JP2001341046A - X-y stage device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To drastically enhance speed and accuracy for positioning a traveling table in the directions of the X-axis and the Y-axis. SOLUTION: A X-Y stage device 15 which supports the traveling table 2 against a fixed base 1 such that the traveling table 2 is capable of minute displacement within a plane of the X-axis-the Y-axis, and which allows a member placed on the traveling table 2 to be positioned within the plane of the X-axis-the Y-axis, comprises an elastic hinge having a characteristic of being flexible only in one or two directions among each of the X-axis, the Y-axis, and the Z-axis and rigid in the other directions, wherein the traveling table 2 is supported such that it is capable of minute displacement against the fixed base 1 by utilizing elastic deformation of the elastic hinge in the direction which is flexible, and further the traveling table 2 is allowed for minute displacement within the plane of the X-axis-the Y-axis by a linear motor 7 for driving in a direction of the X-axis and a linear motor 3 for driving in a direction of the Y-axis.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention comprises a moving table movable in an X-axis and Y-axis plane, and an X-axis capable of positioning a member set on the moving table in the X-axis and Y-axis plane. A Y-stage device;

[0002]

2. Description of the Related Art Conventionally, this type of XY stage apparatus has
It is widely used in many industrial fields such as electronic component mounting devices (chip mounters), machine tools, and control mechanisms for optical systems (such as lenses and mirrors).

FIG. 7 shows a conventional XY stage apparatus 300.
Is shown. The XY stage device 300 is provided on an X-axis table (not shown) in the X-axis guide mechanism 303.
A Y-axis guide mechanism 306 having a Y table 307 is mounted. The X-axis guide mechanism 303 includes an X-axis ball screw 302 arranged in the X-axis direction and the X-axis ball screw 3.
And an X-axis servo motor 301 for driving the rotation of the Y-axis guide mechanism 306. By appropriately controlling the X-axis servo motor 301, the entire Y-axis guide mechanism 306 is moved and positioned in the X-axis direction. The Y-axis guide mechanism 306 includes a Y-axis ball screw 305 arranged in the Y-axis direction, and a Y-axis servo motor 304 for driving the Y-axis ball screw 305 to rotate. The Y-axis servo motor 304 is appropriately controlled. By doing so, the XY table 307 is moved and positioned on the Y-axis guide mechanism 306 in the Y-axis direction. Therefore, by controlling the X-axis and Y-axis servomotors 301 and 304, the XY table 307 is positioned in the X-axis direction and the Y-axis direction.

[0004] X-axis and Y-axis servo motors 301 and 304
In the control method, for example, the movement amount of the XY table 307 is predicted from the rotation amounts of the X-axis and Y-axis ball screws 302 and 305 measured by the encoder, and the X-axis and Y-axis servomotors 301 are calculated from the predicted values. , 304, and the moving amount of the XY table 307 is directly measured by a linear gauge or the like,
There is a full closed loop control system or the like in which the X-axis and Y-axis servo motors 301 and 304 are feedback-controlled from the values.

[0005]

In recent years, demands for "high-speed control", "precise control", etc. of the XY table 307 have been increased with the advancement of technology. When high-speed control is to be achieved, the driving method using a shaft mechanism such as each of the ball screws 302 and 305 increases vibration at the time of switching between normal rotation and reverse rotation and at the time of rapid acceleration / deceleration. There were certain limits. In order to achieve precision control, the semi-closed loop control method does not consider the bending and backlash of each of the ball screws 302 and 305, so that it is difficult to precisely control the XY table 307 after all. Was.

[0006] Further, according to the full closed loop control system, more precise control is possible. However, when the control speed increases, the vibration of each ball screw 302, 305 becomes X.
-The signal transmitted to the Y table 307 and the position measurement signal of the XY table 7 became unstable. As a result, there has been a problem that the response of the feedback control cannot be improved due to the unstable signal.

Further, since the XY stage device 300 has a two-stage stacking structure in which the Y-axis guide mechanism 306 is installed on the X-axis guide mechanism 303, the center of gravity becomes high and the XY stage apparatus 300 falls over due to its own weight. Moment is likely to occur, and as a result, during rapid acceleration / deceleration control, the X-axis-Y-axis table 7
And the positioning error increased. In the case of such a two-stage stacking structure, all of the Y-axis guide mechanisms 306 are moving loads (inertial loads) for the X-axis guide mechanisms 303 located at the bottom, but the Y-axis guide mechanisms 306
Is only the XY table 307,
There has been a difference in responsiveness between the control in the axial direction and the control in the Y-axis direction. For example, when the XY table 307 is driven at the same time as the X-axis and the Y-axis as in the case of drawing a circle or moving obliquely to the XY-axis, there is a problem that accuracy is deteriorated, and high-speed control is realized. It was difficult.

The present invention has been made in view of the above problems, and has as its object to provide an XY stage device having a compact configuration and capable of high-speed and high-accuracy control.

[0009]

According to the present invention, a moving table is supported on a fixed base such that it can be displaced minutely in a predetermined X-axis-Y-axis plane, and a member mounted on the moving table is fixed to an X-axis. In an XY stage device that can be positioned in the axis-Y-axis plane, only one or two of the X-axis, Y-axis, and Z-axis directions are flexible and rigid in other directions. By being arranged along any of the X-axis, Y-axis, and Z-axis, only relative displacement in the softened direction between members connected to both ends thereof is allowed. A plurality of elastic hinges that can be used to move the moving table with respect to the fixed base in the X-Y plane using the elastic deformation of each elastic hinge in the softened direction. Displaceably supported, and fixed to the fixed base and the movable table. A fixed portion and a movable portion are respectively arranged, and a linear motor for driving in the X-axis direction capable of relatively moving the moving table in the X-axis direction with respect to the fixed base; and the fixed base and the moving table. Its own fixed part and movable part are respectively arranged, and the moving table is moved relative to the fixed base in the Y-axis direction. The above object is achieved by slightly displacing the moving table within the X-axis-Y-axis plane.

The inventor of the present invention has provided an XY stage device with an "elastic hinge" for holding the moving table so as to be movable in the X-Y direction and a "linear motor" for driving the moving table. Configuration was adopted.

