GB1604056A - Process for forming reflective metallic film and thermal absorption film on inner surface of face panel and apparatus therefor - Google Patents

Process for forming reflective metallic film and thermal absorption film on inner surface of face panel and apparatus therefor Download PDF

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Publication number
GB1604056A
GB1604056A GB54478A GB54478A GB1604056A GB 1604056 A GB1604056 A GB 1604056A GB 54478 A GB54478 A GB 54478A GB 54478 A GB54478 A GB 54478A GB 1604056 A GB1604056 A GB 1604056A
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United Kingdom
Prior art keywords
vacuum
chamber
film forming
face panel
feeding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB54478A
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of GB1604056A publication Critical patent/GB1604056A/en
Expired legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
    • H01J29/18—Luminescent screens
    • H01J29/28—Luminescent screens with protective, conductive or reflective layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel

Description

(54) PROCESS FOR FORMING REFLECTIVE METALLIC FILM AND THERMAL ABSORPTION FILM ON INNER SURFACE OF FACE PANEL AND APPARATUS "THEREFOR" (71) We, MITSUBISHI DENKI KABUSH IKI KAISHA, a Japanese Company, of 2-3, Marunouchi 2-chome, Chiyoda-ku, Tokyo, Japan, do hereby declare the invention, for which we pray that a patent may be granted to us, and the method by which it is to be performed, to be particularly described in and by the following statement:- The present invention relates to a process and apparatus for forming a reflective metallic film and a thermal absorption film on the inner surface of the face panel of a shadowmask type colour television cathode-ray tube.
Reference will now be made to Figures 1 to 3 of the accompanying drawings, of which: Figure 1 is a sectional view of a shadowmask and a face panel of a shadow-mask type colour television cathode-ray tube; Figure 2 is a partially enlarged sectional view of an important part of the face panel; and Figure 3 is a schematic view of conventional apparatus for forming the reflective metallic film and the thermal absorption film.
As shown in Figure 1, a shadow-mask type colour television tube has a fluorescent screen 2 formed on an inner surface of a face panel 1 and a shadow-mask 7 is disposed to face the fluorescent screen 2.
In detail as shown in Figure 2, red, blue and green fluorescent materials 3 which luminesce on irradiation by electron beams are formed in dots or strips on the fluorescent screen and then, a film layer 4 is coated on the fluorescent screen 3 so as to impart a smooth surface. Further, there are coated by vacuum evaporation coating a reflective metallic film 5 such as aluminium film and a thermal absorption film 6 such as a film made of aluminium, or an oxide of iron or nickel for preventing undue temperature rise by irradiation by the electron beams. Overheating can cause thermal expansion deformation of the shadow-mask resulting in misdirection of the electron beams.Further, a baking treatment is applied and the binder of the fluorescent materials 3 and the film layer 4 are burned out to leave the fluorscent screen 2, the reflective metallic film 5 and the thermal absorption film 6.
The apparatus shown in Figure 3 has been used in the vacuum evaporation coatings of the reflective metallic film 5 and the thermal absorption film 6.
The apparatus 8, comprises a vacuum vessel 9 for connecting to the face panel 1 in air-tight manner; a vapour-depositing source 10 disposed in the vacuum vessel 9; an oil diffusion pump 13 connected through a vacuum valve 11, and pipes 12, 12 to the vacuum vessel 9 and a suction vacuum pump 16 connected through a vacuum valve 14, pipes 15, 15 to the vacuum vessel 9 and the oil diffusion pump 13.
The face panel 1 having the fluorescent material layer 3 and the film layer 4 is bonded to the vacuum vessel 9 in air-tight manner, and the reflective metal is disposed as the vapour-depositable material in the source 10. The vacuum pump 16 and the oil diffusion pump 13 are operated to reach a suitable degree of vacuum in the vacuum vessel 9 and then the temperature of the source 10 is raised to melt and vapourize the vapour-depositable material to form the reflective metallic film 5. Air is fed into the vacuum vessel 9 to restore atmospheric pressure in the vessel and the face panel 1 is taken out. The thermal absorptiom material is subsequently deposited by the same process so that both of the films 5, 6 are finally deposited.
However, when the vacuum evaporation coatings of the reflective metallic film 5 and the thermal absorption film 6 are carried out in the same vacuum evaporation coating apparatus the vapour pressures of the va pour-depositable materials and the degrees of vacuum required for the vacuum evaporation coatings are respectively different whereby there are various disadvantages.
