JPS6150760U - - Google Patents

Info

Publication number

JPS6150760U

JPS6150760U JP13414784U JP13414784U JPS6150760U JP S6150760 U JPS6150760 U JP S6150760U JP 13414784 U JP13414784 U JP 13414784U JP 13414784 U JP13414784 U JP 13414784U JP S6150760 U JPS6150760 U JP S6150760U

Authority

JP

Japan

Prior art keywords

vapor phase

phase growth

support

exhaust section

buffer

Prior art date

1984-09-04

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001947 vapour-phase growth Methods 0.000 claims description 4
• 239000012495 reaction gas Substances 0.000 claims 2
• 229910052581 Si3N4 Inorganic materials 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
• 239000007789 gas Substances 0.000 claims 1
• 239000010453 quartz Substances 0.000 claims 1
• 239000000376 reactant Substances 0.000 claims 1
• 229910052710 silicon Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
• 229910010271 silicon carbide Inorganic materials 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 4