The basic structure of the elastic hinge itself is well known and generally has the property of being flexible only in one specific direction and being rigid in the other direction, and between the members connected to both ends thereof. Has a function to allow only relative displacement in. Therefore, now, for example, only in the X direction,
It has rigid characteristics in the Y direction and the Z direction,
Considering an elastic hinge that is arranged along the Y direction in the plane to allow only a relative displacement in the X direction between members connected to both ends of the movable hinge, a movable member is formed by elastic deformation of the elastic hinge. Can be moved relative to the fixing member in the X direction. On the other hand, the first elastic hinge hardly allows relative movement in the Y direction and the Z direction.
That is, the movable member can be "guided" in the X direction.

For example, if a bar-shaped elastic hinge having characteristics of being flexible in the bending direction and stiff in the axial direction is arranged with its own axis direction oriented in the Z-axis direction, the distance between members connected to both ends thereof can be increased. Can be allowed in the XY plane.

When the movable table is movably supported in the XY plane by using such an elastic hinge, a complicated guide mechanism as in the related art is not required, so that the size and the cost are reduced. And the structure of the members around the moving table (driven together with the moving table) can be simplified, so that the inertial load of the driving means for driving the moving table can be reduced, and the response can be reduced. High-precision drive control with good characteristics can be performed.

Here, in the present invention, the moving table thus supported via the elastic hinge is driven using a linear motor. This is to obtain the following “synergistic effect” by combining them.

That is, in the linear motor employed as the driving device in the present invention, the stator and the mover are directly installed between the fixed base and the moving table, and the relative force is generated by the "non-contact state" thrust by the magnetic force. Drive the member directly,
It has the feature that high-speed and high-accuracy control can be achieved. Therefore, since there is no contact, it is possible to drive the moving table in one direction (for example, the X-axis direction) and “allow” the movement of the moving table in a direction perpendicular thereto (for example, the Y-axis direction). Accordingly, it becomes necessary to install a Y-axis direction driving device “on” the X-axis direction driving device like a driving mechanism such as a ball screw, so that the inertial load can be drastically reduced and the center of gravity can be reduced.

Of course, when the elastic hinge is elastically deformed, the longitudinal dimension of the elastic hinge tends to fluctuate, so that a "micro displacement (slide component)" may occur in the displacement of the moving table. However, according to the linear motor, the deviation can be tolerated, and the error corresponding to the “displacement” can be corrected by the other linear motor and the elastic hinge that are orthogonal to each other.

Therefore, since the elastic hinge and the linear motor are combined with a rational idea, extremely high-speed and high-precision positioning in the X-axis-Y-axis plane is possible.

This elastic hinge is characterized in that the reaction force (restoring force) generated as the moving table is displaced has "linearity" (or a characteristic close to linearity). In general, when a mechanical driving means such as a ball screw is used, the displacement amount of the moving table can be easily calculated based on the amount of rotation or the like. However, the linear motor driven by magnetic force requires the displacement amount of the moving table. Full-closed loop control by directly measuring such factors must be adopted. Therefore, if the non-linear fluctuation of the guide mechanism is large, the control becomes complicated and the response is greatly affected. However, as a result of the configuration having the characteristic close to linear as described above, the X- Feedback control from the Y-axis direction measurement value is facilitated, and high-speed and high-accuracy positioning (position correction) can be performed.

As a result, if the driving force of each linear motor and the restoring force are rationally combined, positioning control with extremely responsiveness becomes possible. Alternatively, it is possible to swing and rotate (these movements can be regarded as high-speed periodic positioning control). This is a characteristic that the thrust of the linear motor can be switched between forward and reverse at high speed (electrically), and "linearity" of the restoring force.
This is the result of the fusion of these features.

Further, when the minute and precise control as described above is to be performed with, for example, a ball screw or a bearing, a local portion (specific portion) of the ball screw or the like is repeatedly subjected to stress, and locally There is a problem that fatigue occurs and the life is shortened. However, according to this elastic hinge, rolling fatigue does not occur structurally, so that stable control characteristics can be exhibited for a long time.

Further, for example, when the energized state of each linear motor is turned off, the moving table automatically attempts to return to the neutral position by the restoring force of the elastic hinge. ) Can be omitted. This is different from a mechanical type such as a ball screw, which turns off the power of a non-contact type linear motor.
This is because if the thrust is released, the relationship with the moving table becomes completely free.

The number of the intermediate members and the elastic hinges described above
There is no particular limitation on the shape and the like. This is appropriately arranged as needed. For example, it is flexible only in the X-axis direction, has rigidity in the Y-axis direction and the Z-axis direction, and is arranged along the Y-axis direction in the X-axis-Y-axis plane. A first elastic hinge that allows only relative displacement in the X-axis direction between members connected to both ends thereof, and a characteristic that is flexible only in the Y-axis direction and rigid in the X-axis direction and the Z-axis direction. A second elastic hinge that has only a relative displacement in the Y-axis direction between members connected to both ends thereof by being disposed along the X-axis direction in the X-axis-Y-axis plane; And the movable table and the fixed base to be slightly displaced are arranged at positions including the X-axis-Y-axis plane, and the X-axis between the fixed base and the movable table is provided. The moving table is fixed with an intermediate member interposed in the Y-axis plane. The fixed base, the intermediate member, and the moving table are arranged so that the base can be slightly displaced in the X-axis-Y-axis plane with respect to the table and held at a predetermined position in the Z-axis direction. A configuration in which the first and second elastic hinges are connected by being used in combination can be adopted.

An intermediate member is interposed between the fixed base on the XY plane and the moving table, and the three members are connected to the first and second members.
When the intermediate member is connected via the elastic hinge, the intermediate member maintains a fixed state with respect to the rigid direction of the first and second elastic hinges. It is possible to move by being linearly "guided" in both directions in the Y direction, and because there is essentially no backlash, slippage, rolling, etc., extremely responsive and stable control is achieved. Will be possible.

In particular, the intermediate member has a rectangular ring shape having two X-axis extending portions extending in the X-axis direction and two Y-axis extending portions extending in the Y-axis direction. And a plurality of the first elastic hinges are arranged in the Y-axis direction between the two X-axis extending portions of the intermediate member and the fixed base, so that the fixed base is Relative displacement in the X-axis direction of the intermediate member and the second member is allowed.
A plurality of elastic hinges are arranged in the X-axis direction between the two Y-axis extending portions of the intermediate member and the moving table, so that a relative displacement of the intermediate member and the moving table in the Y-axis direction is achieved. Is allowed, it is easy to design simply because the structure is simple, and elastic hinges are provided on each of the four extending portions (that is, on each side of the ring). Therefore, it is possible to easily arrange the elastic hinges symmetrically in the X-axis direction and the Y-axis direction, thereby suppressing the phenomenon that the intermediate member itself rotates around the Z-axis direction. it can. Therefore, highly accurate positioning becomes possible.

