上の渋滞を少なくし、搬送能
力の高い搬送方法を提供するにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a transport method that reduces congestion on a transport track and has high transport capacity.
〔発明の概要〕
ルーフ状の軌道に沿って複数のステーションが′11
配置され軌道を一定方向に走行する搬送車により搬送物
をステーションに移送する搬送方法において、搬送回数
が多いステーションの上記搬送車走行方向子^IJにあ
り搬送回数が少ないステー7ヨン及び分岐軌道から選択
された少なくともいずれか一方に空車状態の搬送車を待
機させるようにしたものである。[Summary of the Invention] In a transport method in which a plurality of stations are arranged along a roof-shaped track and objects are transported to the stations by a transport vehicle traveling in a fixed direction on the track, the above-mentioned transport vehicle of a station that is frequently transported is provided. An empty conveyance vehicle is made to wait on at least one selected from the station 7 and the branch track, which are in the traveling direction ^IJ and have a small number of conveyances.
以下1本発明の一実施例を図面を参照して詳述する。な
お、従来技術の説明rこ用いた第3図と同一部分には同
一記号を付して、詳細な説明を省略する。An embodiment of the present invention will be described below in detail with reference to the drawings. Note that the same parts as those in FIG. 3 used in the explanation of the prior art are given the same symbols, and detailed explanation will be omitted.
第1図に示すように、ステーション囚・・(F)の中で
特に搬送回数が多いステーションを(B)とし、逆に搬
送回数の少ないステーションを(ロ)、V)とすると、
ステーションQ3)に対して、ルーズ状の軌道(2)に
沿って矢印方向に移動する搬送車(1a)・・・(1e
)の移動方向が手前側に和尚するステーション(5)。As shown in Figure 1, among the station prisoners (F), the station that is transported the most times is designated as (B), and conversely, the stations that are transported the least number of times are designated as (B) and V).
Transport vehicles (1a)...(1e) move in the direction of the arrow along the loose trajectory (2) with respect to station Q3).
), the movement direction of which is toward the front (5).
「)には空車になった搬送車(la)、(lb)が常に
待機するようにする。そして、搬送回数が多いステーシ
ョンCB)からの搬送要求に対しては、より近いステー
7ヨン(4)の空車たとえば搬送車(la)がステーシ
ョン(B)に行って搬送物を積みこんでその行先のステ
ーションへ行ってfJtみおろす。空車がなくなったス
テーション(5)にハ、ステーション■の空車である崖
送車(1b)が行くか、あるいは他のステーションで空
車になった咲送車の中で近くにあるものが行って次の搬
送要求を待つ。なお待機しているたとえばステーション
■あるいはステーション■に搬送物を運んで搬送車が到
着した時は、空車がステーション(ト)から出だあと再
び空車がステーション■に入って待機するようにして運
用をくりかえす。Empty transport vehicles (la) and (lb) are always on standby at station CB), which is located nearer station CB). ) For example, a transport vehicle (la) goes to station (B), loads the transported goods, goes to the destination station, and unloads fJt. At station (5), where there are no vacant vehicles, there is an empty vehicle at station ■. A cliff transport vehicle (1b) goes, or a nearby empty Saki transport vehicle at another station goes and waits for the next transport request.For example, station ■ or station When the conveyance vehicle arrives at ■ after transporting goods, the operation is repeated such that after the empty vehicle leaves station (G), the empty vehicle enters station ■ and waits.
実施例の搬送方法によると、従来技術において生じた空
車による軌道上の渋滞がなくなり、ざらに搬送回数の多
いステーションの搬送要求に対してロスタイムを少なく
することができるため、搬送システム全体の能力を向上
させることができ、非常に高い1般送能力を達成するこ
とができる。また、待機ゾーンを少なくすることができ
るため、スペースを有効に活用できる。 ・
なお、空車が待機する場所として、ステーションだけに
限らず第2図に示すように軌道内にもうけられているバ
イパス(2b)の部分に空車を待機させてコ里用しても
同様の効果を得ることができる。According to the transport method of the embodiment, the congestion on the track due to empty cars that occurred in the conventional technology is eliminated, and the loss time can be reduced in response to transport requests from stations that have a large number of transports, so the capacity of the entire transport system can be improved. It is possible to achieve a very high general feed capacity. Furthermore, since the number of waiting zones can be reduced, space can be used effectively.・In addition, the place where empty cars wait is not limited to the station, but the same effect can be obtained by having empty cars wait at the bypass (2b) part of the track, as shown in Figure 2. can be obtained.
