JPS6140767Y2 - - Google Patents

Info

Publication number
JPS6140767Y2
JPS6140767Y2 JP6867282U JP6867282U JPS6140767Y2 JP S6140767 Y2 JPS6140767 Y2 JP S6140767Y2 JP 6867282 U JP6867282 U JP 6867282U JP 6867282 U JP6867282 U JP 6867282U JP S6140767 Y2 JPS6140767 Y2 JP S6140767Y2
Authority
JP
Japan
Prior art keywords
substrate
anode electrode
plate
filament
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6867282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58172434U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6867282U priority Critical patent/JPS58172434U/ja
Publication of JPS58172434U publication Critical patent/JPS58172434U/ja
Application granted granted Critical
Publication of JPS6140767Y2 publication Critical patent/JPS6140767Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
JP6867282U 1982-05-11 1982-05-11 イオン化成膜装置 Granted JPS58172434U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6867282U JPS58172434U (ja) 1982-05-11 1982-05-11 イオン化成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6867282U JPS58172434U (ja) 1982-05-11 1982-05-11 イオン化成膜装置

Publications (2)

Publication Number Publication Date
JPS58172434U JPS58172434U (ja) 1983-11-17
JPS6140767Y2 true JPS6140767Y2 (OSRAM) 1986-11-20

Family

ID=30078432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6867282U Granted JPS58172434U (ja) 1982-05-11 1982-05-11 イオン化成膜装置

Country Status (1)

Country Link
JP (1) JPS58172434U (OSRAM)

Also Published As

Publication number Publication date
JPS58172434U (ja) 1983-11-17

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