Further, by forming the intermediate member in a ring shape as described above, the rigidity of the intermediate member itself is increased, and the elastic deformation of the intermediate member itself is suppressed, so that the positioning accuracy is improved.

However, the configuration of the intermediate member is not particularly limited to the above configuration in the present invention. As for the intermediate member, in addition to the above-described configuration in which the intermediate member is formed in a square ring shape, for example, the intermediate member is divided into a plurality of intermediate members including first and second intermediate members, and the fixed base and the first intermediate member are separated. The first elastic hinge is disposed between the first intermediate member and the movable table, and the second elastic hinge is disposed between the first intermediate member and the moving table. By allowing the relative displacement in the Y direction between
The relative displacement of the moving table with respect to the fixed base in the X-axis and Y-axis directions is allowed, while the second elastic hinge is disposed between the fixed base and the second intermediate member, and Y between the two members is provided.
Direction relative displacement is allowed, and a first elastic hinge is arranged between the second intermediate member and the moving table to allow relative displacement in the X-axis direction between the two members.
A configuration in which displacement in the X-axis and Y-axis directions with respect to the fixed base of the moving table is allowed can be adopted.

In this case, the divided first and second
The intermediate member, including the first elastic hinge and the second elastic hinge connected to the first and second intermediate members, may be arranged so as to be point-symmetric with respect to the center of the moving table.

For example, considering the case where the above-mentioned ring-shaped structure is employed as the structure of the intermediate member, the inertial load in one direction is substantially “moving table + ring-shaped intermediate member”, Since the inertial load on the direction side is almost only the "moving table", the inertial loads in the X-axis direction and the Y-axis direction are slightly different (though the influence is much smaller than the structure using the conventional guide mechanism). It is inevitable.

However, for example, by dividing the intermediate member and arranging the first elastic hinge and the second elastic hinge so as to be point-symmetric with respect to the center of the moving table, the inertia in the X-axis direction and the Y-axis direction can be improved. The load can be made uniform, and positioning control balanced in both directions can be performed.

That is, in the structure divided from the intermediate member,
When the moving table relatively moves in the X-axis direction with respect to the fixed base, elastic deformation in the X-axis direction of each of the first elastic hinges of the first and second intermediate members contributes, and the moving table is fixed to the fixed base. In the case of relative movement in the Y-axis direction with respect to the table, the elastic deformation in the Y-axis direction of the second elastic hinge of each of the first and second intermediate members contributes. Therefore, the inertial load when the moving table is driven in the X-axis direction (if the members placed on the table are neglected) is substantially “moving table + first intermediate member”, and is driven in the Y-axis direction. When the inertial load is
It is almost “moving table + second intermediate member”. As a result, for example, if the numbers of the first intermediate member and the second intermediate member are made equal or the mutual mass is made equal, the inertial loads in the X direction and the Y direction can be made uniform. This enables balanced positioning control.

Note that this point-symmetric support cannot be realized with a structure having only one intermediate member, and the intermediate member is divided into a plurality of intermediate members, and the intermediate member is divided between the fixed base and the plurality of intermediate members. Both the first and second elastic hinges are present, and the first and second elastic hinges are also provided between the plurality of intermediate members and the moving table.
This can be realized for the first time as a configuration in which both elastic hinges are present.

By the way, in the above configuration, only the case where the elastic hinges are arranged in the X-axis and Y-axis directions has been described. However, as apparent from the above idea, the "elastic hinge" and the "linear motor" Since they are extremely compatible, the same effect can be obtained even if the following configuration is adopted.

That is, the movable table is supported on the fixed base such that it can be slightly displaced within a predetermined X-axis-Y-axis plane, and the members mounted on the movable table are positioned within the X-axis-Y-axis plane. In a possible X-Y stage device,
For the moving table that is to be slightly displaced in the X-axis-Y-axis plane, a fixed base arranged with a predetermined gap in the Z-axis direction, and a rigid base only for its own length direction. It has characteristics, is arranged and interposed in the gap along the Z-axis direction,
At least three elastic hinges in the Z-axis direction for causing the movable table to slightly displace in the X-axis and Y-axis planes with respect to the fixed base by elastically deforming itself; and the fixed base and the movable table. A linear motor for driving in the X-axis direction in which its own fixed part and movable part are respectively arranged and capable of relatively moving the moving table in the X-axis direction with respect to the fixed base; A linear motor for driving in the Y-axis direction, in which the fixed part and the movable part thereof are respectively arranged on the table, and the movable table can be relatively moved in the Y-axis direction with respect to the fixed base. The above object is achieved.

This XY stage device employs a configuration in which the moving table is supported by an elastic hinge in the Z-axis direction. In this configuration, each elastic hinge is elastically deformable in both directions of the X axis and the Y axis, and the movable table is relatively moved with respect to the fixed base within the XY plane.

Although such an elastic hinge in the Z-axis direction cannot structurally guide the moving table “linearly” in the X-axis direction and the Y-axis direction, it also applies a linear propulsion force here. An X-axis direction and Y-axis direction drive linear motor that can be driven is employed as a drive source. Therefore,
Each of these linear motors is a so-called “non-contact linear guide”
Therefore, efficient control can be achieved by combination with an elastic hinge in the Z-axis direction. In other words, it can be said that each linear motor also serves as a "drive" and a "guide (regulation)".

As a result, the movement of the moving table in the X-axis and Y-axis directions can be positioned at high speed and with high accuracy by the X-axis and Y-axis driving linear motors.
The simple construction of supporting the moving table by the elastic hinges in the axial direction reduces the manufacturing cost.

In order to drive in a well-balanced manner in the X-axis direction and the Y-axis direction, the elastic hinge is formed by a virtual equilateral triangle in the X-Y-axis plane whose center coincides with the center of the moving table. It is preferable to install three of them so as to correspond to each vertex position.

