DE69900312T2 - Interferometrische Dickenprofile mit einem die Flachheit erhaltenden Kanal für das sich bewegende Material - Google Patents

Interferometrische Dickenprofile mit einem die Flachheit erhaltenden Kanal für das sich bewegende Material

Info

Publication number
DE69900312T2
DE69900312T2 DE69900312T DE69900312T DE69900312T2 DE 69900312 T2 DE69900312 T2 DE 69900312T2 DE 69900312 T DE69900312 T DE 69900312T DE 69900312 T DE69900312 T DE 69900312T DE 69900312 T2 DE69900312 T2 DE 69900312T2
Authority
DE
Germany
Prior art keywords
flatness
moving material
thickness profiles
maintaining channel
interferometric thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69900312T
Other languages
English (en)
Other versions
DE69900312D1 (de
Inventor
Michael A Marcus
Jiann-Rong Lee
Harry Wayne Harris
Richard R Kelbe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eastman Kodak Co
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Application granted granted Critical
Publication of DE69900312D1 publication Critical patent/DE69900312D1/de
Publication of DE69900312T2 publication Critical patent/DE69900312T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02024—Measuring in transmission, i.e. light traverses the object
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H23/00—Registering, tensioning, smoothing or guiding webs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H43/00—Use of control, checking, or safety devices, e.g. automatic devices comprising an element for sensing a variable
    • B65H43/08—Photoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
    • G01B9/02065—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry using a second interferometer before or after measuring interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02071—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by measuring path difference independently from interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2511/00—Dimensions; Position; Numbers; Identification; Occurrences
    • B65H2511/10—Size; Dimensions
    • B65H2511/13—Thickness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2553/00—Sensing or detecting means
    • B65H2553/40—Sensing or detecting means using optical, e.g. photographic, elements
    • B65H2553/41—Photoelectric detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE69900312T 1998-10-29 1999-10-18 Interferometrische Dickenprofile mit einem die Flachheit erhaltenden Kanal für das sich bewegende Material Expired - Lifetime DE69900312T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10612998P 1998-10-29 1998-10-29
US09/216,094 US6067161A (en) 1998-10-29 1998-12-18 Apparatus for measuring material thickness profiles

Publications (2)

Publication Number Publication Date
DE69900312D1 DE69900312D1 (de) 2001-10-31
DE69900312T2 true DE69900312T2 (de) 2002-07-04

Family

ID=26803329

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69900312T Expired - Lifetime DE69900312T2 (de) 1998-10-29 1999-10-18 Interferometrische Dickenprofile mit einem die Flachheit erhaltenden Kanal für das sich bewegende Material

Country Status (4)

Country Link
US (1) US6067161A (de)
EP (1) EP0997703B1 (de)
JP (1) JP2000131024A (de)
DE (1) DE69900312T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2780778B3 (fr) * 1998-07-03 2000-08-11 Saint Gobain Vitrage Procede et dispositif pour la mesure de l'epaisseur d'un materiau transparent
US6470294B1 (en) * 1999-04-13 2002-10-22 Qualitek-Vib, Inc. System and method for the on-line measurement of glue application rate on a corrugator
US6678634B1 (en) * 2001-04-27 2004-01-13 Automation And Control Technology, Inc. Thickness measurement system and method
US6805899B2 (en) 2002-01-30 2004-10-19 Honeywell International Inc. Multi-measurement/sensor coating consolidation detection method and system
US6810365B1 (en) 2002-06-13 2004-10-26 The United States Of America As Represented By The Secretary Of The Navy Monitoring waste liquid to determine membrane cleansing performance
US7206076B2 (en) * 2003-11-04 2007-04-17 Lumetrics, Inc. Thickness measurement of moving webs and seal integrity system using dual interferometer
US7636166B2 (en) * 2006-01-23 2009-12-22 Zygo Corporation Interferometer system for monitoring an object
EP2067683A3 (de) * 2007-12-03 2009-12-16 Innova Patent GmbH Verfahren zur Herstellung eines Wandteiles für eine Kabine bzw. einer Abdeckhaube für einen Sessel einer Seilbahnanlage
US8120781B2 (en) 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
US8610899B2 (en) * 2009-12-02 2013-12-17 Lumetrics, Inc. Rotational and linear system and methods for scanning of objects
CN116295142B (zh) * 2023-05-23 2023-07-21 湖北工业大学 一种土建工程用墙体平整度检测装置
CN116475025B (zh) * 2023-06-21 2023-08-18 深圳德森精密设备有限公司 一种加工轨迹的制定方法、加工系统、处理器和存储介质

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3319515A (en) * 1963-08-27 1967-05-16 Du Pont Interferometric optical phase discrimination apparatus
US5473432A (en) * 1994-09-12 1995-12-05 Hewlett-Packard Company Apparatus for measuring the thickness of a moving film utilizing an adjustable numerical aperture lens
US5596409A (en) * 1995-03-22 1997-01-21 Eastman Kodak Company Associated dual interferometric measurement method for determining a physical property of an object
US5659392A (en) * 1995-03-22 1997-08-19 Eastman Kodak Company Associated dual interferometric measurement apparatus for determining a physical property of an object
US5610716A (en) * 1995-08-28 1997-03-11 Hewlett-Packard Company Method and apparatus for measuring film thickness utilizing the slope of the phase of the Fourier transform of an autocorrelator signal
US5731876A (en) * 1996-09-17 1998-03-24 Hewlett-Packard Company Method and apparatus for on-line determination of the thickness of a multilayer film using a partially reflecting roller and low coherence reflectometry
US5850287A (en) * 1997-07-11 1998-12-15 Hewlett-Packard Company Roller assembly having pre-aligned for on-line thickness measurements

Also Published As

Publication number Publication date
EP0997703B1 (de) 2001-09-26
EP0997703A1 (de) 2000-05-03
DE69900312D1 (de) 2001-10-31
US6067161A (en) 2000-05-23
JP2000131024A (ja) 2000-05-12

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Legal Events

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