JPH0631272A - Film treatment device - Google Patents
Film treatment deviceInfo
- Publication number
- JPH0631272A JPH0631272A JP4189430A JP18943092A JPH0631272A JP H0631272 A JPH0631272 A JP H0631272A JP 4189430 A JP4189430 A JP 4189430A JP 18943092 A JP18943092 A JP 18943092A JP H0631272 A JPH0631272 A JP H0631272A
- Authority
- JP
- Japan
- Prior art keywords
- water
- quality
- permeated water
- permeated
- reverse osmosis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、電子工業における半導
体洗浄等に使用される、安定した水質の高純度水を製造
するための膜処理装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a membrane treatment apparatus for producing highly pure water of stable water quality, which is used for cleaning semiconductors in the electronics industry.
【０００２】[0002]
【従来の技術】純水、超純水等と呼ばれる所謂高純度水
は、半導体洗浄や製薬用等に利用される。この高純度水
を製造するための装置として、第１の逆浸透膜装置（以
下「ＲＯ装置」という）の透過水を、更に第２のＲＯ装
置により処理して、第２のＲＯ装置の透過水が高純度水
となるようにした、所謂２段ＲＯ装置式の膜処理装置は
公知である。2. Description of the Related Art So-called high-purity water called pure water or ultrapure water is used for cleaning semiconductors and pharmaceuticals. As a device for producing this high-purity water, the permeated water of the first reverse osmosis membrane device (hereinafter referred to as “RO device”) is further processed by the second RO device, and permeated by the second RO device. A so-called two-stage RO device type membrane treatment device in which water is made into high-purity water is known.
【０００３】上記のような膜処理装置において、第１の
ＲＯ装置の給水のｐＨ調整が行われていた。その理由
は、例えば被処理水中のＣＯ2 は、特別の手段を講じな
い限りＲＯ膜を透過してしまい、除去することができな
いので、それを防ぐために、第１のＲＯ装置の給水のｐ
Ｈを高くすることにより、ＣＯ2 を炭酸水素イオン等の
イオンに変化させてＲＯ装置により除去可能としなけれ
ばならないからである。このようなｐＨ調整に際し、従
来は、第１のＲＯ装置の給水のｐＨを測定し、その測定
結果に応じて苛性ソーダ等のｐＨ調整薬を該給水に薬注
し、該給水のｐＨをＣＯ2 の除去に好適な一定値に維持
していた。In the above-mentioned membrane treatment apparatus, the pH of the feed water of the first RO apparatus has been adjusted. The reason is that, for example, CO 2 in the water to be treated permeates the RO membrane and cannot be removed unless special measures are taken.
This is because by increasing H, it is necessary to change CO 2 into ions such as hydrogencarbonate ions so that the CO 2 can be removed by the RO device. In such pH adjustment, conventionally, the pH of the feed water of the first RO device is measured, and a pH adjusting agent such as caustic soda is dosed to the feed water according to the measurement result, and the pH of the feed water is adjusted to CO 2 Was maintained at a constant value suitable for removal of
【０００４】従来は、上記のように、第１のＲＯ装置の
給水のｐＨを所定値に維持することにより、第２のＲＯ
装置から得られる透過水は、高純度水としての十分な品
質を備えるものと考えられていた。ところが、第１及び
第２のＲＯ装置を有する実際の膜処理装置において、上
記のようなｐＨ調整を行っていた所、ＣＯ2 が十分に除
去されず、第２のＲＯ装置の透過水に品質の低下が見ら
れることがあった。これを更に図５，６を参照して説明
すると、従来装置では、図５に示すように、第１のＲＯ
装置の給水のｐＨを測定しながら薬注して、第１のＲＯ
装置の給水のｐＨを一定値に維持しても、第１のＲＯ装
置の透過水のｐＨに変化が見られ、第２のＲＯ装置の透
過水の水質等の低下が見られた。Conventionally, as described above, by maintaining the pH of the feed water of the first RO device at a predetermined value, the second RO device
The permeated water obtained from the device was considered to have sufficient quality as high-purity water. However, in the actual membrane treatment device having the first and second RO devices, when the pH was adjusted as described above, CO 2 was not sufficiently removed and the quality of the permeated water of the second RO device was improved. There was a case that the decrease of. This will be further described with reference to FIGS. 5 and 6. In the conventional device, as shown in FIG.