The number of linear motors for driving in the X-axis direction and the Y-axis direction is not particularly limited. For example, if two linear motors for driving in the X-axis direction are arranged at a predetermined interval in the Y-axis direction, the position correction in the Z-axis rotation direction can be performed by the difference between the displacement amounts of the two linear motors. .
Of course, the same applies to the Y-axis direction driving linear motor. Also, three or more linear motors may be arranged in each direction.

[0039]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIGS. 1 and 2 show the overall configuration of an XY stage device 15 according to an embodiment of the present invention. This XY
The stage device 15 includes the moving table 2 that can move in the XY plane, and a member (not shown) installed on the moving table 2 can be positioned in the XY plane.

The XY stage device 15 further includes a fixed base 1 disposed parallel to the moving table 2 (moving base 2A) with a predetermined gap S in the Z-axis direction, and the fixed base 1 1 and an intermediate member 50 arranged between the moving table 2 and the moving table 2.

The moving table 2 includes a moving base 2B formed in a square ring shape, and a mounting table 2A fixed and arranged on the moving base 2B by bolts. Although not particularly shown, a predetermined plate is further provided on the mounting table 2A. Therefore, the moving table 2 is constituted by this plate, the moving base 2B and the mounting table 2A. The fixed base 1 includes a fixed table 1A that is directly fixed to the external member 52, and a plate-shaped fixed base 1B that is fixed and disposed on the fixed table 1A with bolts.

Referring to FIG. 3, the detailed structure of the intermediate member 50 and the positional relationship between the intermediate member 50, the fixed base 1B, and the movable base 2B will be described.

The intermediate member 50 comprises two X-axis extending portions 50A and 50A extending in the X-axis direction and two Y-axis extending portions 50B and 50B extending in the Y-axis direction. As a whole, it is formed in a substantially rectangular ring shape in the XY plane. Note that some of the X-axis or Y-axis direction extending portions 50A and 50B are partially bent to prevent interference with other devices such as sensors, for example.

Between the fixed base 1B (fixed base 1) and the intermediate member 50, a first elastic hinge 54 that allows deformation in the X-axis direction is arranged. Specifically, the first elastic hinge 54 includes a fixed base 1B and two X-axis direction extending portions 5.
0A, each of which is disposed between the respective X-axis extending portions 50A and the fixed base 1B with an interval LX1 therebetween.
A total of four first elastic hinges 54 are arranged side by side. The same applies between the other X-axis direction extending portion 50A and the fixed base 1B.

A second elastic hinge 56 that allows displacement in the Y-axis direction is disposed between the intermediate member 50 and the moving base 2B (moving table 2). Specifically, the second elastic hinge 56 is disposed between the “each” of the fixed base 1B and the two Y-axis extending portions 50A, that is, one of the Y-axis extending portions 50B and the fixed base 1B between LY1
A total of four second elastic hinges 56 are arranged in parallel, two at a time. The same applies between the other Y-axis direction extending portion 50B and the fixed base 1B.

Accordingly, the intermediate member 50, the fixed base 1B and the movable base 2B are arranged in a nested manner, and have a structure almost line-symmetric as a whole.

The first elastic hinge 54, which allows deformation in the X-axis direction, is flexible only in the X-axis direction, has rigidity in the Y-axis direction and the Z-direction, and has a characteristic in the XY plane. By being arranged along the Y-axis direction, only relative displacement in the X-axis direction between members connected to both ends thereof is allowed.
Also, the second elastic hinge 56 that allows deformation in the Y-axis direction is
It is flexible only in the Y-axis direction, has rigidity in the X-axis direction and the Z-direction, and is connected to both ends of itself by being arranged along the X-axis direction in the XY plane. Only the relative displacement in the Y-axis direction between the members is allowed.

Next, the structure of the first elastic hinge 54 that allows movement in the X-axis direction will be described. Although the first elastic hinge and the second elastic hinge have almost the same structure except that the longitudinal direction is different in the X-axis direction and the Y-axis direction, there is a slight difference in size and the like. The description of the structure and the like of the hinge 56 is omitted.

As shown in the perspective view of FIG. 6, the first elastic hinge 54 is provided between two members (the fixed base 1B and the intermediate member 5).
0). Notches 80 are formed at two locations on the outer peripheral surface of the bridge member 70 that are separated in the length direction. The notches 80 form a thinned portion 90 that is easily elastically bent and deformed. This bending deformation of the thinned portion 90 allows a relative displacement between the two members.

In this case, the notch 80 is oriented in a direction in which the bridge member 70 having a rectangular cross section is bent and deformed (the X axis direction in the case of the first elastic hinge 54 and the Y axis direction in the case of the second elastic hinge 56). The two outer surfaces facing each other are formed in a symmetrical semicircle. This is because local thinning is performed (that is, the thinned portion 90 is formed), and the bending can be easily performed with the minimum cross-sectional area as a bending point.

FIG. 7 shows a sectional shape of the minimum sectional area of the first elastic hinge 54.

The cross section S of the minimum cross section is a rectangle in which the dimension b in the horizontal direction (X-axis direction) is reduced with respect to the dimension a in the vertical direction (Z direction) corresponding to the thickness of the bridge member 70. The thinned portion 90 is hardly bent in the vertical direction (Z direction), but is bent in the horizontal direction (X
(Axial direction). In the longitudinal direction (Y-axis direction) of the bridge member 70, since the bridge member 70 itself acts as a tension rod, movement in the Y-axis direction between the two members is not allowed.

Next, the first elastic hinge 54 and the fixed base 1B
And the interaction of the intermediate base 502 will be described.

The pair of first elastic hinges 54, 54
As shown in an enlarged manner in (A), both ends of itself are fixedly supported by the fixed base 1B and the intermediate base 50. As shown in FIG. 4B, when the intermediate base 50 moves in the X-axis direction (downward in the figure) with respect to the fixed base 1B, each of the thinned portions on both ends of the first elastic hinge 54. 9
Since 0 is elastically deformed in preference to other portions, it can follow the relative movement. As a result, the intermediate base 50 is guided linearly in the X-axis direction by the first elastic hinge 54.

Although not particularly shown, the second elastic hinge 56 has substantially the same structure. Therefore, the second elastic hinge 56 is attached to the moving base 2A with respect to the intermediate member 50.
Are guided in the Y-axis direction.