That is, aluminium is usually used as the reflective metal and the degree of vacuum used is about 10-4 Torr, whereas the degree of vacuum for the vacuum evaporation coating of aluminium as the thermal absorption material is in a range of l0-' to 10-2 Torr. When the vacuum evaporation coating of aluminium as the reflective metal is carried out and then the vacuum evaporation coating of aluminium as the thermal absorption material is carried out in the same vacuum vessel 9, the aluminium film deposited on the inner surface of the vacuum vessel 9 in the first vacuum evaporation coating absorbs a large amount of air when the film is exposed to air so that a long time is needed to reach suitable degree of vacuum in the second vacuum evaporation coating.When an oxide of iron or nickel is used as the thermal absorption material, the degree of vacuum for the vacuum evaporation coating is about 10-5 Torr so that a longer time is required for evacuation.
Accordingly, in order to attain an effective process for forming the reflective metallic film and the thermal absorption film it is preferable to use separate vacuum evaporation coating apparatus for the reflective metal and the thermal absorption material.
In order to prepare many face panels, many pieces of apparatus are necessary. In this case, certain differences of characteristics of the various pieces of apparatus may be found whereby there is considerable fluctuation of the thicknesses and distribution of the deposited films and the reflective efficiency and the thermal absorption efficiency. Moreover, accidents and repairs increase with the number of pieces of apparatus and maintenance becomes difficult. When air is fed into the vacuum vessel, fine pieces of the vapourdepositable material peeled off in the apparatus float to adhere on the deposited film to adversely affect the television receiver tube.
It is an object of the present invention to overcome the above-mentioned disadvantages of the conventional process and to provide a process for forming the reflective metallic film and the thermal absorption film on the inner surface of the face panel in a continuous operation.
According to one aspect of the invention there is provided a process for sequentially forming a reflective metallic film and a thermal absorption film on an inner surface of a face panel of a television cathode-ray tube which comprises a step of feeding the face panel into a feeding chamber under atmospheric pressure and evacuating the chamber to a predetermined degree of vacuum; moving the face panel from the feeding chamber into a reflective metallic film forming chamber under a vacuum pressure and further moving the face panel to a thermal absorption film forming chamber in sequence, and evacuating each chamber to the degree of vacuum needed for the formation of each film, forming the reflective metallic film and the thermal absorption film by vacuum evaporation coating, sputtering or ion plating; and moving the treated face panel from the thermal absorption film forming chamber into a discharge chamber evacuated to a predetermined vacuum degree and then reducing the degree of vacuum to atmospheric pressure and discharging the treated face panel.
According to another aspect of the invention there is provided an apparatus for forming a reflective metallic film and a thermal absorption film on an inner surface of a face panel of a television cathode-ray tube which comprises a feeding chamber and a discharge chamber which are connected to respective vacuum pump means; a reflective metallic film forming chamber and a thermal absorption film forming chamber which are connected to respective vacuum pump means and an oil diffusion pump, a vacuum of substantially 10-4 Torr being established in the reflective metallic film forming chamber by its respective vacuum pump means, and a vacuum of substantially 10-' to 10-2 Torr being established in the thermal absorption film forming chamber by its respective vacuum pump means, vacuum valves connected between the chambers and between a feeding part and the feeding chamber and between a discharging part and the discharging chamber so as to separately evacuate the chambers; transferring means for moving the face panels from the feeding part to the discharging part via the said chambers while allowing vacuum to be maintained by the vacuum valves; depositing means for giving a coating by vacuum evaporation, sputtering or ion plating disposed in each of the film forming chambers, whereby the face panel is fed into the feeding chamber under atmospheric pressure and the feeding chamber is evacuated and then the face plate is moved to the reflective metallic film forming chamber and moved to the thermal absorption film forming chamber in sequence to form the films in each predetermined degree of vacuum; the treated face panel is moved to the discharging chamber under vacuum and the discharging chamber is opened to atmospheric pressure to discharge the treated face panel.
The invention will further be described with reference to Figure 4 of the accompanying drawings, which is a schematic view of one embodiment of the apparatus for forming the reflective metallic film and the thermal absorption film according to the present invention.
