JPS6147357B2 - - Google Patents

Info

Publication number
JPS6147357B2
JPS6147357B2 JP9020578A JP9020578A JPS6147357B2 JP S6147357 B2 JPS6147357 B2 JP S6147357B2 JP 9020578 A JP9020578 A JP 9020578A JP 9020578 A JP9020578 A JP 9020578A JP S6147357 B2 JPS6147357 B2 JP S6147357B2
Authority
JP
Japan
Prior art keywords
diaphragm
metal member
clamping pressure
clamping
pressure surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9020578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5517759A (en
Inventor
Shinsaku Hirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Sokuhan Co Ltd
Original Assignee
Tokyo Sokuhan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Sokuhan Co Ltd filed Critical Tokyo Sokuhan Co Ltd
Priority to JP9020578A priority Critical patent/JPS5517759A/ja
Publication of JPS5517759A publication Critical patent/JPS5517759A/ja
Publication of JPS6147357B2 publication Critical patent/JPS6147357B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Magnetically Actuated Valves (AREA)
  • Diaphragms And Bellows (AREA)
JP9020578A 1978-07-24 1978-07-24 Method of adhering diaphragm by use of pressure Granted JPS5517759A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9020578A JPS5517759A (en) 1978-07-24 1978-07-24 Method of adhering diaphragm by use of pressure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9020578A JPS5517759A (en) 1978-07-24 1978-07-24 Method of adhering diaphragm by use of pressure

Publications (2)

Publication Number Publication Date
JPS5517759A JPS5517759A (en) 1980-02-07
JPS6147357B2 true JPS6147357B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-18

Family

ID=13991978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9020578A Granted JPS5517759A (en) 1978-07-24 1978-07-24 Method of adhering diaphragm by use of pressure

Country Status (1)

Country Link
JP (1) JPS5517759A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57200779A (en) * 1981-06-02 1982-12-09 Honda Motor Co Ltd Pressure sensitive valve
JPS61127983A (ja) * 1984-11-27 1986-06-16 Esutetsuku:Kk 流体制御用バルブ
JP4587419B2 (ja) * 2000-11-16 2010-11-24 株式会社フジキン メタルダイヤフラム弁
DE102005054593B4 (de) * 2005-11-14 2018-04-26 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Messonde zur Messung der Dicke dünner Schichten
EP2947357B1 (en) 2013-01-16 2018-03-07 Eagle Industry Co., Ltd. Sliding part

Also Published As

Publication number Publication date
JPS5517759A (en) 1980-02-07

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