JPS6140748B2 - - Google Patents

Info

Publication number
JPS6140748B2
JPS6140748B2 JP23808283A JP23808283A JPS6140748B2 JP S6140748 B2 JPS6140748 B2 JP S6140748B2 JP 23808283 A JP23808283 A JP 23808283A JP 23808283 A JP23808283 A JP 23808283A JP S6140748 B2 JPS6140748 B2 JP S6140748B2
Authority
JP
Japan
Prior art keywords
vacuum
oxide film
aluminum material
aluminum
hydrated oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP23808283A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60128259A (ja
Inventor
Yutaka Kato
Kenji Tsukamoto
Eizo Isoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Altemira Co Ltd
Original Assignee
Showa Aluminum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Aluminum Corp filed Critical Showa Aluminum Corp
Priority to JP23808283A priority Critical patent/JPS60128259A/ja
Priority to DE8484115294T priority patent/DE3476818D1/de
Priority to EP84115294A priority patent/EP0146115B1/en
Priority to US06/682,456 priority patent/US4615747A/en
Publication of JPS60128259A publication Critical patent/JPS60128259A/ja
Publication of JPS6140748B2 publication Critical patent/JPS6140748B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising
    • C23C8/12—Oxidising using elemental oxygen or ozone

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Chemical Treatment Of Metals (AREA)
JP23808283A 1983-12-16 1983-12-16 真空用アルミニウム材の製造法 Granted JPS60128259A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP23808283A JPS60128259A (ja) 1983-12-16 1983-12-16 真空用アルミニウム材の製造法
DE8484115294T DE3476818D1 (en) 1983-12-16 1984-12-12 Process for producing aluminum material for use in vacuum
EP84115294A EP0146115B1 (en) 1983-12-16 1984-12-12 Process for producing aluminum material for use in vacuum
US06/682,456 US4615747A (en) 1983-12-16 1984-12-17 Process for producing aluminum material for use in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23808283A JPS60128259A (ja) 1983-12-16 1983-12-16 真空用アルミニウム材の製造法

Publications (2)

Publication Number Publication Date
JPS60128259A JPS60128259A (ja) 1985-07-09
JPS6140748B2 true JPS6140748B2 (OSRAM) 1986-09-10

Family

ID=17024887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23808283A Granted JPS60128259A (ja) 1983-12-16 1983-12-16 真空用アルミニウム材の製造法

Country Status (1)

Country Link
JP (1) JPS60128259A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63135539U (OSRAM) * 1987-02-23 1988-09-06

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07110987B2 (ja) * 1986-05-15 1995-11-29 昭和アルミニウム株式会社 真空用アルミニウム材の製造方法
US5478524A (en) * 1992-08-24 1995-12-26 Nissan Motor Co., Ltd. Super high vacuum vessel

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63135539U (OSRAM) * 1987-02-23 1988-09-06

Also Published As

Publication number Publication date
JPS60128259A (ja) 1985-07-09

Similar Documents

Publication Publication Date Title
EP0146115B1 (en) Process for producing aluminum material for use in vacuum
JPH0421509A (ja) 高純度可撓性膨張黒鉛シート及びその製造方法
JPS6140748B2 (OSRAM)
JPS6140747B2 (OSRAM)
KR20120075460A (ko) 팽창 흑연 시트
JPS60118618A (ja) 膨張黒鉛に含まれる残留イオウの低減方法
JPH0461069B2 (OSRAM)
KR900004489B1 (ko) 질화알루미늄 분말의 제조방법
US3282807A (en) Process for purifying electrode surfaces
JPH0328515B2 (OSRAM)
JPH0461068B2 (OSRAM)
JPS62267462A (ja) 真空用アルミニウム材の製造方法
JPH0461067B2 (OSRAM)
JPH10237692A (ja) Ａｌ又はＡｌ合金製真空チャンバ部材の表面処理方法
JP4308556B2 (ja) 電解コンデンサ電極用アルミニウム材および電解コンデンサ電極材の製造方法並びに電解コンデンサ
JP3337506B2 (ja) 電解コンデンサ電極用アルミニウム材料の製造方法
JPS6374910A (ja) 高純度四弗化珪素の製造法
JPH0289590A (ja) ろう材及びろう付方法
JPH02101157A (ja) 真空蒸着用銅基材の製造方法
JP4671218B2 (ja) 電解コンデンサ用アルミニウム箔の製造方法
JPS631135B2 (OSRAM)
SU704684A1 (ru) Способ очистки деталей из алюмооксидной керамики
JP4842618B2 (ja) アルミニウム及びアルミニウム合金の表面処理方法
US4326898A (en) Method for forming material surfaces
JPH04311550A (ja) 電解コンデンサ電極用アルミニウム箔の製造方法

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees