CA1268048A - Cryopump with improved second stage array - Google Patents

Cryopump with improved second stage array

Info

Publication number
CA1268048A
CA1268048A CA000481867A CA481867A CA1268048A CA 1268048 A CA1268048 A CA 1268048A CA 000481867 A CA000481867 A CA 000481867A CA 481867 A CA481867 A CA 481867A CA 1268048 A CA1268048 A CA 1268048A
Authority
CA
Canada
Prior art keywords
stage
array
cryopump
cryopanel
brackets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000481867A
Other languages
English (en)
French (fr)
Inventor
Allen J. Bartlett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Application granted granted Critical
Publication of CA1268048A publication Critical patent/CA1268048A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CA000481867A 1984-05-18 1985-05-17 Cryopump with improved second stage array Expired CA1268048A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/611,689 US4555907A (en) 1984-05-18 1984-05-18 Cryopump with improved second stage array
US611,689 1984-05-18

Publications (1)

Publication Number Publication Date
CA1268048A true CA1268048A (en) 1990-04-24

Family

ID=24450039

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000481867A Expired CA1268048A (en) 1984-05-18 1985-05-17 Cryopump with improved second stage array

Country Status (7)

Country Link
US (1) US4555907A (enExample)
EP (1) EP0185702B1 (enExample)
JP (1) JPS61502201A (enExample)
CA (1) CA1268048A (enExample)
DE (1) DE3566292D1 (enExample)
IL (1) IL75222A (enExample)
WO (1) WO1985005410A1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987002743A1 (en) * 1985-10-31 1987-05-07 Helix Technology Corporation Cryopump with quicker adsorption
US4718241A (en) * 1985-10-31 1988-01-12 Helix Technology Corporation Cryopump with quicker adsorption
EP0384922B1 (de) * 1989-02-28 1993-07-14 Leybold Aktiengesellschaft Mit einem zweistufigen Refrigerator betriebene Kryopumpe
US5156007A (en) * 1991-01-30 1992-10-20 Helix Technology Corporation Cryopump with improved second stage passageway
US5211022A (en) * 1991-05-17 1993-05-18 Helix Technology Corporation Cryopump with differential pumping capability
US5375424A (en) * 1993-02-26 1994-12-27 Helix Technology Corporation Cryopump with electronically controlled regeneration
US5517823A (en) * 1995-01-18 1996-05-21 Helix Technology Corporation Pressure controlled cryopump regeneration method and system
US5906102A (en) * 1996-04-12 1999-05-25 Helix Technology Corporation Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve
US5782096A (en) * 1997-02-05 1998-07-21 Helix Technology Corporation Cryopump with improved shielding
US6155059A (en) * 1999-01-13 2000-12-05 Helix Technology Corporation High capacity cryopump
JP4691026B2 (ja) 2003-06-27 2011-06-01 ブルックス オートメーション インコーポレイテッド クライオポンプ自動安全パージの一体化
US7320224B2 (en) * 2004-01-21 2008-01-22 Brooks Automation, Inc. Method and apparatus for detecting and measuring state of fullness in cryopumps
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
WO2008088794A2 (en) 2007-01-17 2008-07-24 Brooks Automation, Inc. Pressure burst free high capacity cryopump
KR101554866B1 (ko) 2010-11-24 2015-09-22 브룩스 오토메이션, 인크. 수소 가스 방출을 제어하는 저온 펌프
KR102033142B1 (ko) * 2011-02-09 2019-10-16 브룩스 오토메이션, 인크. 극저온 펌프
TWI705187B (zh) 2011-03-04 2020-09-21 美商艾德華真空有限責任公司 低溫冷凍系統以及用於控制氦氣冷凍劑之供給的方法
JP5822747B2 (ja) * 2012-02-02 2015-11-24 住友重機械工業株式会社 クライオポンプ
JP6871751B2 (ja) * 2017-02-07 2021-05-12 住友重機械工業株式会社 クライオポンプ
JP2018127943A (ja) * 2017-02-08 2018-08-16 住友重機械工業株式会社 クライオポンプ
US12309937B2 (en) 2021-01-28 2025-05-20 Panasonic Intellectual Property Management Co., Ltd. Motor control system, motor control device, and motor control method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH437616A (de) * 1966-08-23 1967-06-15 Balzers Patent Beteilig Ag Wahlweise mit Kühlmitteln verschiedener Temperatur kühlbarer Treibmittelfänger für Vakuumdampfpumpen
DE2620880C2 (de) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
US4212170A (en) * 1979-04-16 1980-07-15 Oerlikon Buhrle USA Incorporated Cryopump
US4336690A (en) * 1979-09-28 1982-06-29 Varian Associates, Inc. Cryogenic pump with radiation shield
US4295338A (en) * 1979-10-18 1981-10-20 Varian Associates, Inc. Cryogenic pumping apparatus with replaceable pumping surface elements
US4277951A (en) * 1980-04-10 1981-07-14 Air Products And Chemicals, Inc. Cryopumping apparatus
DE3330146A1 (de) * 1982-09-17 1984-03-22 Balzers Hochvakuum Gmbh, 6200 Wiesbaden Vorrichtung und verfahren zur schnellen regeneration von autonomen kryopumpen
US4466252A (en) * 1982-09-29 1984-08-21 Cvi Incorporated Cryopump
IL71403A (en) * 1983-04-04 1991-01-31 Helix Tech Corp Cryopump with rapid cooldown and increased pressure stability

Also Published As

Publication number Publication date
EP0185702A1 (en) 1986-07-02
EP0185702B1 (en) 1988-11-17
IL75222A0 (en) 1985-09-29
US4555907A (en) 1985-12-03
JPH0529795B2 (enExample) 1993-05-06
IL75222A (en) 1989-10-31
DE3566292D1 (en) 1988-12-22
WO1985005410A1 (en) 1985-12-05
JPS61502201A (ja) 1986-10-02

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Legal Events

Date Code Title Description
MKLA Lapsed