JPS6147011B2 - - Google Patents
Info
- Publication number
- JPS6147011B2 JPS6147011B2 JP59248154A JP24815484A JPS6147011B2 JP S6147011 B2 JPS6147011 B2 JP S6147011B2 JP 59248154 A JP59248154 A JP 59248154A JP 24815484 A JP24815484 A JP 24815484A JP S6147011 B2 JPS6147011 B2 JP S6147011B2
- Authority
- JP
- Japan
- Prior art keywords
- surface acoustic
- acoustic wave
- reflector
- present
- wave resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 55
- 229910052782 aluminium Inorganic materials 0.000 claims description 34
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 12
- 239000010703 silicon Substances 0.000 claims description 12
- 239000012535 impurity Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 3
- 230000001902 propagating effect Effects 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 230000006866 deterioration Effects 0.000 description 13
- 230000005284 excitation Effects 0.000 description 12
- 230000007423 decrease Effects 0.000 description 9
- 238000001000 micrograph Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24815484A JPS60143016A (ja) | 1984-11-26 | 1984-11-26 | 弾性表面波共振子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24815484A JPS60143016A (ja) | 1984-11-26 | 1984-11-26 | 弾性表面波共振子 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17715980A Division JPS57101413A (en) | 1980-12-17 | 1980-12-17 | Surface acoustic wave resonator |
Related Child Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7008789A Division JPH02131609A (ja) | 1989-03-22 | 1989-03-22 | 弾性表面波発振器 |
| JP7008889A Division JPH02131607A (ja) | 1989-03-22 | 1989-03-22 | 弾性表面波共振子の製造方法 |
| JP7008689A Division JPH02131608A (ja) | 1989-03-22 | 1989-03-22 | 弾性表面波共振子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60143016A JPS60143016A (ja) | 1985-07-29 |
| JPS6147011B2 true JPS6147011B2 (enrdf_load_stackoverflow) | 1986-10-17 |
Family
ID=17174020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24815484A Granted JPS60143016A (ja) | 1984-11-26 | 1984-11-26 | 弾性表面波共振子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60143016A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02131607A (ja) * | 1989-03-22 | 1990-05-21 | Toshiba Corp | 弾性表面波共振子の製造方法 |
-
1984
- 1984-11-26 JP JP24815484A patent/JPS60143016A/ja active Granted
Non-Patent Citations (2)
| Title |
|---|
| PROCEEDIGS OF THE 30TH ANUAL SYMPOSIUM ON FREQUENCY CONTROL=1976 * |
| THIN SOLID FILMS=1979 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60143016A (ja) | 1985-07-29 |
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