Dosing the first RO while measuring the pH of the water supply of the device
Even when the pH of the water supplied to the apparatus was maintained at a constant value, the pH of the permeated water of the first RO apparatus changed, and the quality of the permeated water of the second RO apparatus decreased.
【０００５】第１のＲＯ装置給水のｐＨを一定値に維持
すれば、所定量のＣＯ2 が除去され、第２のＲＯ装置か
らは一定品質の透過水が得られるであろうと予測する、
従来の技術常識からは、上記のような現象は理解困難で
あった。そこで本発明者らは、上記現象について鋭意研
究した結果、第２のＲＯ装置の透過水水質の変動は第１
のＲＯ装置透過水ｐＨ変動の影響を受けていることが判
明した。Predicting that if the pH of the water supply of the first RO device is maintained at a constant value, a certain amount of CO 2 will be removed and a permeate of constant quality will be obtained from the second RO device.
From the conventional common technical knowledge, it is difficult to understand the above phenomenon. Therefore, as a result of diligent research on the above phenomenon, the present inventors have found that the permeated water quality of the second RO device fluctuates to the first level.
It was found to be affected by the fluctuations in the pH of the RO device permeate water.
【０００６】[0006]
【発明が解決しようとする課題】本発明は、ＲＯ装置を
２段に用いた従来の膜処理装置において、第２ＲＯ装置
からの透過水の品質の不安定の問題を、前記知見により
解決し、品位の安定した高純度水を製造し得る膜処理装
置を提供することを目的とする。SUMMARY OF THE INVENTION The present invention solves the problem of unstable quality of permeated water from the second RO device in the conventional membrane treatment device using the RO device in two stages by the above findings, An object of the present invention is to provide a membrane treatment apparatus capable of producing high-purity water with stable quality.
【０００７】[0007]
【課題を解決するための手段】本発明による課題を解決
するための手段は、特許請求の範囲の請求項に記載のと
おりである。そしてその作用は次のとおりである。第１
のＲＯ装置及び第２のＲＯ装置を有する膜処理装置にお
いて、第１のＲＯ装置の給水側のｐＨ調整を、第１のＲ
Ｏ装置の透過水または第２のＲＯ装置の濃縮水のｐＨの
測定結果に基づいて行い、第１のＲＯ装置の透過水のｐ
Ｈを一定値に維持することにより、第２のＲＯ装置によ
り所定量の不純物を除去し、第２のＲＯ装置の透過水の
品質を一定にする。Means for solving the problems according to the present invention are as set forth in the claims of the claims. And its action is as follows. First
In the membrane treatment device having the RO device and the second RO device, the pH adjustment on the water supply side of the first RO device is performed by the first R device.
Based on the measurement result of the pH of the permeated water of the O device or the concentrated water of the second RO device, p
By maintaining H at a constant value, a predetermined amount of impurities are removed by the second RO device, and the quality of the permeate of the second RO device is made constant.
