JPS6146969B2 - - Google Patents
Info
- Publication number
- JPS6146969B2 JPS6146969B2 JP52099702A JP9970277A JPS6146969B2 JP S6146969 B2 JPS6146969 B2 JP S6146969B2 JP 52099702 A JP52099702 A JP 52099702A JP 9970277 A JP9970277 A JP 9970277A JP S6146969 B2 JPS6146969 B2 JP S6146969B2
- Authority
- JP
- Japan
- Prior art keywords
- ring
- lid
- plastic film
- storage
- case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002985 plastic film Substances 0.000 claims description 15
- 229920006255 plastic film Polymers 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 description 23
- 238000003860 storage Methods 0.000 description 15
- 230000003749 cleanliness Effects 0.000 description 5
- 229920003023 plastic Polymers 0.000 description 5
- 239000004033 plastic Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000002390 adhesive tape Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229920000298 Cellophane Polymers 0.000 description 1
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67356—Closed carriers specially adapted for containing chips, dies or ICs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67366—Closed carriers characterised by materials, roughness, coatings or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9970277A JPS5432967A (en) | 1977-08-19 | 1977-08-19 | Installing method for semiconductor element |
US05/934,529 US4200191A (en) | 1977-08-19 | 1978-08-17 | Container for storage or transportation of semiconductor chips |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9970277A JPS5432967A (en) | 1977-08-19 | 1977-08-19 | Installing method for semiconductor element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5432967A JPS5432967A (en) | 1979-03-10 |
JPS6146969B2 true JPS6146969B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-10-16 |
Family
ID=14254381
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9970277A Granted JPS5432967A (en) | 1977-08-19 | 1977-08-19 | Installing method for semiconductor element |
Country Status (2)
Country | Link |
---|---|
US (1) | US4200191A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
JP (1) | JPS5432967A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4326583A (en) * | 1980-01-21 | 1982-04-27 | Thermatool Corporation | Heat exchanger panels |
US4767003A (en) * | 1985-10-18 | 1988-08-30 | Hughes Aircraft Company | Transparent, electrostatic protective container with readily accessible identification means |
US4681221A (en) * | 1986-10-30 | 1987-07-21 | International Business Machines Corporation | Holder for plastic leaded chip carrier |
US5101975A (en) * | 1990-10-31 | 1992-04-07 | Novapak, Inc. | Electronic component carrier |
US5046610A (en) * | 1990-01-29 | 1991-09-10 | Christianson Systems, Inc. | Electronic component carrier |
JPH05160242A (ja) * | 1991-12-02 | 1993-06-25 | Tadahiro Omi | 高清浄試料運搬装置及び試料運搬方法 |
US5310076A (en) * | 1992-10-19 | 1994-05-10 | Arrow Electronics, Inc. | Snap-on lid for computer chip tray |
US5440632A (en) * | 1992-12-02 | 1995-08-08 | Scientific-Atlanta, Inc. | Reprogrammable subscriber terminal |
US5833073A (en) * | 1997-06-02 | 1998-11-10 | Fluoroware, Inc. | Tacky film frame for electronic device |
JP2005123292A (ja) * | 2003-10-15 | 2005-05-12 | Canon Inc | 収納装置、当該収納装置を用いた露光方法 |
WO2014190012A1 (en) | 2013-05-22 | 2014-11-27 | Ultra-Mek, Inc. | Seating unit convertible to bed |
JP6310803B2 (ja) * | 2014-07-29 | 2018-04-11 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3615006A (en) * | 1969-06-26 | 1971-10-26 | Ibm | Storage container |
US3719273A (en) * | 1971-01-11 | 1973-03-06 | Chisso Corp | Packing vessel for thin sheet materials |
IL47235A (en) * | 1975-05-05 | 1978-03-10 | Arie Solomon | Long term storage apparatus |
US4091919A (en) * | 1976-09-07 | 1978-05-30 | Monsanto | Wafer packaging system |
-
1977
- 1977-08-19 JP JP9970277A patent/JPS5432967A/ja active Granted
-
1978
- 1978-08-17 US US05/934,529 patent/US4200191A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS5432967A (en) | 1979-03-10 |
US4200191A (en) | 1980-04-29 |
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