JPH0461067B2 - - Google Patents

Info

Publication number
JPH0461067B2
JPH0461067B2 JP59010630A JP1063084A JPH0461067B2 JP H0461067 B2 JPH0461067 B2 JP H0461067B2 JP 59010630 A JP59010630 A JP 59010630A JP 1063084 A JP1063084 A JP 1063084A JP H0461067 B2 JPH0461067 B2 JP H0461067B2
Authority
JP
Japan
Prior art keywords
vacuum
processing
oxide film
etching
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59010630A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60152666A (ja
Inventor
Yutaka Kato
Kenji Tsukamoto
Eizo Isoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Altemira Co Ltd
Original Assignee
Showa Aluminum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Aluminum Corp filed Critical Showa Aluminum Corp
Priority to JP1063084A priority Critical patent/JPS60152666A/ja
Publication of JPS60152666A publication Critical patent/JPS60152666A/ja
Publication of JPH0461067B2 publication Critical patent/JPH0461067B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising
    • C23C8/12—Oxidising using elemental oxygen or ozone

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
JP1063084A 1984-01-23 1984-01-23 真空用アルミニウム材の製造法 Granted JPS60152666A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1063084A JPS60152666A (ja) 1984-01-23 1984-01-23 真空用アルミニウム材の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1063084A JPS60152666A (ja) 1984-01-23 1984-01-23 真空用アルミニウム材の製造法

Publications (2)

Publication Number Publication Date
JPS60152666A JPS60152666A (ja) 1985-08-10
JPH0461067B2 true JPH0461067B2 (OSRAM) 1992-09-29

Family

ID=11755536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1063084A Granted JPS60152666A (ja) 1984-01-23 1984-01-23 真空用アルミニウム材の製造法

Country Status (1)

Country Link
JP (1) JPS60152666A (OSRAM)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60128258A (ja) * 1983-12-16 1985-07-09 Showa Alum Corp 真空用アルミニウム材の製造法

Also Published As

Publication number Publication date
JPS60152666A (ja) 1985-08-10

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