【０００８】[0008]
【実施例】以下本発明の一実施例について、図１を参照
して説明する。図１において、原水１は前処理装置２に
給水される。前処理装置２は、凝集沈殿・濾過、凝集濾
過、砂濾過、ＭＦ処理、ＵＦ処理、活性炭処理、加圧浮
上等の公知手段の１つ又はそれ以上の組合せにより構成
される。前処理装置２による処理水２．１は、ｐＨ調節
のために酸を添加後（図示せず）、脱炭酸塔３で炭酸を
低減され、次いで第１のＲＯ装置４に給水される。該給
水３．１は、第１のＲＯ装置において、透過水４．１と
濃縮水４．２とに分離される。第１のＲＯ装置からの透
過水４．１は、次いで第２のＲＯ装置５に供給され、該
第２のＲＯ装置５において、透過水５．１と濃縮水５．
２とに分離される。濃縮水５．２は脱炭酸塔３の前段に
適宜還流される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG. In FIG. 1, raw water 1 is supplied to a pretreatment device 2. The pretreatment device 2 is configured by one or more combinations of known means such as coagulation sedimentation / filtration, coagulation filtration, sand filtration, MF treatment, UF treatment, activated carbon treatment, and pressure floating. The treated water 2.1 from the pretreatment device 2 is added with an acid for pH adjustment (not shown), the carbonation is reduced in the decarbonation tower 3, and then the water is supplied to the first RO device 4. The water supply 3.1 is separated into permeated water 4.1 and concentrated water 4.2 in the first RO device. The permeated water 4.1 from the first RO device is then supplied to the second RO device 5, and in the second RO device 5, the permeated water 5.1 and the concentrated water 5.1.
It is separated into two. The concentrated water 5.2 is appropriately refluxed to the front stage of the decarbonation tower 3.
【０００９】給水３．１は第１のＲＯ装置４に供給され
る際に、次のようにｐＨ調整がなされる。第１のＲＯ装
置４の透過水４．１のｐＨは、第１のｐＨ測定機６．１
により測定され、その測定値に基づく信号は、薬注制御
装置６に送信される。薬注制御装置６においては、ｐＨ
測定機６．１からの信号即ちｐＨ測定値により透過水
４．１のｐＨ値を一定に維持する制御信号が出力され、
該制御信号は、薬注ポンプ７に入力される。該制御信号
により薬注ポンプ７は制御され、薬液タンク７．２内の
薬液７．１が、薬注ポンプ７により給水３．１に供給さ
れる。薬液７．１は、給水３．１のｐＨを調整する液で
あり、例えば苛性ソーダ等のアルカリ液が用いられる。When the water supply 3.1 is supplied to the first RO device 4, the pH is adjusted as follows. The pH of the permeated water 4.1 of the first RO device 4 is the first pH measuring device 6.1.
The signal based on the measured value is transmitted to the medicine injection control device 6. In the chemical injection control device 6, the pH
A signal from the measuring device 6.1, that is, a control signal for maintaining the pH value of the permeated water 4.1 constant according to the pH measurement value is output,
The control signal is input to the chemical injection pump 7. The chemical injection pump 7 is controlled by the control signal, and the chemical solution 7.1 in the chemical solution tank 7.2 is supplied to the water supply 3.1 by the chemical injection pump 7. The chemical solution 7.1 is a solution for adjusting the pH of the feed water 3.1, and for example, an alkaline solution such as caustic soda is used.
【００１０】アルカリ液が加えらられた給水３．１は、
必要に応じ第２の測定機６．２により測定され、その測
定値は電気信号として制御装置６に送信される。測定機
６．２により測定されたｐＨが、制御装置６において、
ｐＨの上限設定値に一致又はこれを超えたと判断された
時は、該制御装置６から制御信号が出力され、該信号に
より、薬注ポンプ７は停止され、給水３．１へのｐＨ調
整薬の薬注量の増加が停止される。また該制御信号によ
り、必要に応じ警報装置（図示せず）が作動される。The water supply 3.1 to which the alkaline liquid is added is
If necessary, it is measured by the second measuring device 6.2, and the measured value is transmitted to the control device 6 as an electric signal. In the control device 6, the pH measured by the measuring device 6.2 is
When it is determined that the pH value is equal to or exceeds the upper limit set value, a control signal is output from the control device 6, the drug injection pump 7 is stopped by the signal, and the pH adjusting agent for the water supply 3.1 is supplied. The increase in the dosing volume is stopped. The control signal also activates an alarm device (not shown) as needed.
