JPS6141257U - 基板処理装置における液切り部の基板搬送装置 - Google Patents

基板処理装置における液切り部の基板搬送装置

Info

Publication number
JPS6141257U
JPS6141257U JP12594284U JP12594284U JPS6141257U JP S6141257 U JPS6141257 U JP S6141257U JP 12594284 U JP12594284 U JP 12594284U JP 12594284 U JP12594284 U JP 12594284U JP S6141257 U JPS6141257 U JP S6141257U
Authority
JP
Japan
Prior art keywords
substrate
passage hole
wheel
processing
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12594284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0241633Y2 (enEXAMPLES
Inventor
和美 杉田
Original Assignee
大日本スクリ−ン製造株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大日本スクリ−ン製造株式会社 filed Critical 大日本スクリ−ン製造株式会社
Priority to JP12594284U priority Critical patent/JPS6141257U/ja
Publication of JPS6141257U publication Critical patent/JPS6141257U/ja
Application granted granted Critical
Publication of JPH0241633Y2 publication Critical patent/JPH0241633Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photographic Processing Devices Using Wet Methods (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP12594284U 1984-08-21 1984-08-21 基板処理装置における液切り部の基板搬送装置 Granted JPS6141257U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12594284U JPS6141257U (ja) 1984-08-21 1984-08-21 基板処理装置における液切り部の基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12594284U JPS6141257U (ja) 1984-08-21 1984-08-21 基板処理装置における液切り部の基板搬送装置

Publications (2)

Publication Number Publication Date
JPS6141257U true JPS6141257U (ja) 1986-03-15
JPH0241633Y2 JPH0241633Y2 (enEXAMPLES) 1990-11-06

Family

ID=30684631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12594284U Granted JPS6141257U (ja) 1984-08-21 1984-08-21 基板処理装置における液切り部の基板搬送装置

Country Status (1)

Country Link
JP (1) JPS6141257U (enEXAMPLES)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009158790A (ja) * 2007-12-27 2009-07-16 Hitachi Chem Co Ltd 水平搬送型表面処理装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6128591B2 (ja) 2013-04-17 2017-05-17 株式会社フジキン ロック装置及び弁装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009158790A (ja) * 2007-12-27 2009-07-16 Hitachi Chem Co Ltd 水平搬送型表面処理装置

Also Published As

Publication number Publication date
JPH0241633Y2 (enEXAMPLES) 1990-11-06

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