また、空車の待機場所としては、ステーションとバイパ
スの両方を用いるようにしてもよい。Further, both a station and a bypass may be used as a waiting area for empty cars.
本発明によれば、空車による軌道上の渋滞がなくなり、
ざらに搬送回数の多いステーションの搬送要求に対して
ロスタイムを少なくすることができるため、搬送システ
ム全体の能力を向上させることができ、非常に高い搬送
能力を達成することができる。まだ、待1υ1ゾーンを
少なくすることができるだめ、スペースを有効に活用で
きる。According to the present invention, congestion on the tracks due to empty cars is eliminated,
Since the loss time can be reduced in response to transport requests from stations that have a large number of transports, the performance of the entire transport system can be improved and extremely high transport capacity can be achieved. However, since the number of waiting zones can be reduced, the space can be used effectively.
第1図は本発明の一実施例の搬送方法の説明図、′P;
2図は本発明の他の実施例の搬送方法の説明図、8F
3図は従来の搬送方法の612明図である。
■・・・いニスチージョン、:(1a)・・・(le)
:fQ送車、(2):軌道、(2b) :バイパス(分
岐軌道)。FIG. 1 is an explanatory diagram of a conveying method according to an embodiment of the present invention, 'P;
Figure 2 is an explanatory diagram of a conveying method according to another embodiment of the present invention, 8F
FIG. 3 is a 612-color diagram of the conventional conveyance method. ■...Nishti John: (1a)...(le)
: fQ vehicle transport, (2): Track, (2b): Bypass (branch track).
Claims (1)
上記軌道を一定方向に走行する搬送車により搬送物を上
記ステーションに移送する搬送方法において、上記複数
のステーションのうちから選択された特定のステーショ
ンに対して上記搬送車の進行方向に対して手前側近接位
置にあり且つ上記特定のステーションよりも搬送回数が
少ないステーション及び上記軌道から分岐して設けられ
た分岐軌道のうちから選択された少なくともいずれか一
方にて空車状態になった上記搬送車を待機させることを
特徴とする搬送方法。In a transportation method in which a plurality of stations are arranged along a loop-shaped track and a conveyance vehicle traveling in a fixed direction on the track transports the object to the station, the object is transferred to a specific station selected from among the plurality of stations. On the other hand, at least one selected from a station that is located close to the front side in the traveling direction of the conveyance vehicle and that has a fewer number of conveyances than the specific station, and a branch track that is provided branching off from the track. A transportation method characterized in that the transportation vehicle, which has become empty, is placed on standby on one side.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17838984A JPS6156859A (en) | 1984-08-29 | 1984-08-29 | Conveying method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17838984A JPS6156859A (en) | 1984-08-29 | 1984-08-29 | Conveying method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6156859A true JPS6156859A (en) | 1986-03-22 |
JPH0158021B2 JPH0158021B2 (en) | 1989-12-08 |
Family
ID=16047636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17838984A Granted JPS6156859A (en) | 1984-08-29 | 1984-08-29 | Conveying method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6156859A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6329944A (en) * | 1986-07-24 | 1988-02-08 | Nikon Corp | Conveyor for wafer or wafer carrier |
JPH02132840A (en) * | 1988-02-12 | 1990-05-22 | Tokyo Electron Ltd | Manufacturing device |
US5339128A (en) * | 1988-02-12 | 1994-08-16 | Tokyo Electron Limited | Resist processing method |
-
1984
- 1984-08-29 JP JP17838984A patent/JPS6156859A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6329944A (en) * | 1986-07-24 | 1988-02-08 | Nikon Corp | Conveyor for wafer or wafer carrier |
JPH02132840A (en) * | 1988-02-12 | 1990-05-22 | Tokyo Electron Ltd | Manufacturing device |
US5339128A (en) * | 1988-02-12 | 1994-08-16 | Tokyo Electron Limited | Resist processing method |
Also Published As
Publication number | Publication date |
---|---|
JPH0158021B2 (en) | 1989-12-08 |
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