【００１１】第２の測定器６．２は必ずしも設ける必要
がないが、これを設置することにより、上述した制御も
可能となるので、ＲＯ膜の炭酸カルシウムによる汚染を
防止する意味から設けることが望ましい。The second measuring device 6.2 does not necessarily have to be provided, but by installing it, the above-mentioned control can be performed. Therefore, the second measuring device 6.2 is provided for the purpose of preventing contamination of the RO film with calcium carbonate. desirable.
【００１２】図２は本発明の第２の実施例を示す。前記
実施例においては、薬注ポンプ７を制御するためのｐＨ
測定値を、第１のＲＯ装置の透過水４．１に求めたが、
本実施例においては、当該測定値を第２のＲＯ装置の濃
縮水５．２に求める。即ち、第１の測定機６．１によ
り、第２のＲＯ装置の濃縮水５．２のｐＨが測定され、
その測定値に応じた信号が測定機６．１から制御装置６
に送信され、該信号に応じて、前記実施例同様に、薬注
ポンプ７は制御装置６により制御されて、所定量の薬注
がなされる。本実施例におけるその他の構成は、第１実
施例と同様である。本実施例によれば、第１のＲＯ装置
の透過水４．１のｐＨ値と第２のＲＯ装置の濃縮水のそ
れとの相関関係を利用して、透過水４．１のｐＨが間接
的に測定されることになる。本実施例の利点の１つは、
透過水４．１系の圧力より濃縮水５．２系の圧力がかな
り低いので、濃縮水５．２系に設ける測定機６．１の耐
圧強度を低減できることである。FIG. 2 shows a second embodiment of the present invention. In the above embodiment, the pH for controlling the chemical injection pump 7
The measured value was obtained for the permeated water 4.1 of the first RO device,
In this embodiment, the measured value is obtained for the concentrated water 5.2 of the second RO device. That is, the pH of the concentrated water 5.2 of the second RO device is measured by the first measuring device 6.1,
A signal corresponding to the measured value is sent from the measuring device 6.1 to the control device 6
Then, in response to the signal, the chemical injection pump 7 is controlled by the control device 6 to dispense a predetermined amount of chemical, as in the above-described embodiment. Other configurations in this embodiment are similar to those in the first embodiment. According to this embodiment, the pH of the permeated water 4.1 is indirectly determined by utilizing the correlation between the pH value of the permeated water 4.1 of the first RO apparatus and that of the concentrated water of the second RO apparatus. Will be measured. One of the advantages of this embodiment is that
Since the pressure of the concentrated water 5.2 system is considerably lower than the pressure of the permeated water 4.1 system, it is possible to reduce the compressive strength of the measuring device 6.1 provided in the concentrated water 5.2 system.
【００１３】なお、第２の測定器６．２の設置に関して
は、前記実施例と同じである。The installation of the second measuring device 6.2 is the same as in the above embodiment.
【００１４】[0014]
【試験例】図１の実施例装置において、第１のＲＯ装置
に東レ製ＳＵ−７１０、第２のＲＯ装置に東レ製ＳＵ−
９１０を用いて実験を行った。その結果を図３．４に示
す。これらの図に示す結果と、前述の従来例の図５．６
のそれとを比較した場合、本実施例において、第１のＲ
Ｏ装置の透過水３．１のｐＨが略一定に維持され、また
第２のＲＯ装置の透過水５．１の抵抗率は略一定の値に
維持され、透過水の品質が安定していることが明らかで
ある。[Test Example] In the apparatus of the embodiment shown in FIG. 1, Toray SU-710 is used as the first RO apparatus and Toray SU- is used as the second RO apparatus.
Experiments were conducted using 910. The results are shown in Figure 3.4. The results shown in these figures and FIG.
