JPS6135704B2 - - Google Patents
Info
- Publication number
- JPS6135704B2 JPS6135704B2 JP52044269A JP4426977A JPS6135704B2 JP S6135704 B2 JPS6135704 B2 JP S6135704B2 JP 52044269 A JP52044269 A JP 52044269A JP 4426977 A JP4426977 A JP 4426977A JP S6135704 B2 JPS6135704 B2 JP S6135704B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- forming
- substrate
- dielectric layer
- iil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 34
- 239000013078 crystal Substances 0.000 claims description 17
- 239000012535 impurity Substances 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 20
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 16
- 238000000034 method Methods 0.000 description 11
- 235000012239 silicon dioxide Nutrition 0.000 description 10
- 239000000377 silicon dioxide Substances 0.000 description 10
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 6
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000005498 polishing Methods 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 241001671656 Hedera rhombea Species 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0214—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L
- H01L27/0229—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L of bipolar structures
- H01L27/0233—Integrated injection logic structures [I2L]
- H01L27/0244—I2L structures integrated in combination with analog structures
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Element Separation (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Bipolar Integrated Circuits (AREA)
- Logic Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4426977A JPS53129589A (en) | 1977-04-18 | 1977-04-18 | Integrated circuit unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4426977A JPS53129589A (en) | 1977-04-18 | 1977-04-18 | Integrated circuit unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53129589A JPS53129589A (en) | 1978-11-11 |
| JPS6135704B2 true JPS6135704B2 (US06826419-20041130-M00005.png) | 1986-08-14 |
Family
ID=12686787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4426977A Granted JPS53129589A (en) | 1977-04-18 | 1977-04-18 | Integrated circuit unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53129589A (US06826419-20041130-M00005.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59145538A (ja) * | 1983-10-21 | 1984-08-21 | Hitachi Ltd | 半導体装置の製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4941473A (US06826419-20041130-M00005.png) * | 1972-07-07 | 1974-04-18 | ||
| JPS5179591A (US06826419-20041130-M00005.png) * | 1975-01-06 | 1976-07-10 | Hitachi Ltd | |
| JPS51108787A (US06826419-20041130-M00005.png) * | 1975-02-20 | 1976-09-27 | Siemens Ag |
-
1977
- 1977-04-18 JP JP4426977A patent/JPS53129589A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4941473A (US06826419-20041130-M00005.png) * | 1972-07-07 | 1974-04-18 | ||
| JPS5179591A (US06826419-20041130-M00005.png) * | 1975-01-06 | 1976-07-10 | Hitachi Ltd | |
| JPS51108787A (US06826419-20041130-M00005.png) * | 1975-02-20 | 1976-09-27 | Siemens Ag |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53129589A (en) | 1978-11-11 |
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