Referring to Figure 4 there is shown the structure of the apparatus which comprises a feeding chamber 17; a reflective metallic film forming chamber 18; a thermal absorption film forming chamber 19 and a discharging chamber 20 as a line. A feeding part 21a and a discharging part 21b are respectively provided front and back of the line and vacuum valves 22 to 26 are provided at the part corresponding to the inlets and outlets. The feeding chamber 17 and the discharging chamber 20 are respectively connected to the vacuum pump 27 and the film forming chambers 18, 19 are respectively connected to oil diffusion pumps 28, 29 and vacuum pumps 30, 31 and vapour-deposition sources 32, 33, are respectively disposed in the film forming chambers 18, 19.
The feeding chamber 17 and the discharging chamber 20 are respectively evacuated by the vaccum pump 27 from atmospheric pressure to a vacuum of about 10-2 Torr. The film forming chambers 18, 19 are respectively evacuated by the oil diffusion pumps 28, 29 and the vacuum pumps 30,31 to a vacuum of about 10-' to 10-5 Torr and the degrees of vacuum of the film forming chambers 18, 19 are not decreased to atmospheric pressure but are maintained.
In order to simplify the illustration, transferring means are not shown in the embodiment. However, it is usual to provide suitable transferring means in the passage from the feeding part 21 a to the discharging part 21b in such a way as to avoid difficulties of the functions of the vacuum valves 22 to 26. The feeding and the movement and the discharge of the face panel 1 are attained by the transferring means.
In the above-mentioned structure, the face panel 1 is fed from the feeding part 21 a into the feeding chamber 17 under atmospheric pressure with the vacuum valves 23, 24, 25 closed. On the other hand, another treated face panel 1 is discharged from the discharging chamber 20 to the discharging part 21 b.
After feeding chamber 17, the vacuum valve 22 is closed and it is evacuated by the vacuum pump 27 to a vacuum of about 10-2 Torr, and then the vacuum valves 23, 24, 25 are opened, and the face panel I is moved from the feeding chamber 17 to the film forming chamber 18 and the vacuum valves 23, 24, 25 are closed. In this condition, the film forming chambers 18, 19 are kept at a vacuum of about 10-2 Torr. Accordingly, they are further evacuated by the oil diffusion pumps 28, 29 and the vacuum pumps 30, 31 to a suitable vacuum and the vacuum evaporation coatings are carried out to deposit the reflective metallic film 5 in the film forming chamber 18 and to deposit the thermal absorption film 6 on the reflective metallic film in the film forming chamber 19.
During the vacuum evaporation coatings, another face panel 1 is fed into the feeding chamber 17 and the treated face panel 1 is discharged from the discharging chamber 20 and the chambers are evacuated. Thus, the operations are intermittently repeated sequentially to form the required films 5, 6.
Considering one face panel 1, the face panel 1 is kept in the condition of preliminary evacuation in the feeding chamber 17.
Then the reflective metallic film 5 is deposited on the fluorescent material layer 3 in the film forming chamber 18. Then the thermal absorption film 6 is deposited on the reflective metallic film 5 in the film forming chamber 19. Then the face panel 1 is discharged through the discharging chamber 20. During this operation, the vacuum valves 22, 26 and the vacuum valves 23, 24, 25 are alternatively operated. The operation is sequentially repeated to give a continuous stream line as an automatic operation.
The time interval for the intermittent operation is affected by the time for the other steps before or after the vacuum evaporation coatings. When the time interval is shorter than the minimum time required for the evacuation or the vacuum evaporation coatings, a plurality of the film forming chambers in series or in parallel are provided to divide the vacuum evaporation coating step, whereby the treatment can be increased.
The formation of the reflective metal film and the thermal absorption film by the present invention is not limited to the vacuum evaporation coating and it can be attained by the sputtering or the ion plating method in the same type of apparatus.
As described in detail, in accordance with the preferred embodiment of the present invention, the face panels are treated by transferring them between stages in the formation of the reflective metallic film and the thermal absorption film on the fluorescent material layer on the inner surface of the face panel whereby the productivity can be improved and the maintenance of the apparatus and the inspection time can be reduced.
The fluctuation of quality of the products can be minimized because the treatment is carried out by one line apparatus. The feeding chamber and the discharging chamber are connected at the front and back of the film forming chambers and the film forming chambers can be kept under vacuum during the operation, whereby the time for attaining a suitable degree of vacuum can be short.
The trouble of adhesion of floated fine pieces of the vapour-depositable material which peels off can be prevented. The rationalization of the steps in the operation and the reduction of labour and the improvement of quality of the products can be attained.
WHAT WE CLAIM IS: 1. A process for sequentially forming a
**WARNING** end of DESC field may overlap start of CLMS **.