When compared with that of the first R
The pH of the permeated water 3.1 of the O device is maintained substantially constant, and the resistivity of the permeated water 5.1 of the second RO device is maintained at a substantially constant value, so that the quality of the permeated water is stable. It is clear.
【００１５】また第１のＲＯ装置および第２のＲＯ装置
共に東レ製ＳＵ−７１０を用いても、第２のＲＯ装置透
過水の抵抗率は、５ＭΩ・ｃｍと図４に示す値より多少
低かったものの、やはりその値は略一定であった。Even if Toray SU-710 manufactured by Toray is used for both the first RO device and the second RO device, the resistivity of the second RO device permeated water is 5 MΩ · cm, which is slightly lower than the value shown in FIG. However, after all, the value was almost constant.
【００１６】本発明の実施例による第２のＲＯ装置透過
水の品質安定の理由は、従来方法では第１のＲＯ装置の
給水３．１のｐＨを測定して制御していたため、透過水
４．１にＣＯ2 が残留しやすく、これが第１のＲＯ装置
を透過して、第１のＲＯ装置透過水（透過水４．１に相
当）のｐＨが低下してしまい、第２のＲＯ装置透過水
（透過水５．１に相当）の水質が低下してしまうのに対
し、本実施例においては、直接第１のＲＯ装置透過水
４．１のｐＨで制御するので、その制御が正確となり透
過水４．１のｐＨが一定に保たれるため、透過水４．１
のＣＯ2 量を可及的に少なくすることができ、第２のＲ
Ｏ装置５の透過水５．１の水質が安定すると考えられ
る。The reason for stabilizing the quality of the second RO device permeated water according to the embodiment of the present invention is that the conventional method measures and controls the pH of the feed water 3.1 of the first RO device. CO 2 is likely to remain in the first RO device, and this permeates the first RO device, and the pH of the permeated water of the first RO device (corresponding to the permeated water 4.1) decreases, and the second RO device While the water quality of the permeated water (corresponding to the permeated water 5.1) is deteriorated, in the present embodiment, the pH is controlled directly by the pH of the first RO device permeated water 4.1, so the control is accurate. Since the pH of the permeated water 4.1 is kept constant, the permeated water 4.1
CO 2 content of the second R can be reduced as much as possible.
It is considered that the water quality of the permeated water 5.1 of the O device 5 is stable.
【００１７】第２実施例についても、第１実施例同様の
実験を行ったところ、略同様の結果が得られた。An experiment similar to that of the first embodiment was conducted for the second embodiment, and substantially the same result was obtained.
【００１８】[0018]
【発明の効果】以上説明したように、本発明によれば、
第１のＲＯ装置及び第２のＲＯ装置を２段に用いる膜処
理装置において、第１のＲＯ装置の透過水又は第２のＲ
Ｏ装置の濃縮水のｐＨを測定し、該測定値に基づいて薬
注を行うので、第１のＲＯ装置の透過水のｐＨを一定に
維持し、それによって第２のＲＯ装置の透過水即ち膜処
理装置による製造水の水質を安定させることができる。As described above, according to the present invention,
In the membrane treatment device using the first RO device and the second RO device in two stages, the permeated water of the first RO device or the second R device is used.
Since the pH of the concentrated water of the O device is measured, and the chemical injection is performed based on the measured value, the pH of the permeated water of the first RO device is maintained constant, whereby the permeated water of the second RO device, that is, The quality of water produced by the membrane treatment device can be stabilized.
【図１】本発明の第１実施例の膜処理装置の概要図。FIG. 1 is a schematic diagram of a film processing apparatus according to a first embodiment of the present invention.
【図２】本発明の第２実施例の膜処理装置の概要図。FIG. 2 is a schematic diagram of a film processing apparatus according to a second embodiment of the present invention.
【図３】本発明の実験における第１のＲＯ装置の実験結
果を示す図。FIG. 3 is a diagram showing an experimental result of the first RO device in the experiment of the present invention.
