JPS6144455Y2 - - Google Patents
Info
- Publication number
- JPS6144455Y2 JPS6144455Y2 JP2830279U JP2830279U JPS6144455Y2 JP S6144455 Y2 JPS6144455 Y2 JP S6144455Y2 JP 2830279 U JP2830279 U JP 2830279U JP 2830279 U JP2830279 U JP 2830279U JP S6144455 Y2 JPS6144455 Y2 JP S6144455Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- gate
- side wall
- extraction electrode
- effect transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 10
- 238000000605 extraction Methods 0.000 claims description 9
- 230000005669 field effect Effects 0.000 claims description 9
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 14
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 13
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 3
- 239000011651 chromium Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2830279U JPS6144455Y2 (enrdf_load_stackoverflow) | 1979-03-06 | 1979-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2830279U JPS6144455Y2 (enrdf_load_stackoverflow) | 1979-03-06 | 1979-03-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55129465U JPS55129465U (enrdf_load_stackoverflow) | 1980-09-12 |
| JPS6144455Y2 true JPS6144455Y2 (enrdf_load_stackoverflow) | 1986-12-15 |
Family
ID=28874021
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2830279U Expired JPS6144455Y2 (enrdf_load_stackoverflow) | 1979-03-06 | 1979-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6144455Y2 (enrdf_load_stackoverflow) |
-
1979
- 1979-03-06 JP JP2830279U patent/JPS6144455Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55129465U (enrdf_load_stackoverflow) | 1980-09-12 |
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