In any case, the first and second elastic hinges 54 and 56 are in the Z direction (the direction perpendicular to the XY plane).
Functions as a "rigid body". Therefore, the intermediate member 50 is supported by the fixed base 1B via the first elastic hinge 54 in a cantilever state, and the movable base 2B is supported by the intermediate member 50 via the second elastic hinge 56 in a cantilever state. You. As a result, the moving table 2 is held in the XY plane without any supporting means in the Z direction.

Although the total number of the first elastic hinges 54 is eight in this embodiment, the present invention is not limited thereto. However, in order to prevent the elastic hinges 54, 56 from being twisted, at least three, and preferably four or more, each of the elastic hinges 54, 56 are arranged, and if they are connected by imaginary lines, a predetermined " A "virtual plane" is configured. Further, in order to make the moving table 2 more stable, it is preferable to dispose it at positions corresponding to both outer sides of the moving table 2. This is the same for the second elastic hinge 56.

As a result, the intermediate member 50 is supported by the first elastic hinge 54 so as to be displaceable in the X-axis direction with respect to the fixed base 1B, and the moving base 2B is supported by the second elastic hinge 56 with respect to the intermediate member 50. By being supported so as to be displaceable in the Y-axis direction, as a whole, the movable base 2B is independent of the fixed base 1B in both the X-axis direction and the Y-axis direction (interference with each other). Without)
It can be displaced. That is, the combination of the first and second elastic hinges 54 and 56 exerts the guide function in the X-axis direction and the Y-axis direction. With this guide function, an extremely stable displacement characteristic substantially free of backlash, slippage, rolling, and the like can be obtained.

Returning to FIGS. 1 and 2, a Y-axis direction linear motor 3 capable of relatively moving the moving table 2 in the Y-axis direction is provided on the fixed base 1 and the moving table 2.
And a linear motor 7 for driving in the X-axis direction capable of relatively moving the moving table 2 in the X-axis direction.

Each of the linear motors 3 and 7 has two drive units arranged in series in its own drive direction (thrust generating direction) to function as a pair. For example, the X-axis direction drive linear motor 7 includes two drive units 7A and 7B arranged on both ends of the moving table 2 in the X-axis direction, and these drive units 7A and 7B are set as a set. It functions to generate axial thrust.

In detail, as shown in FIG.
The drive unit 7A of the X-axis direction driving linear motor 7 (the same applies to other linear motors) is fixed to the fixed base 1 side and functions as a stator, and is fixed to the mounting table 2A side (built-in). And a coil 8A functioning as a mover.

The permanent magnet 2 is arranged so that a magnetic field G is generated in the Z-axis direction with respect to the coil 8A.
1A to 21D, two yokes 20A and 20B supporting the permanent magnets 21A to 21D,
Holder 2 for holding 20B while maintaining a predetermined interval
2 and one yoke 20B is fixed to the fixed base 1.
, The entire magnet unit 28 is fixed. On the other hand, the coil 8A is arranged so that a current flows in the Y-axis direction in the magnetic field G in the Z-axis direction (see FIG. 1). As a result, the coil 8A receives the propulsive force 32 in the X-axis direction. It has become.

In this embodiment, the magnet unit 28
Has been shown only when the stator and the coil 8A function as a mover, but of course, these may be installed in reverse to make the magnet unit 28 function as a mover and the coil 8A function as a stator. Further, a pair of drive units 7A, 7
The arrangement is not limited to the arrangement of B, and a single drive unit may be used.

As shown in FIG. 3, an X-axis measurement reference surface 23 and a Y-axis measurement reference surface 24 are formed on the inner peripheral side of the ring-shaped moving base 2B.
An X-axis displacement sensor 14 and a Y-axis displacement sensor 15 are installed on the fixed base 1 side so as to face 3 and 24. These displacement sensors 14 and 15 are connected to the moving table 2.
The X-axis direction displacement amount and the Y-axis direction displacement amount with respect to the fixed base 1 are measured.

The configuration of the control system employed in the XY stage device 15 described above will be described with reference to FIG.

The moving table 2 in the XY stage device 15 has a total of four coils 4 as described above.
A, 4B, 8A and 8B are built in. The coil pairs 4A and 4B generate a propulsion force in the Y-axis direction, and the coil pairs 8A and 8B generate a propulsion force in the X-axis direction. The coil pairs are controlled as a unit (set).

The control system includes a subtractor 44 to which a detection value of the Y-axis displacement sensor 15 is inputted, and a subtractor 45 to which a detection value of the X-axis displacement sensor 14 is inputted.

Each of the subtractors 44, 4 to which the respective detection values are inputted.
5, various command values from the position command output means 58 are input. The position command output means 58 sets the X-axis direction position value of the moving table 2 and outputs the value to the subtracter 45.
The position in the Y-axis direction is set and output to the subtractor 44. The subtractor 44 calculates the deviation between the Y-axis direction command position and the detection value of the Y-axis displacement sensor 14 and outputs the result to the Y-axis position control compensator 47. The subtracter 45 calculates the deviation between the command position in the X-axis direction and the detection value of the X-axis displacement sensor 15, and outputs the result to the X-axis position control compensator 48.

Each of the position control compensators 47 and 48 calculates the operation amount of each linear motor from each input value. That is, the Y-axis position control compensator 47 outputs the Y-axis direction operation amount to the Y-axis direction driving linear motor 3.
Similarly, the X-axis position control compensator 48 outputs an X-axis direction operation amount to the X-axis direction drive linear motor 7.

Each coil pair (4A, 4B) (8A, 8B)
Are connected to current amplifiers 54 and 56, respectively. Therefore, based on the operation amount in the X-axis direction and the operation amount in the Y-axis direction, each current amplifier 54, 56
4B) A predetermined current is passed through (8A, 8B). As a result,
A desired thrust is generated in each of the coil pairs (4A, 4B) (8A, 8B).
It is designed to be moved in the Y direction.

In the XY stage device 15, linear motors 3 and 7 are employed as driving devices. In the linear motors 3 and 7, the stator and the mover are installed directly between the fixed base 1 and the moving table 2, and the moving table 2 is directly and linearly moved by a "non-contact state" thrust by a magnetic force. Can be driven. Therefore, the inertial load in the X-axis direction and the Y-axis direction is almost the only movement table 2, and high-speed control with high responsiveness can be achieved with a low center of gravity.

