JPS6143298A - タ−ボ分子ポンプのガスパ−ジ機構 - Google Patents

タ−ボ分子ポンプのガスパ−ジ機構

Info

Publication number
JPS6143298A
JPS6143298A JP59164592A JP16459284A JPS6143298A JP S6143298 A JPS6143298 A JP S6143298A JP 59164592 A JP59164592 A JP 59164592A JP 16459284 A JP16459284 A JP 16459284A JP S6143298 A JPS6143298 A JP S6143298A
Authority
JP
Japan
Prior art keywords
gas
inner housing
discharge hole
housing
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59164592A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0457879B2 (enrdf_load_stackoverflow
Inventor
Shigeru Kaneto
金戸　成
Masashi Iguchi
昌司 井口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OSAKA SHINKU KIKI SEISAKUSHO KK
Original Assignee
OSAKA SHINKU KIKI SEISAKUSHO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OSAKA SHINKU KIKI SEISAKUSHO KK filed Critical OSAKA SHINKU KIKI SEISAKUSHO KK
Priority to JP59164592A priority Critical patent/JPS6143298A/ja
Publication of JPS6143298A publication Critical patent/JPS6143298A/ja
Publication of JPH0457879B2 publication Critical patent/JPH0457879B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP59164592A 1984-08-06 1984-08-06 タ−ボ分子ポンプのガスパ−ジ機構 Granted JPS6143298A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59164592A JPS6143298A (ja) 1984-08-06 1984-08-06 タ−ボ分子ポンプのガスパ−ジ機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59164592A JPS6143298A (ja) 1984-08-06 1984-08-06 タ−ボ分子ポンプのガスパ−ジ機構

Publications (2)

Publication Number Publication Date
JPS6143298A true JPS6143298A (ja) 1986-03-01
JPH0457879B2 JPH0457879B2 (enrdf_load_stackoverflow) 1992-09-14

Family

ID=15796108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59164592A Granted JPS6143298A (ja) 1984-08-06 1984-08-06 タ−ボ分子ポンプのガスパ−ジ機構

Country Status (1)

Country Link
JP (1) JPS6143298A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01174595U (enrdf_load_stackoverflow) * 1988-05-27 1989-12-12
US5374160A (en) * 1992-04-29 1994-12-20 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JPH0815839A (ja) * 1994-06-24 1996-01-19 Molnar Sa 写真処理装置
US5916832A (en) * 1997-10-14 1999-06-29 Asahi Glass Company Ltd. Hermetic sealing composition
JP2005248741A (ja) * 2004-03-02 2005-09-15 Tadahiro Omi 真空ポンプ
WO2021172144A1 (ja) * 2020-02-26 2021-09-02 エドワーズ株式会社 真空ポンプ、及び、真空ポンプ構成部品
EP3910200A4 (en) * 2019-01-10 2022-09-28 Edwards Japan Limited VACUUM PUMP
EP4123181A4 (en) * 2020-03-19 2024-04-17 Edwards Japan Limited VACUUM PUMP AND VACUUM PUMP ELEMENT

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3071384A (en) * 1960-04-07 1963-01-01 Alsacienne Constr Meca Sealing structure for rotary mechanism
DE2408256A1 (de) * 1974-02-21 1975-09-04 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
DE2526164A1 (de) * 1975-06-12 1976-12-30 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3071384A (en) * 1960-04-07 1963-01-01 Alsacienne Constr Meca Sealing structure for rotary mechanism
DE2408256A1 (de) * 1974-02-21 1975-09-04 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
DE2526164A1 (de) * 1975-06-12 1976-12-30 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01174595U (enrdf_load_stackoverflow) * 1988-05-27 1989-12-12
US5374160A (en) * 1992-04-29 1994-12-20 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JPH0815839A (ja) * 1994-06-24 1996-01-19 Molnar Sa 写真処理装置
US5916832A (en) * 1997-10-14 1999-06-29 Asahi Glass Company Ltd. Hermetic sealing composition
JP2005248741A (ja) * 2004-03-02 2005-09-15 Tadahiro Omi 真空ポンプ
WO2005085643A1 (ja) * 2004-03-02 2005-09-15 Tadahiro Ohmi 真空ポンプ
US7686600B2 (en) 2004-03-02 2010-03-30 Foundation For Advancement Of International Science Vaccum pump having shaft seal to prevent corrosion and to ensure smooth operation
EP3910200A4 (en) * 2019-01-10 2022-09-28 Edwards Japan Limited VACUUM PUMP
WO2021172144A1 (ja) * 2020-02-26 2021-09-02 エドワーズ株式会社 真空ポンプ、及び、真空ポンプ構成部品
JP2021134697A (ja) * 2020-02-26 2021-09-13 エドワーズ株式会社 真空ポンプ、及び、真空ポンプ構成部品
EP4123181A4 (en) * 2020-03-19 2024-04-17 Edwards Japan Limited VACUUM PUMP AND VACUUM PUMP ELEMENT

Also Published As

Publication number Publication date
JPH0457879B2 (enrdf_load_stackoverflow) 1992-09-14

Similar Documents

Publication Publication Date Title
EP0228040B1 (en) Vacuum pump
US20220235772A1 (en) Vacuum pumping system having an oil-lubricated vacuum pump
JPS6143298A (ja) タ−ボ分子ポンプのガスパ−ジ機構
US4268230A (en) Gas ballast for oil sealed mechanical vacuum vane pump
EP0412634B1 (en) Sealing device for oil rotary vacuum pump
JPS61145394A (ja) 分子ポンプ
US5221178A (en) Circumferential flow type liquid pump
US6179573B1 (en) Vacuum pump with inverted motor
KR100507599B1 (ko) 터보분자펌프
JPS6267293A (ja) 外部に油漏れしない自動ベ−ンポンプ装置
KR102061440B1 (ko) 밀폐형 2단 압축기
US4588361A (en) High vacuum rotary pump
JPH04136497A (ja) ターボ真空ポンプ
JPS6143297A (ja) 分子ポンプのガスパ−ジ装置
US20080253903A1 (en) Vacuum pumps with auxiliary pumping stages
JPS609439Y2 (ja) タ−ボ分子ポンプ
JPS6332393Y2 (enrdf_load_stackoverflow)
JPS61104192A (ja) 分子ポンプ
JPS6045792A (ja) タ−ボ分子ポンプ
JP3034968B2 (ja) 真空ポンプの気体軸受装置
JPH0648156Y2 (ja) 真空ポンプのシール装置
WO2022219761A1 (ja) 密閉型圧縮機
JPH0720396Y2 (ja) ターボ分子ポンプのガスパージ機構
JPH034016A (ja) 気体軸受け
JP2590957Y2 (ja) 真空ポンプにおける防塵機構