JPS6155707A - Two-axes positioning device - Google Patents

Abstract

PURPOSE:To improve the performance of a 2-axes positioning device by supporting fixedly one end of a guiding stator of a Y axis linear motor with a rotor of an X-axis linear motor and moving the other end toward the Y axis by the motor of the other X axis linear motor. CONSTITUTION:The 2-axes positioning is attained with the 1st axis X, the 2nd axis Y, the guiding stator 1s of the X axis linear motor, the guiding stator 3s of the Y axis linear motor, the rotor 1M of the X axis linear motor. A projection 4 is provided to the rotor 1M of the X axis linear motor and fitted to a slot provided to one end of the guiding stator 3s of the Y axis linear motor. Thus, the rotor 1M of the X axis linear motor supports the guiding stator 3s of the Y axis linear motor. Through the mechanism above, the guiding stator 3s of the Y axis linear motor is slid toward the Y direction to the rotor 1M of the X axis linear motor.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a two-axis positioning device such as an xY plotter or an XY table that can be used in fields such as measurement and control equipment, office equipment, and industrial equipment.

Configuration of conventional example and its problems A conventional two-axis positioning device using a linear motor is W, 1
As shown in the figure, a guide stator 1s and a guide stator 1s are arranged and fixed along the arrow X direction.
It is equipped with a mover 1M guided by a linear motor 1L.
, a linear motor 2L including a guide stator 2s arranged and fixed in parallel with the guide stator 1s at a predetermined interval, and a movable element 2M guided by the guide stator 2s; and a linear motor 3L having a movable element 3M guided by a guide stator 3s fixedly supported at both ends by the movable elements 1M and 2M, and a two-axis positioning control object 3P attached to the movable element 3M. Position □.

In the two-axis positioning device shown in Fig. 1, the guide stators 1s and 28
are not arranged strictly parallel or the guide stator 1s
Or, if the guide stator 2s or both are curved, pressure or tension acts between the guide stator 1s and the mover 1M and between the guide stator 2s and the mover 2M,
Normal operation of linear motors 1L and 2L is prevented.

In order to move the mover smoothly, the degree of parallelism and curvature should be adjusted by a few microns.
It is necessary to suppress the thickness to several tens of micrometers, and extremely high precision is required, which has a serious impact on mass productivity and cost.

OBJECTS OF THE INVENTION An object of the present invention is to eliminate these conventional problems, improve the performance of a two-axis positioning device using a linear motor, and improve mass productivity.

Structure of the Invention The two-axis positioning device of the present invention includes a first guide stator member disposed and fixed along the first axial direction, and a small constant gap formed with respect to the first guide stator member. a first movable element that can be guided by this member and linearly movable in the first axial direction while maintaining the position of the movable element; a first IJ near motor that obtains thrust through a magnetic circuit, and a second guide arranged and fixed parallel to the first axial direction at a predetermined distance from the first guide stator member. A second linear motor having the same configuration as the first linear motor, comprising a stator and a second movable element that is guided by the second guiding stator member and movable in the first axial direction.
a linear motor extending along a second axial direction intersecting the first axis, one end fixedly supported by the first movable element, and the other end being fixedly supported by the second movable element in the second axial direction. a third guide stator member movably supported; and a third movable element guided by the third guide stator member and movable linearly in the second axial direction, It is composed of a third linear motor having the same configuration as the first linear motor, and a shaft positioning control object attached to a third movable element of the third linear motor.

DESCRIPTION OF EMBODIMENTS The present invention will be described in detail below with the first axis being the X axis and the second axis being the Y axis.

The present invention uses two linear motors in the X-axis direction and one linear motor in the Y-axis direction, and one end of the guide stator member of the Y-axis IJ near motor is fixedly supported by the movable element of one of the X-axis near motors. The other end is configured to be slidably supported in the Y direction by the movable element of the other X-axis near motor.

The movable support mechanism for the guide stator of the Y-axis near motor will be explained below with reference to the drawings. Figure 2 is a perspective view of the main parts of the first embodiment of the two-axis positioning device of the present invention. , 1s is a guide stator for the X-axis near motor, 3s is a guide stator for the Y-axis near motor, and 1M is a movable element for the X-axis near motor.

4 is a protrusion provided on the movable element of the X-axis near motor, and by engaging this with a groove provided on one end of the guide stator 3s of the Y-axis near motor, the movable element of the X-axis near motor can be moved. Supports the guide stator of the Y-axis near motor. By using a support mechanism as shown in FIG. 2, the guide stator 3s of the Y-axis near motor can slide in the Y direction with respect to the movable element 1M of the X-axis near motor.

FIG. 3 is a perspective view of the main parts of the second embodiment of the two-axis positioning device of the present invention, where IS is the guide stator of the X-axis near motor, 1M is the movable element of the X-axis near motor, and 3s is the Y-axis Guide stator for sunar motor, 5a.