Since each of the linear motors 3 and 7 is a non-contact type, the moving table 2 is driven in one direction (for example, the X-axis direction), and the moving table 2 is moved in a direction perpendicular thereto (for example, the Y-axis direction). Can be allowed to move. Further, for example, when the moving table 2 moves in the X-axis direction, "small displacement" of the moving table 2 in the Y-axis direction caused by the first elastic hinge 54 being inclined can be allowed. In addition, the error of the “small displacement” can be corrected by the linear motor 3 for driving in the Y-axis direction and the second elastic hinge 56 orthogonal to each other. Thus, the elastic hinges 54, 56 and the linear motors 3, 7
Are combined under a rational idea, so that the synergistic effect enables extremely accurate positioning in the XY plane.

The first and second elastic hinges 54 and 56 are
Since the reaction force (restoring force) generated as the moving table 2 is displaced has “linearity” (or a characteristic close to linearity), feedback control from the measured values in the XY direction of the moving table 2 is performed. Becomes easier. In particular, since the linear motors 3 and 7 originally have little vibration and the like, and the vibrations are not directly transmitted to the moving table 2, the X-Y
Since stable detection values can be obtained from the displacement sensors 14 and 15, control responsiveness can be greatly improved.

If the driving force of each of the linear motors 3 and 7 and the restoring force of each of the elastic hinges 54 and 56 are rationally combined, the members provided on the moving table 2 may be periodically vibrated minutely. Or swing rotation (these movements can be regarded as high-speed periodic positioning control). This is the result of the combination of the characteristics of the linear motors 3 and 7 that can switch the thrust forward and reverse at high speed (electrically) and the characteristics of the elastic hinge structure that the restoring force is nearly linear.

Since the intermediate member 50 is formed in a ring shape, as described above, the fixed base 1B
(The elastic hinge fixing portion) and the movable base 2B (the elastic hinge fixing portion) can be arranged on the outer peripheral side. In addition, since the elastic hinges 54 and 56 are provided on each of the four extending portions 50A and 50B (that is, on each side of the ring), an intermediate position is obtained by the relative balance of these elastic hinges 54 and 56. The rotation of the member 50 and the moving table 2 is suppressed, and highly accurate positioning is possible. That is, the “linear guide function” of the first and second elastic hinges 54 and 56 can be effectively reflected on the movement of the moving table 2. Furthermore, since the rigidity is increased by forming the ring shape in this manner, the elastic deformation of the intermediate member 50 is suppressed, and positioning can be performed with higher accuracy. Contrary to the first embodiment, a movable base may be disposed on the inner peripheral side and a fixed base may be disposed on the outer peripheral side.

In the first embodiment, only the case where the intermediate member has a ring shape has been described, but the number, shape, arrangement, and the like of the intermediate member and the elastic hinge are not particularly limited. This is appropriately set as needed.

Next, an XY stage device 115 according to a second embodiment of the present invention will be described with reference to FIG.

The XY stage device 115 differs from the XY stage device 15 according to the first embodiment mainly in the configuration of the intermediate member and the first and second elastic hinges.
Therefore, in order to avoid other overlapping description, the entire configuration, illustration, and the like are omitted, and the reference numerals for almost the same parts and members are the same as the reference numerals in the first embodiment described above. The details will be omitted.

In the XY stage device 115, the intermediate member is divided into a plurality of intermediate members including first and second intermediate members 62 and 64.

A first elastic hinge 66 is disposed between the fixed base 101B and the first intermediate member 62, and a relative displacement in the X-axis direction between the two members (the fixed base 101B and the first intermediate member 63). Is allowed. Further, a second elastic hinge 68 is disposed between the first intermediate member 62 and the moving base 102B, and the relative displacement in the Y-axis direction between both members (the first intermediate member 63 and the moving base 102B). Is acceptable. As a result, the fixed base 10 of the moving table 102
Relative displacement in the X-axis and Y-axis directions with respect to 1 is allowed.

On the other hand, a second elastic hinge 68 is arranged between the fixed base 101B and the second intermediate member 64, and both members (the fixed base 101B and the second intermediate member 64).
The relative displacement in the Y-axis direction is allowed. Further, a first elastic hinge 66 is disposed between the second intermediate member 64 and the moving base 102B, and the relative displacement in the X-axis direction between both members (the second intermediate member 64 and the moving base 102B). Is acceptable. As a result, displacement of the moving table 102 in the X-axis and Y-axis directions with respect to the fixed base 101 is allowed. The first and second elastic hinges 66, 68
Are substantially the same as those already shown in FIGS. 6, 7 and the like, and a detailed description thereof will be omitted.

The first and second intermediate members 62, 64,
The first and second intermediate hinges 66 and 68 are arranged so as to have a point-symmetric structure as a whole. Specifically, two first intermediate members 62, 62 and two second intermediate members 6
4 and 64 are arranged diagonally.

Next, the operation will be described.

When the movable base 102B moves in the X-axis direction, the first elastic hinges 66 are elastically deformed. Therefore, the two first intermediate members 62, 62 are also moved together with the movable base 102A in the X-axis direction. Moving. At this time, since the second elastic hinge 68 is in the rigid direction, the two second intermediate members 64, 6
4 hardly moves. On the contrary, moving base 10
When 2B moves in the Y-axis direction, the second elastic hinge 68
Are elastically deformed, the two second intermediate members 64, 64 also move in the X-axis direction together with the moving base 102A. At this time, since the first elastic member 66 is in the rigid direction,
The two first intermediate members 62, 62 hardly move.

The relationships described above are summarized as follows.

(1) The moving table 102 (moving base 1)
02B) moves in the X-axis direction, the two first intermediate members 62, 62 follow and move in the X-axis direction. (2) The moving table 102 (moving base 102B)
When moving in the axial direction, the two second intermediate members 64, 6
4 follows and moves in the Y-axis direction

As a result, the inertial load acting on the X-axis direction driving linear motor 107 when moving in the X-axis direction is:
(If the members placed on the moving table 102 are ignored)
“Moving table 102” + “first intermediate members 62, 62”
The inertial load acting on the Y-axis direction driving linear motor 103 when moving in the Y-axis direction is “moving table 102” + “second intermediate members 64, 64”. In this embodiment, the number of first and second intermediate members 62 and 64 (2
), So that the inertial loads in the X-axis direction and the Y-axis direction are uniform, so that bidirectionally balanced positioning control is possible. Of course, the same effects as those of the XY stage device 15 of the first embodiment shown in FIG.

