JPS6154184A - 加熱処理装置 - Google Patents

加熱処理装置

Info

Publication number
JPS6154184A
JPS6154184A JP17341584A JP17341584A JPS6154184A JP S6154184 A JPS6154184 A JP S6154184A JP 17341584 A JP17341584 A JP 17341584A JP 17341584 A JP17341584 A JP 17341584A JP S6154184 A JPS6154184 A JP S6154184A
Authority
JP
Japan
Prior art keywords
heat
temperature
heat treatment
treated object
radiation source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17341584A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0552445B2 (enrdf_load_stackoverflow
Inventor
功 菱刈
小針　哲郎
春男 天田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Chino Corp
Original Assignee
Hitachi Ltd
Chino Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Chino Works Ltd filed Critical Hitachi Ltd
Priority to JP17341584A priority Critical patent/JPS6154184A/ja
Publication of JPS6154184A publication Critical patent/JPS6154184A/ja
Publication of JPH0552445B2 publication Critical patent/JPH0552445B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Radiation Pyrometers (AREA)
  • Discharge Heating (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP17341584A 1984-08-22 1984-08-22 加熱処理装置 Granted JPS6154184A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17341584A JPS6154184A (ja) 1984-08-22 1984-08-22 加熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17341584A JPS6154184A (ja) 1984-08-22 1984-08-22 加熱処理装置

Publications (2)

Publication Number Publication Date
JPS6154184A true JPS6154184A (ja) 1986-03-18
JPH0552445B2 JPH0552445B2 (enrdf_load_stackoverflow) 1993-08-05

Family

ID=15960012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17341584A Granted JPS6154184A (ja) 1984-08-22 1984-08-22 加熱処理装置

Country Status (1)

Country Link
JP (1) JPS6154184A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0214543A (ja) * 1988-02-17 1990-01-18 Internatl Standard Electric Corp ウエハまたは薄層の温度を測定および制御する方法および装置
JPH04106782U (ja) * 1991-02-28 1992-09-14 スタンレー電気株式会社 車両用超音波式障害物検出装置
JP2000323544A (ja) * 1999-03-29 2000-11-24 Eaton Corp 半導体ウエハの放射率決定方法およびその装置
JP2015070045A (ja) * 2013-09-27 2015-04-13 株式会社日立国際電気 基板処理装置、半導体装置の製造方法及びプログラム

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0214543A (ja) * 1988-02-17 1990-01-18 Internatl Standard Electric Corp ウエハまたは薄層の温度を測定および制御する方法および装置
JPH04106782U (ja) * 1991-02-28 1992-09-14 スタンレー電気株式会社 車両用超音波式障害物検出装置
JP2000323544A (ja) * 1999-03-29 2000-11-24 Eaton Corp 半導体ウエハの放射率決定方法およびその装置
JP2015070045A (ja) * 2013-09-27 2015-04-13 株式会社日立国際電気 基板処理装置、半導体装置の製造方法及びプログラム

Also Published As

Publication number Publication date
JPH0552445B2 (enrdf_load_stackoverflow) 1993-08-05

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Legal Events

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LAPS Cancellation because of no payment of annual fees