5b are protrusions provided on the movable element 1M of the X-axis near motor. By engaging the protrusions sa and sb with two grooves provided in the mover of the Y-axis near motor, the guide stator of the Y-axis IJ near motor is supported. By using a support mechanism as shown in Fig. 3, the guide stator 3s of the Y-axis near motor can slide in the Y direction with respect to the mover 1M of the X-axis near motor, and the guide stator 3s of the Y-axis near motor can slide in the Y direction. X centered on the slidable support part of the stator 3s
'Rotation in the +7 plane is restricted.

FIG. 4 is a perspective view of the main parts of the third embodiment of the two-axis positioning device of the present invention, where 1s is the guide stator of the X-axis 1/near motor, 1M is the X-axis +7 movable member of the near motor, and 3s is the movable element of the X-axis +7 near motor. The guide stators of the Y-axis IJ near motor, sa and ab, are bearings provided on the X-axis near motor mover 1M, respectively. Bearings ea and eb sandwich and support the guide stator 3s of the Y-axis near motor. By using a support mechanism as shown in Fig. 3, the stator 3s of the Y-axis near motor is moved to the Y axis relative to the mover 1M of the X-axis near motor.
The rotation of the guide stator 3s of the Y-axis near motor in the XY plane about the support part that is slidable smoothly in the axial direction and that is slidable in the X-axis direction is restricted.

Said 1st. Second. In the third embodiment, the movable element 1M of the X-axis near motor supports the guide stator 3s of the Y-axis near motor, and the support mechanism supports the guide stator 3s of the Y-axis near motor.
Since the description includes a mechanism for moving the mover 1M of the X-axis near motor, the method of supporting the guide stator 3s of the Y-axis IJ near motor in the direction perpendicular to the XY plane is omitted.

FIG. 5 is a perspective view of the main parts of the fourth embodiment of the two-axis positioning device of the present invention, in which 1s is a guide stator for the X-axis motor;
M is a movable element of the X-axis IJ near motor, 3s is a guide stator of the Y-axis near motor, and R is a support member. The support member 7 is fixedly supported at both ends by the movable member 1M of the X-axis near motor with screws sa and sb, and the guide stator 3s of the Y-axis near motor is fixedly supported by the support member 7 with screws 9a and 9b. It is fixedly supported. By using a suitable flexible material for the support member 7, the guide stator 3s of the Y-axis near motor can be moved in the Y direction with respect to the movable element 1M of the X-axis near motor, and Depending on the shape of the support member a,
The rotation of the guide stator of the Y-axis near motor in the XY plane around the support member 7 and the movement of the support member in the X direction are restricted due to the high rigidity of the support member 7, and furthermore, the support mechanism is easy.

Effects of the Invention In a two-axis positioning device constituted by two linear motors in the X-axis direction and a linear motor in the Y-direction in which both ends of the guide stator are supported by movers of the linear motors in the X-axis direction, By providing a support mechanism that holds one end of the guide stator of the sunar motor on one of the Even if the guide stator of the two X-axis near motors is curved, it is possible to eliminate the stiffness of the X-axis near motors, so it is possible to realize smooth and normal operation of the two X-axis near motors. In other words, it is not necessary to arrange the guide stators of the two X-axis near motors strictly in parallel, and it is not necessary to arrange the guide stators of the two X-axis guide stators strictly in parallel. The requirements for machining accuracy and longitudinal straightness are significantly relaxed.

Due to the above effects, when commercializing a two-axis positioning device, stable performance is obtained, and assembly workability is improved.
Work costs and parts costs can be reduced.

[Brief explanation of drawings]

FIG. 1 is a schematic perspective view of a two-axis positioning device using a conventional linear motor, and FIG.
FIG. 3 is a perspective view of the main parts of the shaft positioning device. 4 and 5 are perspective views of essential parts in other embodiments of the present invention, respectively. 1s... Guide stator, 1M... Mover, 1L... First X-axis near motor, 2s...
...Guiding stator, 2M...Mover, 2L.
...Second X-axis near motor, 3s...
Guide stator, 3M... Mover, 3L...
・Y-axis near motor, 3P...2-axis positioning control target, a, 5a, sb...Protrusion, 6a,
6b...Bearing, 7...Supporting member, 8a, sb, 9a. 9b...Bis.

Claims (1)

[Claims] A first guide stator member disposed and fixed along the first axial direction; a first movable element linearly movable in the axial direction of the first movable element;
a first linear motor that obtains thrust by a magnetic circuit configured between a guide stator member and a first movable element; a second guide stator disposed and fixed in parallel with the first axial direction; and a second movable element that is guided by the second guide stator member and movable in the first axial direction, a second linear motor having the same configuration as the first linear motor; a third guide stator member whose other end is supported movably in the second axial direction by the child; and the third guide stator member is guided by the third guide stator member and is movable linearly in the second axial direction. a third linear motor having the same configuration as the first linear motor, and a second linear motor attached to the third moving element of the third linear motor.
A two-axis positioning device consisting of an axis positioning control target.