【図４】本発明の実験における第２のＲＯ装置の結果を
示す図。FIG. 4 is a diagram showing a result of the second RO device in the experiment of the present invention.
【図５】従来の第１のＲＯ装置の水質を示す図。FIG. 5 is a diagram showing the water quality of a conventional first RO device.
【図６】従来の第２のＲＯ装置の水質を示す図。FIG. 6 is a diagram showing the water quality of a second conventional RO device.
３．１…給水 ４…第１の逆浸透Ｒ
Ｏ装置 ５…第２の逆浸透ＲＯ装置 ４．１、５．１…透
過水 ４．２、５．２…濃縮水 ６…制御装置 ６．１、６．２…ｐＨ測定機 ７…薬注ポンプ ７．２…薬液タンク3.1 ... water supply 4 ... first reverse osmosis R
O device 5 ... 2nd reverse osmosis RO device 4.1, 5.1 ... Permeate water 4.2, 5.2 ... Concentrated water 6 ... Control device 6.1, 6.2 ... pH measuring device 7 ... Chemical injection Pump 7.2 ... Chemical solution tank
Claims (1)
の逆浸透膜装置の透過水を処理する第２の逆浸透膜装
置、及び第１の逆浸透膜装置の給水側にｐＨ調整薬を供
給する薬注手段を有する膜処理装置において、前記第１
の逆浸透膜装置の透過水又は前記第２の逆浸透膜装置の
濃縮水のｐＨを測定するｐＨ測定機及び該ｐＨ測定機に
よる測定値に基づいて前記薬注手段を制御する薬注制御
装置を設けたことを特徴とする膜処理装置。1. A first reverse osmosis membrane device for water treatment, a first
A reverse osmosis membrane device for treating permeated water of the reverse osmosis membrane device, and a membrane treatment device having a chemical injection means for supplying a pH adjusting agent to the water supply side of the first reverse osmosis membrane device, wherein
PH meter for measuring the pH of permeated water of the reverse osmosis membrane device or concentrated water of the second reverse osmosis membrane device, and a chemical injection control device for controlling the chemical injection means based on the measured value by the pH meter A film processing apparatus comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4189430A JPH0631272A (en) | 1992-07-16 | 1992-07-16 | Film treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4189430A JPH0631272A (en) | 1992-07-16 | 1992-07-16 | Film treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0631272A true JPH0631272A (en) | 1994-02-08 |
Family
ID=16241121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4189430A Pending JPH0631272A (en) | 1992-07-16 | 1992-07-16 | Film treatment device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0631272A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998039085A1 (en) * | 1997-03-03 | 1998-09-11 | Zenon Environmental, Inc. | High resistivity water production |
| US5833846A (en) * | 1996-01-17 | 1998-11-10 | Orango Corporation | High-purity water producing apparatus utilizing boron-selective ion exchange resin |
| US5923131A (en) * | 1996-03-21 | 1999-07-13 | Matsushita Electronics Corporation | Compensating device for raster distortion of CRT |
| JP2012183473A (en) * | 2011-03-04 | 2012-09-27 | Miura Co Ltd | Water treatment apparatus |
-
1992
- 1992-07-16 JP JP4189430A patent/JPH0631272A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5833846A (en) * | 1996-01-17 | 1998-11-10 | Orango Corporation | High-purity water producing apparatus utilizing boron-selective ion exchange resin |
| MY120689A (en) * | 1996-01-17 | 2005-11-30 | Organo Corp | High-purity water producing apparatus utilizing boron-selective ion exchange resin. |
| US5923131A (en) * | 1996-03-21 | 1999-07-13 | Matsushita Electronics Corporation | Compensating device for raster distortion of CRT |
| WO1998039085A1 (en) * | 1997-03-03 | 1998-09-11 | Zenon Environmental, Inc. | High resistivity water production |
| JP2012183473A (en) * | 2011-03-04 | 2012-09-27 | Miura Co Ltd | Water treatment apparatus |
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