Claims (5)

**WARNING** start of CLMS field may overlap end of DESC **. Referring to Figure 4 there is shown the structure of the apparatus which comprises a feeding chamber 17; a reflective metallic film forming chamber 18; a thermal absorption film forming chamber 19 and a discharging chamber 20 as a line. A feeding part 21a and a discharging part 21b are respectively provided front and back of the line and vacuum valves 22 to 26 are provided at the part corresponding to the inlets and outlets. The feeding chamber 17 and the discharging chamber 20 are respectively connected to the vacuum pump 27 and the film forming chambers 18, 19 are respectively connected to oil diffusion pumps 28, 29 and vacuum pumps 30, 31 and vapour-deposition sources 32, 33, are respectively disposed in the film forming chambers 18, 19. The feeding chamber 17 and the discharging chamber 20 are respectively evacuated by the vaccum pump 27 from atmospheric pressure to a vacuum of about 10-2 Torr. The film forming chambers 18, 19 are respectively evacuated by the oil diffusion pumps 28, 29 and the vacuum pumps 30,31 to a vacuum of about 10-' to 10-5 Torr and the degrees of vacuum of the film forming chambers 18, 19 are not decreased to atmospheric pressure but are maintained. In order to simplify the illustration, transferring means are not shown in the embodiment. However, it is usual to provide suitable transferring means in the passage from the feeding part 21 a to the discharging part 21b in such a way as to avoid difficulties of the functions of the vacuum valves 22 to 26. The feeding and the movement and the discharge of the face panel 1 are attained by the transferring means. In the above-mentioned structure, the face panel 1 is fed from the feeding part 21 a into the feeding chamber 17 under atmospheric pressure with the vacuum valves 23, 24, 25 closed. On the other hand, another treated face panel 1 is discharged from the discharging chamber 20 to the discharging part 21 b. After feeding chamber 17, the vacuum valve 22 is closed and it is evacuated by the vacuum pump 27 to a vacuum of about 10-2 Torr, and then the vacuum valves 23, 24, 25 are opened, and the face panel I is moved from the feeding chamber 17 to the film forming chamber 18 and the vacuum valves 23, 24, 25 are closed. In this condition, the film forming chambers 18, 19 are kept at a vacuum of about 10-2 Torr. Accordingly, they are further evacuated by the oil diffusion pumps 28, 29 and the vacuum pumps 30, 31 to a suitable vacuum and the vacuum evaporation coatings are carried out to deposit the reflective metallic film 5 in the film forming chamber 18 and to deposit the thermal absorption film 6 on the reflective metallic film in the film forming chamber 19. During the vacuum evaporation coatings, another face panel 1 is fed into the feeding chamber 17 and the treated face panel 1 is discharged from the discharging chamber 20 and the chambers are evacuated. Thus, the operations are intermittently repeated sequentially to form the required films 5, 6. Considering one face panel 1, the face panel 1 is kept in the condition of preliminary evacuation in the feeding chamber 17. Then the reflective metallic film 5 is deposited on the fluorescent material layer 3 in the film forming chamber 18. Then the thermal absorption film 6 is deposited on the reflective metallic film 5 in the film forming chamber 19. Then the face panel 1 is discharged through the discharging chamber 20. During this operation, the vacuum valves 22, 26 and the vacuum valves 23, 24, 25 are alternatively operated. The operation is sequentially repeated to give a continuous stream line as an automatic operation. The time interval for the intermittent operation is affected by the time for the other steps before or after the vacuum evaporation coatings. When the time interval is shorter than the minimum time required for the evacuation or the vacuum evaporation coatings, a plurality of the film forming chambers in series or in parallel are provided to divide the vacuum evaporation coating step, whereby the treatment can be increased. The formation of the reflective metal film and the thermal absorption film by the present invention is not limited to the vacuum evaporation coating and it can be attained by the sputtering or the ion plating method in the same type of apparatus. As described in detail, in accordance with the preferred embodiment of the present invention, the face panels are treated by transferring them between stages in the formation of the reflective metallic film and the thermal