JPS6145392B2 - - Google Patents

Info

Publication number
JPS6145392B2
JPS6145392B2 JP54170010A JP17001079A JPS6145392B2 JP S6145392 B2 JPS6145392 B2 JP S6145392B2 JP 54170010 A JP54170010 A JP 54170010A JP 17001079 A JP17001079 A JP 17001079A JP S6145392 B2 JPS6145392 B2 JP S6145392B2
Authority
JP
Japan
Prior art keywords
region
film
polycrystalline silicon
silicon film
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54170010A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5693315A (en
Inventor
Tadashi Kirisako
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17001079A priority Critical patent/JPS5693315A/ja
Publication of JPS5693315A publication Critical patent/JPS5693315A/ja
Publication of JPS6145392B2 publication Critical patent/JPS6145392B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
JP17001079A 1979-12-26 1979-12-26 Manufacture of semiconductor device Granted JPS5693315A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17001079A JPS5693315A (en) 1979-12-26 1979-12-26 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17001079A JPS5693315A (en) 1979-12-26 1979-12-26 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5693315A JPS5693315A (en) 1981-07-28
JPS6145392B2 true JPS6145392B2 (enrdf_load_stackoverflow) 1986-10-07

Family

ID=15896908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17001079A Granted JPS5693315A (en) 1979-12-26 1979-12-26 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5693315A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4648909A (en) * 1984-11-28 1987-03-10 Fairchild Semiconductor Corporation Fabrication process employing special masks for the manufacture of high speed bipolar analog integrated circuits

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5627965A (en) * 1979-08-15 1981-03-18 Nec Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5693315A (en) 1981-07-28

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