JPS6150218U - - Google Patents
Info
- Publication number
- JPS6150218U JPS6150218U JP13450184U JP13450184U JPS6150218U JP S6150218 U JPS6150218 U JP S6150218U JP 13450184 U JP13450184 U JP 13450184U JP 13450184 U JP13450184 U JP 13450184U JP S6150218 U JPS6150218 U JP S6150218U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- heating resistor
- film heating
- gas flow
- resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 10
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13450184U JPS6150218U (cs) | 1984-09-06 | 1984-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13450184U JPS6150218U (cs) | 1984-09-06 | 1984-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6150218U true JPS6150218U (cs) | 1986-04-04 |
Family
ID=30693012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13450184U Pending JPS6150218U (cs) | 1984-09-06 | 1984-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6150218U (cs) |
-
1984
- 1984-09-06 JP JP13450184U patent/JPS6150218U/ja active Pending
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