JPS6153814B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention provides a shadow mask type color picture tube with a phosphor layer on the inner surface of the face panel.
The present invention relates to a method and apparatus for forming a light-reflecting metal film and a heat-absorbing material film.

In this type of shadow mask type color picture tube, as shown in FIG. 1, a fluorescent surface 2 is formed on the inner surface of a face panel 1.
A shadow mask 7 is disposed opposite this fluorescent surface 2. More specifically, as shown in FIG. 2, the phosphor surface 2 has three phosphors 3 of red, blue, and green that emit light upon impact with an electron beam. A film layer 4 is formed on the three phosphor layers to make the surface smooth, and a light-reflective metal film 5 such as aluminum is formed on the film layer 4. Further, on this film 5, a similar material such as aluminum, iron, or nickel oxide is used to prevent a temperature rise of the shadow mask due to the impingement of the electron beam, or in other words, to prevent mislanding due to thermal expansion and deformation of the shadow mask due to this temperature rise. a heat-absorbing material film 6 is deposited on each of them,
Further, through a baking process, the binder of the phosphor 3 and the film layer 4 are incinerated and removed, leaving the phosphor 2, the light-reflecting metal film 5, and the heat-absorbing material film 6. are doing.

Conventionally, an apparatus shown in FIG. 3 has generally been used to deposit the light-reflecting metal film 5 and the heat-absorbing material film 6. That is, this device 8
a vacuum chamber 9 to which the face panel 1 can be airtightly attached; an evaporation source 10 disposed within the vacuum chamber 9;
An oil diffusion pump 13 connected to the vacuum chamber 9 via a vacuum valve 11 and piping 12, 12, and an oil diffusion pump 13 connected to the vacuum chamber 9 and oil diffusion pump 13 via a vacuum valve 14 and piping 15, 15. It consists of a roughing vacuum pump 16.

In this conventional device, first, the face panel 1 on which the three phosphor layers and the film layer 4 are formed is airtightly attached to the vacuum chamber 9 and the film layer 4, and then the evaporation source 10 is filled with a light-reflecting metal as the evaporation material. is installed, and the roughing vacuum pump 16 and oil diffusion pump 13 are operated to reach a predetermined degree of vacuum in the vacuum chamber 9, and then the temperature of the evaporation source 10 is raised to melt and evaporate the evaporated substances. Then, the first light-reflective metal film 5 is obtained. Next, the atmosphere is introduced into the vacuum chamber 9 to return the pressure inside the chamber to atmospheric pressure, and then the face panel 1 is removed and the same process is repeated for the heat-absorbing material to form both the desired films 5 and 6. I try to do the following.

However, if the light-reflecting metal film 5 and the heat-absorbing material film 6 are vapor-deposited using the same vapor deposition apparatus, the vapor pressure of the vapor-deposited material and the required degree of vacuum during vapor deposition may differ. Because they are different, various inconveniences arise in all respects. In other words, aluminum is usually used as a light-reflecting metal and its deposition vacuum is 10 -4 Torr, whereas the vacuum for aluminum as a heat-absorbing material is 10 ^-4 Torr.
10 ^-1 Torr to ^{10 -2} Torr, and after first depositing aluminum as the former light-reflecting metal in the same vacuum chamber 9, and then depositing aluminum as the latter heat-absorbing metal, during the deposition of the former Once the aluminum film attached to the inner wall of the vacuum chamber 9 is exposed to the atmosphere, it adsorbs a large amount of air, and it takes a long time to reach the latter degree of vacuum. This is because when iron or nickel oxides are used as the heat-absorbing material, the degree of vacuum for evaporation is
10 ^-5 Torr, which made it more difficult and required more evacuation time.

Therefore, in order to obtain an efficient manufacturing process, it is desirable to have separate vapor deposition equipment for the light-reflecting metal and the heat-absorbing material, and in order to process a large number of face panels, it is desirable to install similar equipment. You have to prepare a lot of things. In this case, since there will inevitably be differences in characteristics between each device, there will be large variations in the thickness and distribution of the deposited film, or in the light reflection efficiency and heat absorption efficiency of the film.
Moreover, since there are a large number of devices, there are many failures and repairs, which requires a lot of time for maintenance.Furthermore, when introducing atmospheric air into the vacuum chamber, The peeled off pieces of the deposited material fly up and adhere to the deposited film,
There were problems such as having an adverse effect on the completed picture tube.

