JPS6145902A - タツチ信号プロ−ブ - Google Patents

Info

Publication number

JPS6145902A

JPS6145902A JP16866884A JP16866884A JPS6145902A JP S6145902 A JPS6145902 A JP S6145902A JP 16866884 A JP16866884 A JP 16866884A JP 16866884 A JP16866884 A JP 16866884A JP S6145902 A JPS6145902 A JP S6145902A

Authority

JP

Japan

Prior art keywords

probe

stylus

force

base

piezoelectric elements

Prior art date

1984-08-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

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Cited By (1)