JPS6135747Y2 - - Google Patents
Info
- Publication number
- JPS6135747Y2 JPS6135747Y2 JP1981113602U JP11360281U JPS6135747Y2 JP S6135747 Y2 JPS6135747 Y2 JP S6135747Y2 JP 1981113602 U JP1981113602 U JP 1981113602U JP 11360281 U JP11360281 U JP 11360281U JP S6135747 Y2 JPS6135747 Y2 JP S6135747Y2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- metal plate
- piezoelectric
- pump
- pump chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 19
- 239000003566 sealing material Substances 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 6
- 239000012530 fluid Substances 0.000 description 5
- 238000005452 bending Methods 0.000 description 3
- 230000001154 acute effect Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
Landscapes
- Reciprocating Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981113602U JPS5818083U (ja) | 1981-07-30 | 1981-07-30 | 圧電振動子ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981113602U JPS5818083U (ja) | 1981-07-30 | 1981-07-30 | 圧電振動子ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5818083U JPS5818083U (ja) | 1983-02-03 |
| JPS6135747Y2 true JPS6135747Y2 (th) | 1986-10-17 |
Family
ID=29907898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981113602U Granted JPS5818083U (ja) | 1981-07-30 | 1981-07-30 | 圧電振動子ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5818083U (th) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6017279A (ja) * | 1983-07-11 | 1985-01-29 | Tamagawa Seiki Kk | 電歪振動子を用いる気体ポンプ |
| JP2772525B2 (ja) * | 1988-07-27 | 1998-07-02 | 株式会社日本計器製作所 | 圧電ポンプ |
| JP5113115B2 (ja) * | 2009-04-15 | 2013-01-09 | 特許機器株式会社 | 圧電型加速度センサ |
-
1981
- 1981-07-30 JP JP1981113602U patent/JPS5818083U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5818083U (ja) | 1983-02-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4938742A (en) | Piezoelectric micropump with microvalves | |
| US10900480B2 (en) | Disc pump with advanced actuator | |
| AU679311B2 (en) | Micropump | |
| US20030117044A1 (en) | Electroactive polymer actuator and diaphragm pump using the same | |
| KR960031858A (ko) | 다이어프램밸브 | |
| JPS6135747Y2 (th) | ||
| JPH0332373A (ja) | 超音波モータ | |
| US6257068B1 (en) | Capacitive pressure sensor having petal electrodes | |
| JP2001221166A (ja) | 螺旋パイプを備えた容積型ポンプ及び流体移送方法 | |
| CN212508742U (zh) | 微型泵设备 | |
| US20230313790A1 (en) | Fluid control device | |
| RU175857U1 (ru) | Пьезоэлектрический микронасос | |
| JPS61171891A (ja) | 圧電型ポンプ | |
| JPH0128313Y2 (th) | ||
| JPS6270676A (ja) | ピエゾポンプ | |
| WO1989007199A1 (en) | Pump | |
| JPH0350300Y2 (th) | ||
| JPH03542Y2 (th) | ||
| JPS6270677A (ja) | ピエゾポンプ | |
| SU1430592A1 (ru) | Пьезогидравлический насос | |
| JPH0128312Y2 (th) | ||
| JPWO2019102982A1 (ja) | メタルダイアフラムダンパ | |
| JP7126696B2 (ja) | パルセーションダンパー | |
| CN215918085U (zh) | 压电超声换能器 | |
| JPS6128776A (ja) | ポンプ |