In order to improve the above-mentioned drawbacks of the conventional art, the present invention is configured by arranging functionally divided vacuum chambers in a line so that the light-reflecting metal film and the heat-absorbing material film are continuously deposited. This is what I did.

Embodiments of the present invention will be described in detail below with reference to FIG.

FIG. 4 shows the configuration of an apparatus according to an embodiment of the present invention, in which a supply chamber 17, a light-reflective metal film formation chamber 18, a heat-absorbing material film formation chamber 19, and a take-out chamber 20 are arranged in series. , and the supply side 21 before and after
A and a take-out side 21b are set, and vacuum valves 22 to 26 are interposed corresponding to the entrance/exit part of each chamber, and furthermore, the supply chamber 19 and the take-out chamber 20 are connected to a roughing vacuum pump 27. , and each of the formation chambers 18 and 19 includes an oil diffusion pump 2.
8, 29 and rough vacuum pumps 30, 31 are connected, and each chamber 18, 19 is connected to a vapor deposition source 3.
2,33 are provided.

In addition, the supply chamber 17 and the extraction chamber 20 are
The vacuum pump 27 brings the atmospheric pressure to a vacuum of about 10 ^-2 Torr, and both the forming chambers 18 and 19
are oil diffusion pumps 28, 29 and vacuum pump 3
0 and 31, the degree of vacuum is maintained at about 10 ^-1 to ^{10 -5} Torr, which is necessary for vapor deposition, and the presence of both chambers 17 and 20 prevents the pressure from reaching atmospheric pressure.

Although omitted in the above embodiment to simplify the explanation, an arbitrary moving mechanism may be installed in the path from the supply side 21a to the extraction side 21b in a manner that does not prevent the functions of the vacuum valves 22 to 26. ,
This moving mechanism is used to supply, move and take out the face panel 1 between the chambers, which will be described later.

In the above configuration, the face panel 1 is loaded from the supply side 21a into the supply chamber 17 which is at atmospheric pressure. At this time, the other vacuum valves 23, 24, and 25 are closed, and at the same time, the processed face panel 1 is taken out from the take-out chamber 20 to the take-out side 21b.
After charging the face panel 1, inside the supply chamber 17,
Close the vacuum valve 22 and use the vacuum pump 27
A vacuum of about 10 ^-2 Torr is created, and then vacuum valve 2
After opening the vacuum valves 3, 24, and 25 and moving the face panel 1 in the supply chamber 17 to the forming chamber 18, each of these vacuum valves 23, 24, and 25 is closed. In this state, both the formation chambers 18 and 19 are at a vacuum of about 10 ^-2 Torr, so the oil diffusion pump 2
8, 29 and vacuum pumps 30, 31,
After each vacuum is evacuated to a predetermined degree, vapor deposition is performed, and in the forming chamber 18 a light reflective metal film 5 is vapor deposited, and in the forming chamber 19 a heat absorbing material film 6 is further deposited thereon. Vapor deposition is performed. During this vapor deposition operation, the face panel 1 is inserted into the supply chamber 17, the face panel 1 is taken out from the take-out chamber 20, and the exhaust operation is performed. In this way, desired films 5 and 6 can be formed by sequentially and intermittently repeated operations.

That is, when one face panel 1 is taken up, this face panel 1 is connected to the supply chamber 17.
The interior of the interior is maintained in a temporarily evacuated state, and then a light-reflecting metal film 5 is deposited on the three inner phosphor layers in the formation chamber 18, and a heat-absorbing material film is further deposited on the film 5 in the formation chamber 19. 6 is vapor-deposited and further taken out to the outside through the take-out chamber 20. During this time, each of the vacuum valves 22 to 26 is connected to the vacuum valve 2.
2, 26 and 23, 24, 25 will be operated alternately, and this operation will be repeated in sequence, eventually being performed continuously, and this can be done automatically.

Furthermore, since the intermittent operation time is limited by the time of other processes that occur before and after this vapor deposition process, if the intermittent operation time is made shorter than the minimum time required for exhaust or vapor deposition, it is necessary to This vapor deposition process can be subdivided by arranging a plurality of them vertically or in parallel, and by this means more processing can be accomplished.

Furthermore, the formation of the light-reflecting metal film and the heat-absorbing material film in the present invention is not necessarily limited to the vacuum deposition described above, and can of course be applied to, for example, sputtering, ion plating, and the like.

