JPS6139289Y2 - - Google Patents
Info
- Publication number
- JPS6139289Y2 JPS6139289Y2 JP18515181U JP18515181U JPS6139289Y2 JP S6139289 Y2 JPS6139289 Y2 JP S6139289Y2 JP 18515181 U JP18515181 U JP 18515181U JP 18515181 U JP18515181 U JP 18515181U JP S6139289 Y2 JPS6139289 Y2 JP S6139289Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- scale
- reflected
- phase
- diffraction grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 11
- 230000001427 coherent effect Effects 0.000 claims description 5
- 239000000284 extract Substances 0.000 claims 1
- 230000010287 polarization Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981185151U JPS5889810U (ja) | 1981-12-11 | 1981-12-11 | 光学式スケ−ル読取装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981185151U JPS5889810U (ja) | 1981-12-11 | 1981-12-11 | 光学式スケ−ル読取装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5889810U JPS5889810U (ja) | 1983-06-17 |
| JPS6139289Y2 true JPS6139289Y2 (ru) | 1986-11-11 |
Family
ID=29985943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981185151U Granted JPS5889810U (ja) | 1981-12-11 | 1981-12-11 | 光学式スケ−ル読取装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5889810U (ru) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3633574A1 (de) * | 1986-10-02 | 1988-04-14 | Heidenhain Gmbh Dr Johannes | Lichtelektrische winkelmesseinrichtung |
| JP2019211360A (ja) * | 2018-06-06 | 2019-12-12 | ファナック株式会社 | エンコーダ |
-
1981
- 1981-12-11 JP JP1981185151U patent/JPS5889810U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5889810U (ja) | 1983-06-17 |
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