JPS6150631U - - Google Patents
Info
- Publication number
- JPS6150631U JPS6150631U JP1984135757U JP13575784U JPS6150631U JP S6150631 U JPS6150631 U JP S6150631U JP 1984135757 U JP1984135757 U JP 1984135757U JP 13575784 U JP13575784 U JP 13575784U JP S6150631 U JPS6150631 U JP S6150631U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chuck
- workpiece
- polishing liquid
- chemical polishing
- distortion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 239000004744 fabric Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Jigs For Machine Tools (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984135757U JPS6150631U (id) | 1984-09-07 | 1984-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984135757U JPS6150631U (id) | 1984-09-07 | 1984-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6150631U true JPS6150631U (id) | 1986-04-05 |
Family
ID=30694239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984135757U Pending JPS6150631U (id) | 1984-09-07 | 1984-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6150631U (id) |
-
1984
- 1984-09-07 JP JP1984135757U patent/JPS6150631U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0560250B2 (id) | ||
| JPS6150631U (id) | ||
| JPS6190243U (id) | ||
| JPS6237932U (id) | ||
| JPH03128943U (id) | ||
| JPS6096825U (ja) | 洗浄用ブラシ | |
| JPH0639869Y2 (ja) | 真空チャック | |
| JPH01129824U (id) | ||
| JPS6067365U (ja) | エツチング加工装置 | |
| JPS62118443U (id) | ||
| JPS6295863U (id) | ||
| JPH0379872U (id) | ||
| JPS645444U (id) | ||
| JPS6120047U (ja) | 半導体ウエ−ハの載置装置 | |
| JPS6394657U (id) | ||
| JPS6084251U (ja) | 遊星回転式研摩装置 | |
| JPH0215864U (id) | ||
| JPH0438037U (id) | ||
| JPS6377344U (id) | ||
| JPS6332847U (id) | ||
| JPS60111038U (ja) | 真空チヤツク | |
| JPH01161334U (id) | ||
| JPH02132941U (id) | ||
| JPH0166962U (id) | ||
| JPS62127733U (id) |