JPS6154639A - 半導体ウエ−ハ移し換え装置 - Google Patents
半導体ウエ−ハ移し換え装置Info
- Publication number
- JPS6154639A JPS6154639A JP17664984A JP17664984A JPS6154639A JP S6154639 A JPS6154639 A JP S6154639A JP 17664984 A JP17664984 A JP 17664984A JP 17664984 A JP17664984 A JP 17664984A JP S6154639 A JPS6154639 A JP S6154639A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- storage cassette
- cassette
- wafers
- storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17664984A JPS6154639A (ja) | 1984-08-27 | 1984-08-27 | 半導体ウエ−ハ移し換え装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17664984A JPS6154639A (ja) | 1984-08-27 | 1984-08-27 | 半導体ウエ−ハ移し換え装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6154639A true JPS6154639A (ja) | 1986-03-18 |
JPH0546701B2 JPH0546701B2 (enrdf_load_html_response) | 1993-07-14 |
Family
ID=16017269
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17664984A Granted JPS6154639A (ja) | 1984-08-27 | 1984-08-27 | 半導体ウエ−ハ移し換え装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6154639A (enrdf_load_html_response) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5030056A (en) * | 1988-12-02 | 1991-07-09 | Tokyo Electron Sagami Ltd. | Substrate transfer device |
US5110248A (en) * | 1989-07-17 | 1992-05-05 | Tokyo Electron Sagami Limited | Vertical heat-treatment apparatus having a wafer transfer mechanism |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5483371U (enrdf_load_html_response) * | 1977-11-17 | 1979-06-13 | ||
JPS5496157U (enrdf_load_html_response) * | 1977-12-19 | 1979-07-07 |
-
1984
- 1984-08-27 JP JP17664984A patent/JPS6154639A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5483371U (enrdf_load_html_response) * | 1977-11-17 | 1979-06-13 | ||
JPS5496157U (enrdf_load_html_response) * | 1977-12-19 | 1979-07-07 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5030056A (en) * | 1988-12-02 | 1991-07-09 | Tokyo Electron Sagami Ltd. | Substrate transfer device |
US5110248A (en) * | 1989-07-17 | 1992-05-05 | Tokyo Electron Sagami Limited | Vertical heat-treatment apparatus having a wafer transfer mechanism |
Also Published As
Publication number | Publication date |
---|---|
JPH0546701B2 (enrdf_load_html_response) | 1993-07-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |