JPS57101413A - Surface acoustic wave resonator - Google Patents

Surface acoustic wave resonator

Info

Publication number
JPS57101413A
JPS57101413A JP17715980A JP17715980A JPS57101413A JP S57101413 A JPS57101413 A JP S57101413A JP 17715980 A JP17715980 A JP 17715980A JP 17715980 A JP17715980 A JP 17715980A JP S57101413 A JPS57101413 A JP S57101413A
Authority
JP
Japan
Prior art keywords
impurity
grating
deterioration
acoustic wave
surface acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17715980A
Other languages
Japanese (ja)
Other versions
JPS6147010B2 (en
Inventor
Yasuo Ehata
Shigefumi Morishita
Koji Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP17715980A priority Critical patent/JPS57101413A/en
Publication of JPS57101413A publication Critical patent/JPS57101413A/en
Publication of JPS6147010B2 publication Critical patent/JPS6147010B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H03H9/02685—Grating lines having particular arrangements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To decrease secular change of resonance frequency, by forming a grating reflector with aluminum containing copper or silicon. CONSTITUTION:In surface acoustic wave resonator providing an interdigital electrode 32 and grating refectors 33, 34 on a piezoelectric substrate 31, the grating reflectors 33, 34 are formed with alminum containing several percentage of copper or silicon (practically <=10%) as impurity. Thus, the deterioration of reflectors can be less and the secular change of the resonance frequency can be prevented. As reasons that the deterioration of aluminum containing impurity is less, impurity is separated to crystal grain of the aluminum and boundary is formed by taking this as a core, allowing to prevent the deterioration due to fatigue of metal.
JP17715980A 1980-12-17 1980-12-17 Surface acoustic wave resonator Granted JPS57101413A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17715980A JPS57101413A (en) 1980-12-17 1980-12-17 Surface acoustic wave resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17715980A JPS57101413A (en) 1980-12-17 1980-12-17 Surface acoustic wave resonator

Related Child Applications (4)

Application Number Title Priority Date Filing Date
JP24815484A Division JPS60143016A (en) 1984-11-26 1984-11-26 Surface acoustic wave resonator
JP1070090A Division JPH02153612A (en) 1989-03-22 1989-03-22 Surface acoustic wave oscillator
JP7009189A Division JPH02153613A (en) 1989-03-22 1989-03-22 Manufacture of surface acoustic wave resonator
JP7008989A Division JPH02203609A (en) 1989-03-22 1989-03-22 Surface acoustic wave resonator

Publications (2)

Publication Number Publication Date
JPS57101413A true JPS57101413A (en) 1982-06-24
JPS6147010B2 JPS6147010B2 (en) 1986-10-17

Family

ID=16026204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17715980A Granted JPS57101413A (en) 1980-12-17 1980-12-17 Surface acoustic wave resonator

Country Status (1)

Country Link
JP (1) JPS57101413A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6480113A (en) * 1987-09-22 1989-03-27 Hitachi Ltd Surface acoustic wave device
JPH02153613A (en) * 1989-03-22 1990-06-13 Toshiba Corp Manufacture of surface acoustic wave resonator
JPH02203609A (en) * 1989-03-22 1990-08-13 Toshiba Corp Surface acoustic wave resonator
US6965190B2 (en) 2001-09-12 2005-11-15 Sanyo Electric Co., Ltd. Surface acoustic wave device
WO2016017730A1 (en) * 2014-07-30 2016-02-04 京セラ株式会社 Elastic wave element, filter element, and communication device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI325687B (en) 2006-02-23 2010-06-01 Murata Manufacturing Co Boundary acoustic wave device and method for producing the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51244A (en) * 1974-05-20 1976-01-05 Texas Instruments Inc

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51244A (en) * 1974-05-20 1976-01-05 Texas Instruments Inc

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6480113A (en) * 1987-09-22 1989-03-27 Hitachi Ltd Surface acoustic wave device
US4906885A (en) * 1987-09-22 1990-03-06 Hitachi Denshi Kabushiki Kaisha Electrode material for surface acoustic wave devices and surface acoustic wave device using the same
JPH02153613A (en) * 1989-03-22 1990-06-13 Toshiba Corp Manufacture of surface acoustic wave resonator
JPH02203609A (en) * 1989-03-22 1990-08-13 Toshiba Corp Surface acoustic wave resonator
US6965190B2 (en) 2001-09-12 2005-11-15 Sanyo Electric Co., Ltd. Surface acoustic wave device
WO2016017730A1 (en) * 2014-07-30 2016-02-04 京セラ株式会社 Elastic wave element, filter element, and communication device
JPWO2016017730A1 (en) * 2014-07-30 2017-04-27 京セラ株式会社 Elastic wave element, filter element, and communication apparatus
US10333487B2 (en) 2014-07-30 2019-06-25 Kyocera Corporation Acoustic wave element, filter element, and communication device

Also Published As

Publication number Publication date
JPS6147010B2 (en) 1986-10-17

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