JPS614528A - Manufacturing apparatus of high-purity solution of water-soluble gas - Google Patents

Abstract

PURPOSE:To obtain a high-purity aq. soln. and to make the manufacture of the soln. having required concn. easy in case of dissolving the water soluble gas of raw material into raw water via a hydrophobic porous membrane by making the pressure of raw water equal to or higher than the pressure of the water soluble gas. CONSTITUTION:Gaseous ammonia is reduced to the suitable pressure out of a gas bomb and fed to the inside of a hydrophobic porous membrane 2 through an inlet port 3 in the state wherein the flow rate is regulated with a flow rate regulating valve or the like. On one hand, since the pressure of ultrapure water fed from an inlet 1a of a vessel 1 is equal to ore higher than the pressure of gaseous ammonia, the fed gaseous ammonia is flowed toward an outlet part 4 thrugh the path of the inside of the membrane 2. At this time, ammonia is dissolved into the ultrapure water which is impregnated through the membrane 2 to enter the inside thereof and all the ammonia is almost dissolved in water by selecting suitably the flow rate of gaseous ammonia and the area of the membrane 2.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an apparatus for producing a high purity solution of water bath gas used for producing solutions of high purity chemicals, reagents, etc. that can be used, for example, in the production of semiconductors. It is related to.

BACKGROUND ART Conventionally, when producing high-purity ammonia water used in semiconductor manufacturing technology, for example, a method has been used in which ammonia gas is blown into ultrapure water. However, with this method, there is a problem that impurities and particulates in the gas get mixed into the solution, and with the method of blowing the raw material gas into ultrapure water, it is difficult to easily and accurately adjust the concentration. there were.

Therefore, in the present invention, instead of blowing the raw material gas into ultrapure water, the raw water is dissolved in the raw water through a hydrophobic porous membrane, which solves the problem of contamination of impurities and fine particles in the gas and the concentration of the solution to be produced. The aim is to solve the problem of easy and accurate adjustment of

Means for Solving the Problems In order to achieve the above-mentioned object, according to the invention, a hydrophobic porous membrane is placed in a container provided with an inlet for raw water for making the required solution and an outlet for the solution. A water-soluble gas high-temperature filter is provided so that the pressure of the raw water is equal to or higher than the pressure of the water bathing gas of the raw material when the water-soluble gas of the raw material is dissolved in the raw water through this hydrophobic porous membrane. An apparatus for producing a purity solution is provided.

The raw material gas may be any gas that dissolves in water; examples include inorganic substances such as hydrogen chloride and hydrogen fluoride, organic acids such as formic acid and acetic acid, organic solvents such as alcohol, chlorine gas, and amines. I can do it.

Function: In the device of the present invention configured as described above, the raw material gas is dissolved in the raw water through the hydrophobic porous membrane, so that even if there are impurity gases or fine particles in the raw water, they will not be mixed into the raw water. There is no. Further, the solution concentration can be easily changed arbitrarily by adjusting the supply flow rate of the raw material gas.

Embodiment Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

The drawing schematically shows the configuration of an apparatus according to an embodiment of the present invention, where l is a container equipped with an inlet /a for raw water (for example, ultrapure water) and an outlet /b for the produced solution; A hollow hydrophobic porous membrane is arranged approximately on the central axis along the longitudinal direction of the container L, and a raw material gas inlet 3 is attached to one end of the membrane, and an impurity outlet ≠ is attached to the other end. . The raw material gas inlet 3 is connected to a raw material gas supply source (not shown) via a suitable flow rate regulating means (not shown). As the hollow hydrophobic porous membrane, for example, a hollow fiber type membrane member can preferably be used.

In the operation of the device configured as described above, when producing high-purity ammonia water using ultrapure water and ammonia gas, the ammonia gas is produced by reducing the appropriate pressure in the gas tank, and then using the flow rate regulating valve. The water is supplied into the hydrophobic porous membrane λ through the inlet portion 3 in a state where the flow rate is adjusted by the above methods. On the other hand, since the pressure of the ultrapure water supplied from the inlet/a of the container l is equal to or higher than the pressure of the ammonia gas, the supplied ammonia gas substantially passes through the passage within the membrane λ. Flows toward the outlet ≠. Ammonia gas dissolves in the ultrapure water that permeates through the membrane remover and enters the interior. In this case, by appropriately selecting the flow rate of ammonia gas and the area of the permeable membrane, almost all of the ammonia is dissolved into water, and only a small amount comes out from the impurity outlet.

The table below shows examples of ammonia gas and ultrapure water flow rates and ammonia water concentrations.

Note that the illustrated embodiments are merely for illustration purposes, and the shape 2 and configuration of the container to which ultrapure water is supplied and the permeable membrane inserted therein may be variously modified or changed as necessary. can do.

Effects As explained above, according to the present invention, the raw material gas is dissolved in the raw water through the hydrophobic porous membrane without blowing the raw material gas into the raw water. Even if the gas contains impurities or fine particles, they will not be mixed into the solution, and even if impurity gas is contained, it will not dissolve in the water and will not remain as bubbles.
Therefore, a highly purified water bath liquid can be obtained. Furthermore, a solution with a desired concentration can be easily prepared by adjusting the flow rate of the raw material gas.

[Brief explanation of the drawing]

The drawing is a partial sectional view showing an embodiment of the present invention. In the figure, l: container, la: inlet of raw water, lb: outlet of both liquids, 2: hydrophobic porous membrane.

Claims (1)

[Claims] A hydrophobic porous membrane is provided in a container equipped with an inlet for raw water and an outlet for the solution to create the required solution, and when the water-soluble gas as the raw material is dissolved in the raw water through this hydrophobic porous membrane. 1. An apparatus for producing a high-purity solution of a water-soluble gas, characterized in that the pressure of raw water is equal to or higher than the pressure of the water-soluble gas supplied as a raw material.