JPS6135937Y2 - - Google Patents

Info

Publication number
JPS6135937Y2
JPS6135937Y2 JP1978106387U JP10638778U JPS6135937Y2 JP S6135937 Y2 JPS6135937 Y2 JP S6135937Y2 JP 1978106387 U JP1978106387 U JP 1978106387U JP 10638778 U JP10638778 U JP 10638778U JP S6135937 Y2 JPS6135937 Y2 JP S6135937Y2
Authority
JP
Japan
Prior art keywords
slit
scattered light
raman scattered
slits
fluorescence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978106387U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5522692U (pm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978106387U priority Critical patent/JPS6135937Y2/ja
Publication of JPS5522692U publication Critical patent/JPS5522692U/ja
Application granted granted Critical
Publication of JPS6135937Y2 publication Critical patent/JPS6135937Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP1978106387U 1978-08-01 1978-08-01 Expired JPS6135937Y2 (pm)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978106387U JPS6135937Y2 (pm) 1978-08-01 1978-08-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978106387U JPS6135937Y2 (pm) 1978-08-01 1978-08-01

Publications (2)

Publication Number Publication Date
JPS5522692U JPS5522692U (pm) 1980-02-14
JPS6135937Y2 true JPS6135937Y2 (pm) 1986-10-18

Family

ID=29049518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978106387U Expired JPS6135937Y2 (pm) 1978-08-01 1978-08-01

Country Status (1)

Country Link
JP (1) JPS6135937Y2 (pm)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200255U (pm) * 1986-06-10 1987-12-19
JP2010286493A (ja) * 2004-01-23 2010-12-24 Horiba Ltd 基板検査装置
JP2005233928A (ja) * 2004-01-23 2005-09-02 Horiba Ltd 基板検査装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3819945A (en) * 1971-07-01 1974-06-25 Environmental Data Corp Spectrometers
JPS5248506A (en) * 1975-10-15 1977-04-18 Mazda Motor Corp Wear-resisting high phosphorus sintered alloy

Also Published As

Publication number Publication date
JPS5522692U (pm) 1980-02-14

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