JPS6140673U - Semiconductor device testing equipment - Google Patents
Semiconductor device testing equipmentInfo
- Publication number
- JPS6140673U JPS6140673U JP12662584U JP12662584U JPS6140673U JP S6140673 U JPS6140673 U JP S6140673U JP 12662584 U JP12662584 U JP 12662584U JP 12662584 U JP12662584 U JP 12662584U JP S6140673 U JPS6140673 U JP S6140673U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- test
- device testing
- testing equipment
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【図面の簡単な説明】
第1図は本考案の一実施例の要部断面図である。
第2図は従来の発光半導体素子の高温特性試験装置の要
部断面図である。
1・・・供試レーザダイオード、2・・・恒温槽用断熱
材の壁、3・・・バンドルタイプ光ガラスファイバー、
4・・・パッドルタイプ光ガラスファイバーの入射端面
、5・・ルーザ光検出用太陽電池、6・・・バンドルタ
イプ光ガラスファイバーの出射端面、7・・・集光レン
ズ、8・・・ミキシングロツド。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a sectional view of a main part of an embodiment of the present invention. FIG. 2 is a sectional view of a main part of a conventional high-temperature characteristic testing apparatus for light emitting semiconductor devices. 1... Test laser diode, 2... Insulating wall for constant temperature oven, 3... Bundle type optical glass fiber,
4... Input end face of paddle type optical glass fiber, 5... Solar cell for loser light detection, 6... Output end face of bundle type optical glass fiber, 7... Condensing lens, 8... Mixing lot Do.
Claims (1)
子が発生する光を該恒温槽外に設けた受光素子により受
け、前記供試半導体素子の発光特性を試験する半導体素
子試験装置において、前記供試半導体素子と前記受光素
子との間を光接続するための光ガラスファイバーの入光
側に光ミキシングロツドを設けた事を特徴とする半導体
素子試験装置。In a semiconductor device testing device that holds a test semiconductor device in a thermostatic oven, receives light generated by the test semiconductor device by a light receiving element provided outside the thermostatic oven, and tests the light emitting characteristics of the test semiconductor device. . A semiconductor device testing device, characterized in that an optical mixing rod is provided on the light input side of an optical glass fiber for optically connecting the semiconductor device under test and the light receiving device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12662584U JPS6140673U (en) | 1984-08-21 | 1984-08-21 | Semiconductor device testing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12662584U JPS6140673U (en) | 1984-08-21 | 1984-08-21 | Semiconductor device testing equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6140673U true JPS6140673U (en) | 1986-03-14 |
Family
ID=30685298
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12662584U Pending JPS6140673U (en) | 1984-08-21 | 1984-08-21 | Semiconductor device testing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6140673U (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5641272B2 (en) * | 1978-07-07 | 1981-09-26 | ||
JPS5813510B2 (en) * | 1975-06-24 | 1983-03-14 | クロサキヨウギヨウ カブシキガイシヤ | Maguro direct bond brick |
-
1984
- 1984-08-21 JP JP12662584U patent/JPS6140673U/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5813510B2 (en) * | 1975-06-24 | 1983-03-14 | クロサキヨウギヨウ カブシキガイシヤ | Maguro direct bond brick |
JPS5641272B2 (en) * | 1978-07-07 | 1981-09-26 |
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