absorption film on the fluorescent material layer on the inner surface of the face panel whereby the productivity can be improved and the maintenance of the apparatus and the inspection time can be reduced. The fluctuation of quality of the products can be minimized because the treatment is carried out by one line apparatus. The feeding chamber and the discharging chamber are connected at the front and back of the film forming chambers and the film forming chambers can be kept under vacuum during the operation, whereby the time for attaining a suitable degree of vacuum can be short. The trouble of adhesion of floated fine pieces of the vapour-depositable material which peels off can be prevented. The rationalization of the steps in the operation and the reduction of labour and the improvement of quality of the products can be attained. WHAT WE CLAIM IS:
1. A process for sequentially forming a
reflective metallic film and a thermal absorption film on an inner surface of a face panel of a television cathode-ray tube which comprises a step of feeding the face panel into a feeding chamber under atmospheric pressure and evacuating the chamber to a predetermined degree of vacuum; moving the face panel from the feeding chamber into a reflective metallic film forming chamber under a vacuum pressure and further moving the face panel to a thermal absorption film forming chamber in sequence, and evacuating each chamber to the degree of vacuum needed for the formation of each film, forming the reflective metallic film and the thermal absorption film by vacuum evaporation coating, sputtering or ion plating; and moving the treated face panel from the thermal absorption film forming chamber into a discharge chamber evacuated to a predetermined vacuum degree of then reducing the degree of vacuum of atmospheric pressure and discharging the treated face panel.
2. An apparatus for forming a reflective metallic film and a thermal absorption film on an inner surface of a face panel of a television cathode-ray tube which comprises a feeding chamber and a discharge chamber which are connected to respective vacuum pump means; a reflective metallic film forming chamber and a thermal absorption film forming chamber which are connected to respective vacuum pump means and an oil diffusion pump, a vacuum of substantially 10-4 Torr being established in the reflective metallic film forming chamber by its respective vacuum pump means, and a vacuum of substantially 10-' to 10-2 Torr being established in the thermal absorption film forming chamber by its respective vacuum pump means, vacuum valves connected between the chambers and between a feeding part and the feeding chamber and between a discharging part and the discharging chamber so as to separately evacuate the chambers; transferring means for moving the face panels from the feeding part to the discharging part via the said chambers while allowing vacuum to be maintained by the vacuum valves; depositing means for giving a coating by vacuum evaporation, sputtering or ion plating disposed in each of the film forming chambers; whereby the face panel is fed into the feeding chamber under atmospheric pressure and the feeding chamber is evacuated and then the face plate is moved to the reflective metallic film forming chamber and moved to the thermal absorption film forming chamber in sequence to form the films in each predetermined degree of vacuum, the treated face panel is moved to the discharging chamber under vacuum and the discharging chamber is opened to atmospheric pressure to discharge the treated face panel.
3. An apparatus according to claim 2 wherein a plurality of the reflective metallic film forming chambers are arranged in series or in parallel and/or a plurality of the thermal absorption film forming chambers are arranged in series or in parallel.
4. A process for forming metallic films on an inner surface of a face panel substantially as hereinbefore described with reference to Figure 4 of the accompanying drawings.
5. An apparatus for forming metallic films on inner surfaces of face panels substantially as hereinbefore described with reference to Figure 4 of the accompanying drawings.
GB54478A 1977-01-06 1978-01-06 Process for forming reflective metallic film and thermal absorption film on inner surface of face panel and apparatus therefor Expired GB1604056A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP66177A JPS5385153A (en) 1977-01-06 1977-01-06 Forming method for light reflective metallic film and heat absorbent material film on face panel inside and its unit

