JPS6154212U - - Google Patents
Info
- Publication number
- JPS6154212U JPS6154212U JP13911884U JP13911884U JPS6154212U JP S6154212 U JPS6154212 U JP S6154212U JP 13911884 U JP13911884 U JP 13911884U JP 13911884 U JP13911884 U JP 13911884U JP S6154212 U JPS6154212 U JP S6154212U
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- light
- measurement data
- scanning
- timing signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims 3
- 230000007547 defect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 6
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984139118U JPH0338647Y2 (cg-RX-API-DMAC7.html) | 1984-09-13 | 1984-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984139118U JPH0338647Y2 (cg-RX-API-DMAC7.html) | 1984-09-13 | 1984-09-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6154212U true JPS6154212U (cg-RX-API-DMAC7.html) | 1986-04-11 |
| JPH0338647Y2 JPH0338647Y2 (cg-RX-API-DMAC7.html) | 1991-08-15 |
Family
ID=30697498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984139118U Expired JPH0338647Y2 (cg-RX-API-DMAC7.html) | 1984-09-13 | 1984-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338647Y2 (cg-RX-API-DMAC7.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63238508A (ja) * | 1987-03-27 | 1988-10-04 | Toshiba Corp | 位置測定装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5669505A (en) * | 1979-11-05 | 1981-06-10 | Hitachi Ltd | Laser position detecting device |
| JPS56125605A (en) * | 1980-03-07 | 1981-10-02 | Nippon Steel Corp | Method and apparatus for detection of shape of striplike body |
-
1984
- 1984-09-13 JP JP1984139118U patent/JPH0338647Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5669505A (en) * | 1979-11-05 | 1981-06-10 | Hitachi Ltd | Laser position detecting device |
| JPS56125605A (en) * | 1980-03-07 | 1981-10-02 | Nippon Steel Corp | Method and apparatus for detection of shape of striplike body |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63238508A (ja) * | 1987-03-27 | 1988-10-04 | Toshiba Corp | 位置測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0338647Y2 (cg-RX-API-DMAC7.html) | 1991-08-15 |