JPS6135750Y2 - - Google Patents

Info

Publication number
JPS6135750Y2
JPS6135750Y2 JP10475980U JP10475980U JPS6135750Y2 JP S6135750 Y2 JPS6135750 Y2 JP S6135750Y2 JP 10475980 U JP10475980 U JP 10475980U JP 10475980 U JP10475980 U JP 10475980U JP S6135750 Y2 JPS6135750 Y2 JP S6135750Y2
Authority
JP
Japan
Prior art keywords
bellows
protrusion
hole
fluid
pump casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10475980U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5728186U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10475980U priority Critical patent/JPS6135750Y2/ja
Publication of JPS5728186U publication Critical patent/JPS5728186U/ja
Application granted granted Critical
Publication of JPS6135750Y2 publication Critical patent/JPS6135750Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP10475980U 1980-07-24 1980-07-24 Expired JPS6135750Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10475980U JPS6135750Y2 (en:Method) 1980-07-24 1980-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10475980U JPS6135750Y2 (en:Method) 1980-07-24 1980-07-24

Publications (2)

Publication Number Publication Date
JPS5728186U JPS5728186U (en:Method) 1982-02-15
JPS6135750Y2 true JPS6135750Y2 (en:Method) 1986-10-17

Family

ID=29466141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10475980U Expired JPS6135750Y2 (en:Method) 1980-07-24 1980-07-24

Country Status (1)

Country Link
JP (1) JPS6135750Y2 (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2777704B2 (ja) * 1995-09-29 1998-07-23 日本ピラー工業株式会社 ベローズ式定量ポンプ
JP3577435B2 (ja) * 1999-11-29 2004-10-13 日本ピラー工業株式会社 ベローズを有する流体機器

Also Published As

Publication number Publication date
JPS5728186U (en:Method) 1982-02-15

Similar Documents

Publication Publication Date Title
KR100358965B1 (ko) 맥동 저감장치부착 펌프
JP3564362B2 (ja) 脈動減衰装置
JPS6135750Y2 (en:Method)
JPH10196521A (ja) 半導体製造装置用ポンプ
JP3391446B2 (ja) ポンプの脈動減衰装置
US4406587A (en) Vibration actuated liquid pump
JPS6313029B2 (en:Method)
US4416589A (en) Vibration actuated liquid pump
JP3931048B2 (ja) 半導体製造装置用ポンプ
US3847513A (en) Air pump
US2442631A (en) Pump
US4279573A (en) High pressure pump
KR20240036558A (ko) 액체공급장치
JP2001124282A (ja) サージ抑制装置
JPH0762473B2 (ja) ポンプ装置
JP2573154B2 (ja) ベローズ式定量ポンプ
JPS58137883U (ja) 流体吐出装置
JP2526677Y2 (ja) 液体圧送往復ポンプ用圧力振動緩衝装置の空気補給装置
JPH0217713B2 (en:Method)
CN221991531U (zh) 一种注油阀
JPH0220546Y2 (en:Method)
JP2777704B2 (ja) ベローズ式定量ポンプ
JPS58158871U (ja) 駆動装置
JPH0220545Y2 (en:Method)
JP2879137B2 (ja) ベローズ式定量ポンプ