Publications (1)

Publication Number Publication Date
GB1604056A true GB1604056A (en) 1981-12-02

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GB54478A Expired GB1604056A (en) 1977-01-06 1978-01-06 Process for forming reflective metallic film and thermal absorption film on inner surface of face panel and apparatus therefor

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JP (1) JPS5385153A (en)
DE (1) DE2800198A1 (en)
GB (1) GB1604056A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4303462A1 (en) * 1992-03-30 1993-10-14 Leybold Ag Multi-chamber coating installation - has adjustable locks between chambers, minimising gas transfer between coating chambers to give improved quality
GB2273110A (en) * 1992-12-03 1994-06-08 Gec Marconi Avionics Holdings Depositing different materials on a substrate by controlling degree of exposure
US5454919A (en) * 1992-12-03 1995-10-03 Gec-Marconi Avionics Holdings Limited Depositing different materials on a substrate
CN115261799A (en) * 2022-08-03 2022-11-01 江西艾芬达暖通科技股份有限公司 Surface layer vacuum coating process for temperature control valve

Families Citing this family (2)

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Publication number Priority date Publication date Assignee Title
US4351265A (en) * 1981-02-19 1982-09-28 Rca Corporation System for applying a liquid to the studs of a color kinescope faceplate panel
JP4164992B2 (en) * 2000-07-05 2008-10-15 ソニー株式会社 Cathode ray tube and manufacturing method thereof

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Publication number Priority date Publication date Assignee Title
GB515148A (en) * 1937-05-29 1939-11-28 Bosch Gmbh Robert Apparatus for the metallising of objects in vacuo by metal vaporising or cathode sputtering
DE1282411B (en) * 1964-12-28 1968-11-07 Hermsdorf Keramik Veb Device for the continuous production and processing of electronic components under vacuum, in particular for the vapor deposition of layers
US3392297A (en) * 1966-12-21 1968-07-09 Nat Video Corp Color triad tube having heat-absorptive material on aluminum screen backing for cooling shadow mask
DE1937007A1 (en) * 1969-07-21 1971-01-28 Siemens Ag Vacuum equipment with a sluice for a unit - for working constructural element in
CH542772A (en) * 1971-09-21 1973-10-15 Balzers Patent Beteilig Ag Device for transporting substrates to be coated through a vacuum system

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4303462A1 (en) * 1992-03-30 1993-10-14 Leybold Ag Multi-chamber coating installation - has adjustable locks between chambers, minimising gas transfer between coating chambers to give improved quality
GB2273110A (en) * 1992-12-03 1994-06-08 Gec Marconi Avionics Holdings Depositing different materials on a substrate by controlling degree of exposure
US5454919A (en) * 1992-12-03 1995-10-03 Gec-Marconi Avionics Holdings Limited Depositing different materials on a substrate
GB2273110B (en) * 1992-12-03 1996-01-24 Gec Marconi Avionics Holdings Depositing different materials on a substrate
CN115261799A (en) * 2022-08-03 2022-11-01 江西艾芬达暖通科技股份有限公司 Surface layer vacuum coating process for temperature control valve
CN115261799B (en) * 2022-08-03 2023-12-01 江西艾芬达暖通科技股份有限公司 Surface layer vacuum coating process of temperature control valve

Also Published As

Publication number Publication date
JPS6153814B2 (en) 1986-11-19
JPS5385153A (en) 1978-07-27
DE2800198A1 (en) 1978-07-20

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