In the first and second embodiments described above, only the case where each elastic hinge is arranged in the X-axis and Y-axis directions (within the XY plane) is shown. As is apparent, the "elastic hinge" and the "linear motor" are extremely compatible with each other, so that a similar effect can be obtained even if the third embodiment is configured as shown below.

FIGS. 10 and 11 show the overall configuration of an XY stage device 215 according to the third embodiment. In addition, in order to avoid repetition, the reference numerals of the parts and members that are almost the same as those of the first and second embodiments are the same as those of the first embodiment, and the lower two digits are made to correspond to each other, so that the detailed description of the functions and the like is given. Is omitted.

In the XY stage device 215, the mounting table 202A of the moving table 202 is formed of a rectangular plate-like member, and has an opening 2C formed therein. The moving base and the fixed base shown in the first embodiment and the like are not installed. Mounting table 20
2A, a plate 202C (shown by a dotted line) is provided.
2 are configured.

The fixed base 201 is arranged in parallel with the movable table 2 with a predetermined gap S in the Z-axis direction. In the gap S, three elastic hinges 11, 12, and 13 in the Z-axis direction are arranged such that both ends thereof are fixedly supported by the fixed base 201 and the moving table 202. The elastic hinges 11, 12, and 13 are installed such that their centers of gravity correspond to the vertices of the virtual equilateral triangle T in the XY plane where the center of gravity coincides with the center C of the moving table 202. ing. In this way, the moving table 202 can be stably held with the minimum number (three).

Opening 202C in base table 2A
, Two X-axis measurement reference planes 223 and 223 and a Y-axis measurement reference plane 22 that are arranged at a predetermined Y-axis direction distance P
4 are formed, and each of the reference surfaces 223, 223, 2
Two X-axis displacement sensors 214 and 214 and one Y-axis displacement sensor 215 are provided on the fixed base 1 side so as to face the reference numeral 24. Two X-axis displacement sensors 21
4 and 214 are arranged because each X-axis displacement sensor 21
4 and 214, the moving table 20
This is for measuring the rotation angle of No. 2.

The elastic hinge 11 in the Z-axis direction (similarly, 12 and 13) is a rod-like member elongated in the Z-axis direction as shown in an enlarged view in FIG. It has characteristics and has soft characteristics in other directions (the XY plane direction). The elastic hinge 11 has a large diameter portion 1 at both ends.
1A and a small-diameter portion 11B formed therebetween, and the large-diameter portion 11A has a male screw 2 on the shaft end side (outside).
7A, and a step 27B is formed on the small-diameter portion 11B side (inside). Therefore, the large diameter portion 11A is
The fixed base 101 and the mounting table 202 are inserted into the through holes 25 formed in the fixed base 101 and the mounting table 202A, and the nuts 28 are attached from both ends.
A is fixed. The small-diameter portion 11B can be easily elastically deformed, so that the moving table 202 can move in the XY plane.

Returning to FIG. 10, the fixed base 201 and the moving table 202 have two Y-axis directions in which the moving table 202 can be relatively moved in the Y-axis direction (relative to the fixed base 201). Drive linear motors 203, 205
Is arranged. Similarly, two X-axis driving linear motors 207 capable of moving the moving table 202 relative to the fixed base 201 in the X-axis direction,
209 are arranged. The reason why the two linear motors in each direction are provided in this way is to control the rotation of the moving table 202 around the Z axis by controlling each thrust independently.

The Z in the XY stage device 215
The elastic hinges 11, 12, and 13 in the axial direction cannot guide the moving table 202 "linearly" in the X-axis direction and the Y-axis direction, but can apply a linear propulsive force. Since the X-axis and Y-axis driving linear motors 203, 205, 207, and 209 are employed as driving sources, they also serve as a so-called "non-contact linear guide". In other words, it can be said that each linear motor also serves as a "drive" and a "guide (regulation)".

Further, since the moving table 202 is rotatable around the Z-axis direction, the moving table 20
2 can correct a rotation error in the Z-axis direction of the member placed on the second member. Such control is possible because the linear motor driven in a non-contact state by the magnetic force
This is because "rotation" of 2 can be allowed.

As is evident from the above, the linear motor and the elastic hinge can be combined very rationally, so that despite the simple stage configuration and few power sources (linear motors), high speed In addition, highly accurate control in the X and Y directions and the rotation direction can be achieved.

When the moving amount of the moving table 202 is large, the amount of elastic deformation (bending amount) of the support members 11, 12, and 13 is also large, and the moving table 202 is moved to a position in the Z-axis direction (a so-called vertical position). Fluctuations occur. The fluctuation in the Z-axis direction is within the range assumed in the present embodiment.
What is necessary is just to set within the range which can use what uses 5. In other words, the moving distance limit of the moving table 202 in the X-Y direction may be set in accordance with the amount of variation in the Z-axis direction that the user can tolerate.

[0100]

According to the XY stage apparatus according to the present invention, high-speed and high-precision XY control can be performed with a simple configuration.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an XY stage device according to a first embodiment of the present invention.

FIG. 2 is a sectional view taken along the line II-II in FIG.

FIG. 3 is a sectional view taken along line III-III in FIG. 2;

FIG. 4 is an enlarged partial sectional view showing an IV part in FIG. 3;

FIG. 5 is an enlarged partial sectional view showing a V portion in FIG. 2;

FIG. 6 is an enlarged perspective view showing a configuration of an elastic hinge in the XY stage device.

7 is a sectional view taken along the line VII-VII in FIG. 6;

FIG. 8 is a control system diagram showing a configuration of a control system adopted in the XY stage device.

FIG. 9 is a sectional view showing an arrangement of elastic hinges and the like in an XY stage device according to a second embodiment of the present invention.

FIG. 10 is a plan view showing an XY stage device according to a third embodiment of the present invention.

11 is a sectional view taken along the line IX-IX in FIG.

FIG. 12 is an enlarged partial sectional view showing an X-axis part in FIG. 11;

FIG. 13 is a perspective view showing a conventional XY stage device.

