JPS6136377B2 - - Google Patents

Info

Publication number
JPS6136377B2
JPS6136377B2 JP52099493A JP9949377A JPS6136377B2 JP S6136377 B2 JPS6136377 B2 JP S6136377B2 JP 52099493 A JP52099493 A JP 52099493A JP 9949377 A JP9949377 A JP 9949377A JP S6136377 B2 JPS6136377 B2 JP S6136377B2
Authority
JP
Japan
Prior art keywords
hydrazine
etching solution
concentration
platinum electrodes
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52099493A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5433673A (en
Inventor
Yoshiaki Okajima
Susumu Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9949377A priority Critical patent/JPS5433673A/ja
Publication of JPS5433673A publication Critical patent/JPS5433673A/ja
Publication of JPS6136377B2 publication Critical patent/JPS6136377B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P70/15—

Landscapes

  • Weting (AREA)
JP9949377A 1977-08-22 1977-08-22 Automatic etching unit for semiconductor composite Granted JPS5433673A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9949377A JPS5433673A (en) 1977-08-22 1977-08-22 Automatic etching unit for semiconductor composite

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9949377A JPS5433673A (en) 1977-08-22 1977-08-22 Automatic etching unit for semiconductor composite

Publications (2)

Publication Number Publication Date
JPS5433673A JPS5433673A (en) 1979-03-12
JPS6136377B2 true JPS6136377B2 (OSRAM) 1986-08-18

Family

ID=14248814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9949377A Granted JPS5433673A (en) 1977-08-22 1977-08-22 Automatic etching unit for semiconductor composite

Country Status (1)

Country Link
JP (1) JPS5433673A (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10793806B2 (en) 2010-09-24 2020-10-06 Ecolab Usa Inc. Conveyor lubricants including emulsions and methods employing them
US10815448B2 (en) 2005-03-15 2020-10-27 Ecolab Usa Inc. Lubricant for conveying containers
US10844314B2 (en) 2013-03-11 2020-11-24 Ecolab Usa Inc. Lubrication of transfer plates using an oil or oil in water emulsions
US10851325B2 (en) 2005-03-15 2020-12-01 Ecolab Usa Inc. Dry lubricant for conveying containers

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0451474Y2 (OSRAM) * 1986-05-15 1992-12-03

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10815448B2 (en) 2005-03-15 2020-10-27 Ecolab Usa Inc. Lubricant for conveying containers
US10851325B2 (en) 2005-03-15 2020-12-01 Ecolab Usa Inc. Dry lubricant for conveying containers
US10793806B2 (en) 2010-09-24 2020-10-06 Ecolab Usa Inc. Conveyor lubricants including emulsions and methods employing them
US10844314B2 (en) 2013-03-11 2020-11-24 Ecolab Usa Inc. Lubrication of transfer plates using an oil or oil in water emulsions
US11312919B2 (en) 2013-03-11 2022-04-26 Ecolab Usa Inc. Lubrication of transfer plates using an oil or oil in water emulsions

Also Published As

Publication number Publication date
JPS5433673A (en) 1979-03-12

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