JPS61502201A - 冷却ポンプおよび冷却ポンプ用の冷却パネル - Google Patents

冷却ポンプおよび冷却ポンプ用の冷却パネル

Info

Publication number
JPS61502201A
JPS61502201A JP60502502A JP50250285A JPS61502201A JP S61502201 A JPS61502201 A JP S61502201A JP 60502502 A JP60502502 A JP 60502502A JP 50250285 A JP50250285 A JP 50250285A JP S61502201 A JPS61502201 A JP S61502201A
Authority
JP
Japan
Prior art keywords
stage
cooling
bracket
panel
baffles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60502502A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0529795B2 (enExample
Inventor
バートレツト，アレン・ジエイ
Original Assignee
ヘリックス・テクノロジ−・コ−ポレ−ション
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ヘリックス・テクノロジ−・コ−ポレ−ション filed Critical ヘリックス・テクノロジ−・コ−ポレ−ション
Publication of JPS61502201A publication Critical patent/JPS61502201A/ja
Publication of JPH0529795B2 publication Critical patent/JPH0529795B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP60502502A 1984-05-18 1985-05-16 冷却ポンプおよび冷却ポンプ用の冷却パネル Granted JPS61502201A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US611689 1984-05-18
US06/611,689 US4555907A (en) 1984-05-18 1984-05-18 Cryopump with improved second stage array

Publications (2)

Publication Number Publication Date
JPS61502201A true JPS61502201A (ja) 1986-10-02
JPH0529795B2 JPH0529795B2 (enExample) 1993-05-06

Family

ID=24450039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60502502A Granted JPS61502201A (ja) 1984-05-18 1985-05-16 冷却ポンプおよび冷却ポンプ用の冷却パネル

Country Status (7)

Country Link
US (1) US4555907A (enExample)
EP (1) EP0185702B1 (enExample)
JP (1) JPS61502201A (enExample)
CA (1) CA1268048A (enExample)
DE (1) DE3566292D1 (enExample)
IL (1) IL75222A (enExample)
WO (1) WO1985005410A1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4718241A (en) * 1985-10-31 1988-01-12 Helix Technology Corporation Cryopump with quicker adsorption
WO1987002743A1 (en) * 1985-10-31 1987-05-07 Helix Technology Corporation Cryopump with quicker adsorption
EP0384922B1 (de) * 1989-02-28 1993-07-14 Leybold Aktiengesellschaft Mit einem zweistufigen Refrigerator betriebene Kryopumpe
US5156007A (en) * 1991-01-30 1992-10-20 Helix Technology Corporation Cryopump with improved second stage passageway
US5211022A (en) * 1991-05-17 1993-05-18 Helix Technology Corporation Cryopump with differential pumping capability
US5375424A (en) * 1993-02-26 1994-12-27 Helix Technology Corporation Cryopump with electronically controlled regeneration
US5517823A (en) * 1995-01-18 1996-05-21 Helix Technology Corporation Pressure controlled cryopump regeneration method and system
US5906102A (en) * 1996-04-12 1999-05-25 Helix Technology Corporation Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve
US5782096A (en) * 1997-02-05 1998-07-21 Helix Technology Corporation Cryopump with improved shielding
US6155059A (en) * 1999-01-13 2000-12-05 Helix Technology Corporation High capacity cryopump
ATE355461T1 (de) 2003-06-27 2006-03-15 Helix Tech Corp Integration einer automatisierten kryopumpensicherheitsspülung
US7320224B2 (en) * 2004-01-21 2008-01-22 Brooks Automation, Inc. Method and apparatus for detecting and measuring state of fullness in cryopumps
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
JP5254993B2 (ja) 2007-01-17 2013-08-07 ブルックス オートメーション インコーポレイテッド 圧力バーストが生じない大容量クライオポンプ
US9266039B2 (en) 2010-11-24 2016-02-23 Brooks Automation, Inc. Cryopump with controlled hydrogen gas release
JP6031451B2 (ja) 2011-02-09 2016-11-24 ブルックス オートメーション インコーポレイテッド クライオポンプ
TWI705187B (zh) 2011-03-04 2020-09-21 美商艾德華真空有限責任公司 低溫冷凍系統以及用於控制氦氣冷凍劑之供給的方法
JP5822747B2 (ja) * 2012-02-02 2015-11-24 住友重機械工業株式会社 クライオポンプ
JP6871751B2 (ja) * 2017-02-07 2021-05-12 住友重機械工業株式会社 クライオポンプ
JP2018127943A (ja) * 2017-02-08 2018-08-16 住友重機械工業株式会社 クライオポンプ
US12309937B2 (en) 2021-01-28 2025-05-20 Panasonic Intellectual Property Management Co., Ltd. Motor control system, motor control device, and motor control method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH437616A (de) * 1966-08-23 1967-06-15 Balzers Patent Beteilig Ag Wahlweise mit Kühlmitteln verschiedener Temperatur kühlbarer Treibmittelfänger für Vakuumdampfpumpen
DE2620880C2 (de) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
US4212170A (en) * 1979-04-16 1980-07-15 Oerlikon Buhrle USA Incorporated Cryopump
US4336690A (en) * 1979-09-28 1982-06-29 Varian Associates, Inc. Cryogenic pump with radiation shield
US4295338A (en) * 1979-10-18 1981-10-20 Varian Associates, Inc. Cryogenic pumping apparatus with replaceable pumping surface elements
US4277951A (en) * 1980-04-10 1981-07-14 Air Products And Chemicals, Inc. Cryopumping apparatus
DE3330146A1 (de) * 1982-09-17 1984-03-22 Balzers Hochvakuum Gmbh, 6200 Wiesbaden Vorrichtung und verfahren zur schnellen regeneration von autonomen kryopumpen
US4466252A (en) * 1982-09-29 1984-08-21 Cvi Incorporated Cryopump
IL71403A (en) * 1983-04-04 1991-01-31 Helix Tech Corp Cryopump with rapid cooldown and increased pressure stability

Also Published As

Publication number Publication date
DE3566292D1 (en) 1988-12-22
IL75222A (en) 1989-10-31
EP0185702A1 (en) 1986-07-02
CA1268048A (en) 1990-04-24
WO1985005410A1 (en) 1985-12-05
US4555907A (en) 1985-12-03
EP0185702B1 (en) 1988-11-17
IL75222A0 (en) 1985-09-29
JPH0529795B2 (enExample) 1993-05-06

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