JPS6136164B2 - - Google Patents
Info
- Publication number
- JPS6136164B2 JPS6136164B2 JP10764278A JP10764278A JPS6136164B2 JP S6136164 B2 JPS6136164 B2 JP S6136164B2 JP 10764278 A JP10764278 A JP 10764278A JP 10764278 A JP10764278 A JP 10764278A JP S6136164 B2 JPS6136164 B2 JP S6136164B2
- Authority
- JP
- Japan
- Prior art keywords
- cover
- circuit board
- pressure
- space
- semiconductor diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 17
- 210000000078 claw Anatomy 0.000 claims description 11
- 238000007789 sealing Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
- G01L19/143—Two part housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10764278A JPS5535222A (en) | 1978-09-04 | 1978-09-04 | Pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10764278A JPS5535222A (en) | 1978-09-04 | 1978-09-04 | Pressure transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5535222A JPS5535222A (en) | 1980-03-12 |
| JPS6136164B2 true JPS6136164B2 (enrdf_load_stackoverflow) | 1986-08-16 |
Family
ID=14464360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10764278A Granted JPS5535222A (en) | 1978-09-04 | 1978-09-04 | Pressure transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5535222A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10322017B8 (de) | 2003-05-16 | 2005-02-24 | Sitronic Gesellschaft für elektrotechnische Ausrüstung mbH. & Co. KG | Sensoreinheit |
-
1978
- 1978-09-04 JP JP10764278A patent/JPS5535222A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5535222A (en) | 1980-03-12 |
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