[Explanation of symbols]

 1, 101, 201 ... fixed base 2, 102, 202 ... moving table 3 ... linear motor for Y-axis direction drive 7 ... linear motor for X-axis direction drive 11, 12, 13 ... support members 15, 115, 215 ... X -Y stage device 50 ... Intermediate member 50A ... X-axis extending portion 50B ... Y-axis direction extending portion 54 ... First elastic hinge 56 ... Second elastic hinge 62 ... First intermediate member 64 ... Second intermediate member

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Yasuhito Nakamori 2-1-1, Yatocho, Tanashi-shi, Tokyo Sumitomo Heavy Industries, Ltd. Inside Tanashi Factory (72) Inventor Masanobu Suginamine 63-30 Yuyugaoka, Hiratsuka-shi, Kanagawa Prefecture No. Sumitomo Heavy Industries Machinery Corporation Hiratsuka Office

Claims (6)

[Claims] A moving table for a fixed base;
An XY stage device which supports the movable table in such a manner that it can be finely displaced in an axis-Y-axis plane and can position a member mounted on the moving table in the X-axis-Y-axis plane. Of each of the directions, it is soft only in one or two directions, and has rigidity in other directions,
One or more pluralities which are arranged along any one of the X-axis, the Y-axis, and the Z-axis so as to allow only relative displacement in the softened direction between members connected to both ends thereof. The movable table is supported by the elastic base in such a manner that the movable table can be slightly displaced with respect to the fixed base in an X-axis-Y-axis plane by utilizing elastic deformation of the elastic hinges in the softened direction. The fixed base and the movable table have their own fixed parts and movable parts, respectively, and are capable of moving the movable table relative to the fixed base in the X-axis direction. A motor and a fixed base and a movable part thereof are respectively disposed on the fixed base and the movable table, and for driving in the Y-axis direction capable of moving the movable table relative to the fixed base in the Y-axis direction. The linear model By the data, X-Y stage apparatus, characterized in that for minute displacement of the moving table in the X-axis -Y-axis plane relative to the fixed base. 2. A moving table having a predetermined X position with respect to a fixed base.
An XY stage device that supports the movable table in such a manner that it can be finely displaced in the axis-Y-axis plane and can position the member mounted on the moving table in the X-axis-Y-axis plane. In the Y-axis direction and the Z-axis direction, it has a rigid characteristic, and is arranged along the Y-axis direction in the X-axis-Y-axis plane, so that the members connected to both ends of the member are arranged. A first elastic hinge that allows only relative displacement in the X-axis direction; a soft elastic member only in the Y-axis direction; a rigid characteristic in the X-axis direction and the Z-axis direction; And a plurality of second elastic hinges each of which is arranged along the X-axis direction and which allows only a relative displacement in the Y-axis direction between members connected to both ends thereof. The moving table and the fixed base to be And an intermediate member is interposed in the X-axis-Y-axis plane between the fixed base and the moving table, and the moving table is fixed to the fixed base and the X-axis-Y axis. The fixed base, the intermediate member, and the moving table are combined with the first and second elastic hinges so that the fixed base, the intermediate member, and the moving table can be slightly displaced in a plane and held at a predetermined position in the Z-axis direction. By using it, the fixed part and the movable part are respectively arranged on the fixed base and the movable table, and the movable table can be relatively moved in the X-axis direction with respect to the fixed base. A linear motor for driving in the X-axis direction, and its own fixed part and movable part are respectively disposed on the fixed base and the movable table, and the movable table is relatively moved in the Y-axis direction with respect to the fixed base. An XY stage device, wherein a movable table is slightly displaced within a plane of the X-Y axis with respect to a fixed base by a linear motor for driving in a Y-axis direction capable of being driven. 3. The intermediate member according to claim 2, wherein the intermediate member includes two X-axis extending portions extending in the X-axis direction and two Y-axis extending portions extending in the Y-axis direction. And the first elastic hinge has two Xs in the intermediate member.
By disposing a plurality of parts in the Y-axis direction between the axially extending portion and the fixed base, the X of the fixed base and the intermediate member can be reduced.
A relative displacement in the axial direction is allowed, while the second elastic hinges
By disposing a plurality of members in the X-axis direction between the axially extending portion and the moving table, a relative displacement between the intermediate member and the moving table in the Y-axis direction is allowed. XY stage device. 4. The first elastic hinge according to claim 2, wherein the intermediate member is divided into a plurality of intermediate members including first and second intermediate members, and the first elastic hinge is provided between the fixed base and the first intermediate member. Is arranged to allow relative displacement in the X direction between the two members, and a second member is provided between the first intermediate member and the moving table.
By disposing the elastic hinge and allowing relative displacement in the Y direction between the two members, relative displacement in the X-axis and Y-axis directions with respect to the fixed base of the moving table is allowed. The second elastic hinge is disposed between the second intermediate member and the second intermediate member to allow relative displacement in the Y direction between the two members, and the first elastic hinge is disposed between the second intermediate member and the movable table.
The elastic hinge is disposed to allow relative displacement in the X-axis direction between the two members, so that displacement in the X-axis and Y-axis directions with respect to the fixed base of the moving table is allowed. XY stage device. 5. A moving table having a predetermined X position with respect to a fixed base.
An X-axis-Y-axis stage device, which supports the member mounted on the moving table in the X-axis-Y-axis plane so as to be capable of being slightly displaced in the axis-Y-axis plane, A fixed base arranged at a predetermined gap in the Z-axis direction with respect to the moving table to be displaced minutely within, having rigidity only in its own longitudinal direction, At least three in the Z-axis direction, which are arranged and interposed in the gap along the Z-axis direction and cause the movable table to slightly displace in the X-axis-Y-axis plane with respect to the fixed base by being elastically deformed. An elastic hinge, and its own fixed part and movable part are respectively arranged on the fixed base and the movable table, and X-axis direction driving capable of moving the movable table relative to the fixed base in the X-axis direction. A linear motor for A fixed base and a movable part thereof are respectively disposed on the fixed base and the movable table, and a linear motor for driving in the Y-axis direction capable of moving the movable table relative to the fixed base in the Y-axis direction; An XY stage device comprising: 6. The elastic hinge in the Z-axis direction according to claim 5, wherein three of the elastic hinges in the Z-axis direction are arranged at respective apexes of a virtual equilateral triangle whose center of gravity coincides with the center of gravity of the moving table. An XY stage device, comprising: