JPS6154597B2 - - Google Patents
Info
- Publication number
- JPS6154597B2 JPS6154597B2 JP57039336A JP3933682A JPS6154597B2 JP S6154597 B2 JPS6154597 B2 JP S6154597B2 JP 57039336 A JP57039336 A JP 57039336A JP 3933682 A JP3933682 A JP 3933682A JP S6154597 B2 JPS6154597 B2 JP S6154597B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- workpiece
- monitoring
- evaporation source
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 34
- 230000008020 evaporation Effects 0.000 claims description 29
- 238000001704 evaporation Methods 0.000 claims description 29
- 238000012544 monitoring process Methods 0.000 claims description 22
- 239000010408 film Substances 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 7
- 238000012806 monitoring device Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 description 4
- 239000002356 single layer Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57039336A JPS58158254A (ja) | 1982-03-15 | 1982-03-15 | 多層薄膜形成装置における膜厚監視装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57039336A JPS58158254A (ja) | 1982-03-15 | 1982-03-15 | 多層薄膜形成装置における膜厚監視装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58158254A JPS58158254A (ja) | 1983-09-20 |
| JPS6154597B2 true JPS6154597B2 (Direct) | 1986-11-22 |
Family
ID=12550246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57039336A Granted JPS58158254A (ja) | 1982-03-15 | 1982-03-15 | 多層薄膜形成装置における膜厚監視装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58158254A (Direct) |
-
1982
- 1982-03-15 JP JP57039336A patent/JPS58158254A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58158254A (ja) | 1983-09-20 |
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