As detailed above, according to the present invention, when forming a light-reflecting metal film and a heat-absorbing material film on the phosphor layer on the inner surface of a face panel, the face panel is moved in each step and processed. This not only greatly improves productivity, but also greatly reduces equipment maintenance and inspection time.In addition, because the processing is done with one equipment, there is no variation in quality, and each forming room The chamber is equipped with a supply chamber and a take-out chamber, and because it is not exposed to atmospheric pressure during work, it is possible to shorten the time required to reach the specified degree of vacuum, and to prevent the flakes of the deposit from flying up. There is no longer any adhesion to the product, making it possible to streamline the processing process, save labor, and improve quality.

[Brief explanation of the drawing]

Figure 1 is a cross-sectional view showing the face panel and shadow mask of a shadow mask type color picture tube, Figure 2 is an enlarged cross-sectional view of the main parts of the same face panel, and Figure 3 is a conventional light-reflecting metal film and heat-absorbing material. FIG. 4 is an explanatory diagram showing an outline of a film forming apparatus according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Face panel, 2... Fluorescent surface, 3... Luminescent material, 5... Light-reflective metal film, 6... Heat-absorbing material film, 17... Supply chamber, 18... Light-reflective metal forming chamber. , 19... Heat-absorbing substance formation chamber, 20... Take-out chamber, 22-26... Vacuum valve, 27, 30, 31... Roughing vacuum pump, 28, 29... Oil diffusion pump, 3
2, 33... Vapor deposition source.

Claims (1)

[Claims] 1. In a face panel of a shadow mask type color picture tube, in which a phosphor layer and a film layer are formed on the inner surface of the panel, and then a light-reflecting metal film and a heat-absorbing material film are sequentially formed. A step of loading the face panel into a supply chamber open to atmospheric pressure and evacuating the chamber to a predetermined degree of vacuum, and transporting the face panel from the supply chamber to a light reflective metal film forming chamber in a vacuum state. In addition, the heat-absorbing material film forming chamber is moved intermittently from the same room to the same heat-absorbing material film forming chamber, and each chamber is evacuated to the degree of vacuum required for film formation, and the light is removed by vapor deposition, sputtering, ion plating, etc. The process of forming a reflective metal film and a heat-absorbing material film, and moving the face panel with these films formed thereon from the formation chamber to a take-out chamber evacuated to a predetermined degree of vacuum, and bringing the inside of the same chamber to atmospheric pressure. A method for forming a light-reflecting metal film and a heat-absorbing material film on the inner surface of a face panel, the method comprising the steps of opening and taking out the film. 2 After forming a phosphor layer and a film layer on the inner surface of the panel, a light-reflecting metal film and a heat-absorbing material film are sequentially formed on the face panel of a shadow mask type color picture tube. Supply chamber connected to pump etc.
A light-reflective metal film forming chamber, a heat-absorbing material film forming chamber, and a take-out chamber are installed in series through vacuum valves between the supply side and the supply chamber, between each chamber, and between the take-out chamber and the take-out side. A moving mechanism from the supply side to the take-out side is set in such a manner that the vacuum can be evacuated and the vacuum is not interrupted by each vacuum valve, and each of the formation chambers is provided with an evaporation mechanism for forming a film. , a sputtering or ion plating means is arranged, and the face panel is charged into the supply chamber which is opened to atmospheric pressure from the supply side while maintaining both the formation chambers in a vacuum state, After evacuating the chamber to a predetermined degree of vacuum, the face panel is intermittently moved to the light-reflective metal film forming chamber, and from the same chamber to the heat-absorbing material film forming chamber, and then After each film was evacuated to the degree of vacuum required for film formation and each of these films was sequentially formed, the face panel on which both films had been formed was further moved to the extraction chamber which was evacuated to a predetermined degree of vacuum. Above,
1. An apparatus for forming a light-reflecting metal film and a heat-absorbing material film on an inner surface of a face panel, characterized in that the chamber is opened to atmospheric pressure and taken out to the take-out side. 3. For the inner surface of the face panel according to claim 2, wherein a plurality of at least one of the light-reflective metal film forming chamber and the heat-absorbing material film forming chamber are arranged vertically or in parallel. A device for forming light-reflective metal films and heat-absorbing material films.