JPS6148373U - - Google Patents
Info
- Publication number
- JPS6148373U JPS6148373U JP13382684U JP13382684U JPS6148373U JP S6148373 U JPS6148373 U JP S6148373U JP 13382684 U JP13382684 U JP 13382684U JP 13382684 U JP13382684 U JP 13382684U JP S6148373 U JPS6148373 U JP S6148373U
- Authority
- JP
- Japan
- Prior art keywords
- resistance
- probes
- sets
- measured
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 6
- 238000005259 measurement Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
Description
第１図は本考案の第１の実施例を概略的に示す
一部切欠斜視図、第２図は本考案の第２の実施例
の要部を示す概略斜視図、第３図は本考案の第３
の実施例の要部を示す概略斜視図である。
２…試料台、３…半導体ウエハ、５，２１…測
定ヘツド部、６，７，８，２３，２４，２５，３
１…測定プローブ、９，１０，３２，３３…４探
針。
Fig. 1 is a partially cutaway perspective view schematically showing a first embodiment of the present invention, Fig. 2 is a schematic perspective view showing main parts of a second embodiment of the invention, and Fig. 3 is a perspective view of the present invention. the third
FIG. 2 is a schematic perspective view showing the main parts of the embodiment. 2... Sample stage, 3... Semiconductor wafer, 5, 21... Measurement head section, 6, 7, 8, 23, 24, 25, 3
1...Measurement probe, 9, 10, 32, 33...4 probes.
Claims (1)
ことにより抵抗測定を行う抵抗測定装置において
、上記抵抗測定用の探針の組を複数組備え、これ
らの探針の組を選択的にあるいは同時に被測定物
に接触させて抵抗測定を行うことを特徴とする抵
抗測定装置。 A resistance measuring device that measures resistance by bringing a plurality of sets of probes into contact with the surface of the object to be measured is equipped with a plurality of sets of probes for measuring resistance as described above, and selectively selects the sets of probes. Alternatively, a resistance measuring device is characterized in that the resistance is measured by contacting the object to be measured at the same time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13382684U JPS6148373U (en) | 1984-09-03 | 1984-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13382684U JPS6148373U (en) | 1984-09-03 | 1984-09-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6148373U true JPS6148373U (en) | 1986-04-01 |
Family
ID=30692361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13382684U Pending JPS6148373U (en) | 1984-09-03 | 1984-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6148373U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010002199A (en) * | 2008-06-18 | 2010-01-07 | Hioki Ee Corp | Resistance measuring device and circuit board inspecting device |
-
1984
- 1984-09-03 JP JP13382684U patent/JPS6148373U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010002199A (en) * | 2008-06-18 | 2010-01-07 | Hioki Ee Corp | Resistance measuring device and circuit board inspecting device |